IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
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Volume 116, Issue 2
Displaying 1-6 of 6 articles from this issue
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  • Locomotion Mechanism for Micro Machines
    Tadashi Hattori
    1996 Volume 116 Issue 2 Pages 43-46
    Published: March 20, 1996
    Released on J-STAGE: April 01, 2009
    DOIhttps://doi.org/10.1541/ieejsmas.116.43
    JOURNAL FREE ACCESS
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  • On Establishing the Technical Committee of Sensor Systems and Applications
    [in Japanese]
    1996 Volume 116 Issue 2 Pages 47-55
    Published: March 20, 1996
    Released on J-STAGE: April 01, 2009
    DOIhttps://doi.org/10.1541/ieejsmas.116.47
    JOURNAL FREE ACCESS
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  • PNEUMATIC MICROVALVE BASED ON SILICON MICROMACHINING
    Dong Youn Sim, Toru Kurabayashi, Masayoshi Esashi
    1996 Volume 116 Issue 2 Pages 56-61
    Published: March 20, 1996
    Released on J-STAGE: April 01, 2009
    DOIhttps://doi.org/10.1541/ieejsmas.116.56
    JOURNAL FREE ACCESS
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    A silicon microvalve to control fine gas flow was developed for advanced semiconductor fabrication processes. The valve is operated by a combination of pneumatic and electrostatic forces. It is composed of a glass-silicon-silicon-glass structure using silicon bulk micromachining. An anodically bonded glass-silicon combination is further bonded to another glass-silicon combination using Au-Si eutectic bonding. The structure has a built-in bias force for closing the valve normally. A polished silicon surface is utilized as a valve seat in order to decrease the gas leakage. The valve has corrugated diaphragms to increase maximum gas flow rate. The gas flow rate could be controlled from 0.1 sccm to 35 sccm at the the inlet pressure range of 0.13-0.66kgf/cm2. This microvalve can be used in the temperature range from 25 to 120°C.
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  • Development of Multi-Gas-Sensor System for evaluating Quality of Consomme Soup
    Yuichi Anno, Jun Tamaki, Yasukazu Asano, Kenji Hayashi, Norio Miura, N ...
    1996 Volume 116 Issue 2 Pages 62-67
    Published: March 20, 1996
    Released on J-STAGE: April 01, 2009
    DOIhttps://doi.org/10.1541/ieejsmas.116.62
    JOURNAL FREE ACCESS
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    A sensor array system was composed by using four gas sensor elements based on semiconducting oxides, i.e., Rh(0.4wt%)-WO3, MoO3(5wt%)-ZnO, Er2O3(5wt%)-ZnO and Pr6O11(5wt%)-Fe2O3. These elements were sensitive and selective to the important flavor components of beef consomme soup of methylpyrazine, acetone, capronaldehyde and dimethyldisulfide, respectively. Upon exposure to the vapor of consomme soup, the sensor array was found to give a sensitivity pattern which changed sensitively depending on the quality of consomme soup. This suggests the possibility of applying such a multi-sensor array system for the soup-quality control.
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  • Modeling and Verification in Silicon Micro-Mechanical Structures
    Kenichiro Suzuki
    1996 Volume 116 Issue 2 Pages 68-76
    Published: March 20, 1996
    Released on J-STAGE: April 01, 2009
    DOIhttps://doi.org/10.1541/ieejsmas.116.68
    JOURNAL FREE ACCESS
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    A design issue, dependent on mechanical and geometrical parameters, is described related to silicon micro-mechanical structures. A piezoresistive pressure sensor fabricated by deeply anisotropic etching from a silicon substrate is modeled and analyzed by involving the rim boundary effect, caused by a gently tapered shape around a thin diaphragm, and large deflection effect, causing a nonlinear response to a load. Experimental results indicate that the calculated values agree very well with measured ones. A doubly-supported beam having residual stress due to deep boron diffusion is also modeled, allowing a set of elastic coefficients different from that for an undoped silicon to be derived. Sensitivity in capacitive sensors based on the doubly-supported beam structures is indicated as being considerably largely decreased due to the residual stress. The calculated sensitivity agrees fairly well with measured one.
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  • Through hole wires batch-fabricated by micromachining
    Satoshi Konishi, Hiroyuki Fujita
    1996 Volume 116 Issue 2 Pages 77-78
    Published: March 20, 1996
    Released on J-STAGE: April 01, 2009
    DOIhttps://doi.org/10.1541/ieejsmas.116.77
    JOURNAL FREE ACCESS
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