A simple asymmetric micro-mirror excited by an external piezoelectric ceramic vibrating element was shown to be effective for scanning an optical beam and was applied to a glasses-like retinal display. Using an SOI (Silicon on Insulator) wafer simplifies the fabrication process and results in a very flat mirror surface. A structure consisting of two such mirrors (one horizontal and one vertical) was used to reproduce images with half VGA resolution. The space and power effectiveness of this silicon micro-mirror optical-beam scanner was demonstrated in a super-small wearable micro-mirror display device, which has a glasses-like optical imaging system.

View full abstract

We have succeeded in developing a capacitive 6-axis force sensor that can singly detect 3-axis force and 3-axis moment. The capacitive 6-axis force sensor has an advantage of being able to realize high accuracy at low cost compared with conventional sensors using strain gauges. This paper details the sensor structure, detection principle, and detection circuit, as well as the performance, such as sensitivity, cross-axis sensitivity, and linearity of the capacitive 6-axis force sensor.

View full abstract

Mixed taste discrimination experiments using LB film was described. LB film material was the Dioctadecyldimethylammonium bromide and the Au evaporated metal as a sensor electrode was used. To detect mixed solutions of five basic taste substances, sensor parameters were defined by stability potential change and stability time as new parameters and maximum potential change and response time as conventional parameters. Using these parameters with principle component analysis, mixed solutions of five basic taste substances were clearly discriminated.

View full abstract

The direction sensor for light source has been developed using five photodiodes (PD's) which are three-dimensionally arranged on a frustum of pyramid. It was named 5 PD light sensor. It is useful for the electric generation of solar cells to search the direction of the sun. The Lambert's law that the irradiance to a given surface depends on the cosine element of incident angle under the uniformly parallel light like the sun is applied to decide the direction. The direction is obtained by calculating the output of three photodiodes faced to the light source. The maximum difference of about 6 degree is experimentally obtained in the direction between the real light source and the calculated value. It is not considered that the difference largely affects on using the 5 PD light sensor to the control of solar cells.

View full abstract