IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Volume 127, Issue 10
Displaying 1-5 of 5 articles from this issue
Review
  • Toyosaka Moriizumi
    2007 Volume 127 Issue 10 Pages 421-424
    Published: October 01, 2007
    Released on J-STAGE: October 01, 2007
    JOURNAL FREE ACCESS
    The Society E is the internal organization of Institute of Electrical Engineers, Japan, for the scientists and engineers in the field of sensors and micro-machining technology. The present paper deals with how to expand its activity toward the traditional and classical sensor fields, which could be innovated by the advanced MEMS technology. MEMS technology also might give rise to the active collaboration among the societies, which could create a lot of new sensors and sensing systems.
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Paper
  • Tatsuya Shimbo, Masaki Fujii, Ayako Sawada, Takashi Oyabu, Haruhiko Ki ...
    2007 Volume 127 Issue 10 Pages 425-430
    Published: October 01, 2007
    Released on J-STAGE: October 01, 2007
    JOURNAL FREE ACCESS
    Plant is affected by environmental factors. For example, these are temperature, humidity and light intensity. The light intensity affected strongly to the plant. The plant produces glucose and oxygen with photosynthesis. Moreover, light intensity is important to purify the contaminants in the atmosphere. In this study, it was examined whether the plant is affected by temperature, wind grade and soil moisture using bioelectric potential characteristics of the plant. Especially plant bioelectric potential to light intensity change was measured. The measurement was carried out in indoor and outdoor. As for the result, the differences of plant bioelectric potential characteristics in the indoor and outdoor were recognized. At that analysis, the integrated value of plant bioelectric potential for 1 minute (vm1) was adopted. Moreover, a high correlation was indicated between the vm1 and light intensity. The correlation coefficient was R2=0.94. It becomes obvious that the plant is affected strongly by light intensity and the plant can understand the environmental factors like light intensity. The characteristics are found by measuring bioelectric potential of the plant. The environmental sensing can be possible by the use of the plant bioelectric potential.
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  • Fusao Kohsaka, Jinxing Liang, Takahiro Matsuo, Toshitsugu Ueda
    2007 Volume 127 Issue 10 Pages 431-436
    Published: October 01, 2007
    Released on J-STAGE: October 01, 2007
    JOURNAL FREE ACCESS
    Many kinds of tilt sensors have been developed and applied to the field of tilt angle measurement. However, the improvement of a “Size”, “Cost”, “Operability” and other “Performances” is expected. On the other hand, the high performance acceleration sensors were developed by MEMS technology, but there is almost no high sensitive MEMS sensor that detects a minute gravity change. We examined the possibility of development of tilt sensor fabricated by quartz crystal anisotropic-etching technology which is suitable for mass production.
    The developed tilt sensor is constructed of “Beam spring”, “Moving element” and “Capacitive detector of comb electrode”. The feature of this sensor is that sensor chip is placed horizontally, and this arrangement enables fabrication of “Two axes sensor” on one wafer chip. We developed quartz tilt sensor using our laboratory fabrication process. Size of sensor chip is 5×5×0.1 mm3, and the evaluation result showed the highest level performance of 0.0001 degree resolution.
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  • Shin-ichirou Tezuka, Nobuhiko Kanbara
    2007 Volume 127 Issue 10 Pages 437-442
    Published: October 01, 2007
    Released on J-STAGE: October 01, 2007
    JOURNAL FREE ACCESS
    The adhesion judgement formula of the mirror with clamped beams is derived by the theoretical and numerical calculation. In design phase of the MEMS structure, it is difficult to judge the structure adheres to the substrate or not except circle plates or beams, and the adhesion design is liable to become trial and error. We point to a mirror with clamped beams as an example of an adhesion problem of the complicated structures, and have tried to derive the adhesion jugdement formula of the mirror with clamped beams we can jugde the mirror adheres to the substrate or not by using the dimension of the mirror and the adhesion energy between the mirror and the substrate.
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  • Shinya Nagao, Fumikazu Oohira, Maho Hosogi, Gen Hashiguchi
    2007 Volume 127 Issue 10 Pages 443-448
    Published: October 01, 2007
    Released on J-STAGE: October 01, 2007
    JOURNAL FREE ACCESS
    Recently, a high aspect ratio Si prismatic shape forming is an important technology to apply for the sensing device and micro pillar array structures. In a general way, a dry etching process using inductively-coupled plasma reactive ion etching (ICP-RIE) is well known to fabricate the high aspect ratio microstructure. However, the Deep RIE process generates the scalloping on the sidewall. This paper proposes the high aspect ratio shape and smooth surface prismatic shape forming technology using a Si crystal anisotropic wet etching. In this method, we can fabricate the high aspect ratio micro prismatic shape array using (110) Si crystal by Tetramethylammonium hydroxide (TMAH) wet etching. As the result, we confirmed the principle for the high aspect ratio and very smooth surface prismatic shape formation by the Si (110) anisotropic etching.
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