Recently, the number of people taken ill in new house by indoor-air pollution, is steadily increasing. The phenomenon is what is called “sick house syndrome”. Mostly it is caused by formaldehyde and VOC (Volatile Organic Compound) included in adhesive or paint. The development of a sensor system available to measure the indoor-air pollution level at high sensitivity is highly desired. The present work was carried out for searching highly sensitive oxide semiconductor materials to formaldehhyde, xylene, toluen. Among 23 metal oxides examined, SnO
2, WO
3, In
2O
3, ZnO, Co
3O
4 and Cr
2O
3 showed relatively high sensitivity. Formaldehyde could be detected with excellent sensitivities by both SnO
2 and In
2O
3 elements operated at 350°C. The high sensitivity to xylene and toluene was achieved by both WO
3 and In
2O
3 elements operated at 350°C. Further, the sensing property of SnO
2 element to formaldehyde was extremely improved by the addition of Ag, and that of In
2O
3 one to xylene or toluene was also largely improved by the addition of Pd.
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