We describe the fabrication of Transition Edge X-ray Sensor(TES) using anodic bonding wafer that is suitable for large format array that is necessary for industrial application and astronomy. We also report the performance of TES for single pixel. The characteristic points of our fabrication are 1) use of silicon-to-glass bonding(anodic bonding) wafer, yielding the large mechanical strength of the wafer, 2) only front side patterning and etching, yielding the easy fabrication. The energy resolution of TES operated at 113 mK was 9.2 eV(FWHM) for Mn K<1(5899 eV) and effective decay time(τ_eff) 71 μs. The energy resolution is 10 times better than conventional silicon-detector(130eV) and the count rate(1/6τ_eff) reached about 2.4 kcps.

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Pyroelectric infrared sensor using (Pb_1-x, Ca_x)[(Co_1/2W_1/2)Ti]O₃ ceramics have been studied by changing Ca concentration, the infrared ray absorbing film diameter, and the electromagnetic wave shielding materials for packaging. With an increase in Ca concentration from x=0.05 to 0.28, the pyroelectric coefficient P and the figure of merit Fv increased and reached 4.43×10^-8 Ccm^-2°C^-1, and 0.61×10^-10 CcmJ^-1, respectively. Pyroelectric characteristics have been improved to twice the values for the PbTiO₃ ceramics containing small amounts of La and Mn. The spontaneous polarization Ps of the ceramics increases to a great extent in the Ca concentration range of x=0.20-0.30, and reaches larger values of 40-42μC/cm² than 33μC/cm² of the c-axis oriented sputtering PbTiO₃ thin film. With a decrease in the infrared ray absorbing film diameter, the responsivity Rv is improved to 140-180% in the range of 0.15-0.4Hz. The Responsivity Rv for the sensor with a Si filter window shows high values of 860 V/W.
It was found that the pyroelectric infrared sensor using (Pb_1-x, Ca_x)[(CO_1/2W_1/2)Ti]O₃ ceramics is appropriate for use as a human body sensor.

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A cost-effective gray-scale mask fabrication technique and three dimensional micromaching of photo sensitive glass has been developed. The gray-scale mask was fabricated with wide use computer apparatus, a 1/20 projector and an emulsion glass mask. Multi level structures can be achieved with one-step photolithography and etching process using a gray-scale mask which is modified with gray-scale patterns to vary the energy of UV-light. High aspect ratio complex 3-D structures with different depths of 0.1mm to 1.5mm have been fabricated by use of this technique. These surfaces of fabricated structures can be made smooth by polysilazane coating. The technique can be applied to fabrication of the elements in optical and biomedical applications.

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The electrochemical behavior of metal coated hollow fiber membrane electrodes was studied and the application to the amperometric detection of sugars in high-performance liquid chromatography (HPLC) was tried. In the cyclic voltammetry in 0.15M NaOH of the copper coated hollow fiber membrane electrode, broad reduction wave from Cu(III) to Cu(II) was observed, and the peak current decreased with the dependence on the concentration of glucose. This is because the elctrocatalytic oxidation of glucose by the metal oxide has been generated. The electrochemical detector for HPLC was designed using in the copper coated hollow fiber membrane electrode, and it was controlled in the potential of which the oxidation current of glucose was observed. In addition, electroconductive hollow fiber membrane electrodes covered with nickel, gold, platinum were developed. The peak current of glucose and value of the noise in each electrode were measured. The detection limits(S/N=3) for glucoses were 9.8pmol in case of nickel coated, 2.1pmol on copper coated, 3.5pmol on platinum coated and 19.9pmol on gold coated, respectively. The copper coated hollow fiber membrane electrode was applied as an electrochemical detector in HPLC for the analysis of sugars. At the applied potential of +0.55V against Ag/AgCl, the linear responses of sugars on the copper coated hollow fiber membrane electrode were found in the range from 10 to 200 μM. We concluded from the experiment described above that application of the metal coated follow fiber membrane electrode to the sugar sensor was useful.

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Wind directions measured by the conventional anemometers are referred to a fixed direction, which must be determined somehow by referring to the geomagnetic field or the rotational axis of the earth. In this paper, we describe a newly designed anemoscope that measures the absolute wind direction by using the flux-gate magnetometer. The principle of the measuring system is based on the fact that the flux-gate magnetometer can measure very low geomagnetic field magnitudes by using the chopper-amplifier principle.

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