The purpose of this article is for the establish of the releasing technologies of ferroelectric thin film capacitors using the internal stress of plated film. The stress analysis in simulation and the confirmation of experiment was carried out. As a result, it was demonstrated that the thin film capacitor can be actually released off. It was also confirmed that the performance as a capacitor after releasing was also good for the expected application.

In the fields of medical care and sports science, evaluation of muscle function during exercises is required. Recently, mechanomyogram (MMG) reflecting the mechanical activity attracts attention as an evaluation method of muscle function. Accelerometers and microphones have already been used as MMG sensors. However, they are difficult to measure MMG signals during physical exercises with body movements. In this research, it is aimed at developing a small MMG sensor that enables MMG measurement during exercise. As for a small sensor, an MMG sensor using a piezoelectric polymer material has been fabricated and evaluated. In the experiments, we have measured MMG of the biceps brachialis muscle in isometric contraction. The result shows the effectiveness of the fabricated sensor for MMG measurement.

To reduce the environmental risks posed by mercury (Hg), a simple and rapid detection system for Hg in the environment is needed. We developed a simple Hg measurement method for detecting of Hg in liquid phase using quartz crystal microbalance (QCM-Hg). Mercury is reduced into Hg⁰ by adding the reducing solution (SnCl₂) to the divalent Hg²⁺ in the sample solution. Then, Hg is turned into vapor in reactor bottle by flowing air. It (QCM-Hg) utilizes the direct reaction of Hg and the Au electrode of the quartz crystal element via the phenomenon of Au-Hg amalgamation. In the case of 0.0005 mg/L in liquid phase, a frequency shift of about 13 Hz is obtained using a 20 MHz quartz crystal element. This new detection system allows easy measurement of very low concentrations of Hg in liquid phase.