電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
125 巻, 9 号
選択された号の論文の5件中1~5を表示しています
論文
  • Virupaksha D. Chitnis, M. Singaperumal, M. M. Nayak, K. Rajanna
    2005 年 125 巻 9 号 p. 369-373
    発行日: 2005年
    公開日: 2005/12/01
    ジャーナル フリー
    A piezoelectric crystal based acoustic sensor suitable for aerospace and similar applications has been designed and made. Detailed information on the design considerations and construction of the sensor assembly are given. The complete assembly was hermetically sealed by electron beam welding process in order to prevent the effects due to humidity etc. Observations on the performance of the developed acoustic sensor are presented which include, frequency response & amplitude response characteristics, sensitivity, linearity, cross-sensitivity to vibration and resistance to shock & vibration. From the results obtained, it is concluded that the acoustic sensor developed is suitable for the above mentioned application areas.
  • Takahiro Namazu, Shozo Inoue, Hideki Takemoto, Keiji Koterazawa
    2005 年 125 巻 9 号 p. 374-379
    発行日: 2005年
    公開日: 2005/12/01
    ジャーナル フリー
    This paper describes measurement of mechanical properties of micron-thin polycrystalline titanium nitride (TiN) films. We developed a novel tensile test technique that can directly measure lateral elastic strain of a microscale single/poly-crystalline specimen by means of X-ray diffraction (XRD), which enables evaluation of not only Young's modulus but also Poisson's ratio of TiN films. TiN films having thicknesses of 0.5 μm to 1.6 μm are deposited onto the top and bottom surfaces of a microscale single crystal silicon (Si) specimen. The deposition is carried out by r.f. reactive magnetron sputtering under Ar partial pressure ranging from 0.7 Pa to 1.0 Pa. Average values of Young's modulus and Poisson's ratio for the Si monolayer specimen are found to be 169 GPa and 0.35, respectively, which are in close agreement with analytical values. TiN films deposited under an Ar partial pressure of 0.7 Pa have average Young's modulus of 290 GPa and Poisson's ratio of 0.36. These values gradually decrease with increasing Ar partial pressure, but are independent of TiN film thickness. Fracture strength of a TiN/Si/TiN composite specimen shows dependence on film thickness, regardless of Ar partial pressure.
  • 森澤 正之, 渡邊 智也, 武藤 真三
    2005 年 125 巻 9 号 p. 380-386
    発行日: 2005年
    公開日: 2005/12/01
    ジャーナル フリー
    Two types of plastic optical fiber (POF) sensors for detecting amine vapor, which is produced from decomposed fish food, have been studied. One is based on the absorbance change in cladding polymer doped with Cresol-red dye. The other is based on the swelling phenomena in cladding polymer.
    Both POF-type amine sensors showed good sensitivity and reproducibility aginst a vapor phase methylamine. Using these POF amine sensors and a low cost signal processing system, an optical sensing of fish-food freshness can be possible.
  • 有吉 雄二, 仲村 恵右, 番 政広, 武田 宗久
    2005 年 125 巻 9 号 p. 387-392
    発行日: 2005年
    公開日: 2005/12/01
    ジャーナル フリー
    This paper presents a new type of bidirectional thermal flow sensor which has a wide dynamic range and excellent temperature characteristics. This sensor has a pair of heaters and a temperature sensor on a diaphragm. The heaters are located on opposite sides to each other. A single bridge circuit provides an adequate heating current to the upper stream heater so as to keep the voltages supplied to each heater balanced. The heating current, which represents the required sensor output, increases as the flow rate increases. A reverse flow can be also detected since the current decreases when the flow is reversed. A wide dynamic range of 500 and excellent temperature characteristics of less than ±3% of the reading value of flow rate (from 0 to 50°C) were obtained. This sensor responded to a step change of flow rate from 40 to 137 L/min within 0.5 sec.
  • 石束 真典, 阿部 昌昭, 北條 洋明, 水野 潤, 庄子 習一
    2005 年 125 巻 9 号 p. 393-397
    発行日: 2005年
    公開日: 2005/12/01
    ジャーナル フリー
    Prototype of metal electrodes implanted PDMS microchannel to control the 3-D electric field or precise temperature and new fabrication method were proposed. Our tentative goal is to fabricate a PDMS microchannel which has vertical and horizontal electrodes pairs. Accurate angles of 90 degree between the each electrode are obtained. CYTOP back plates under the metal electrodes were employed due to the residual stress. The CYTOP was worked as the protection layer from photolithography process containing organic solvent. The proposed micro channel consists of the single electrode implanted PDMS substrate and three electrodes of upper and both side implanted cover PDMS structure. We develop novel assembly method starting with three electrodes installed planar PDMS in order to form the 3-D microstructures.
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