IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
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Volume 123, Issue 3
Displaying 1-5 of 5 articles from this issue
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Review
  • Future Intelligent Transportation Systems and Sensors
    Akio Hosaka
    Article type: Review
    2003 Volume 123 Issue 3 Pages 63-68
    Published: 2003
    Released on J-STAGE: June 01, 2003
    DOIhttps://doi.org/10.1541/ieejsmas.123.63
    JOURNAL FREE ACCESS
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    A road vehicle traffic contributes to the social improvement greatly, but it has big problems such as safety, congestion, environment, energy, elder people driving and adaptation to information society. ITS (Intelligent Transportation Systems) is expected as a direction solving these. The intellectual function about a road vehicle traffic depended on most of human beings. ITS helps intellectual functions such as information sensing, situation recognition, judgment, planning and operation. A sensor detecting information is an important key in ITS. I describe expectation to a sensor in ITS.
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  • Properties of InSb Thin Films Grown by Molecular Beam Epitaxy and Their Applications to Magnetic Field Sensors
    Ichiro Shibasaki
    Article type: Review
    2003 Volume 123 Issue 3 Pages 69-78
    Published: 2003
    Released on J-STAGE: June 01, 2003
    DOIhttps://doi.org/10.1541/ieejsmas.123.69
    JOURNAL FREE ACCESS
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    Recent developments in InSb thin film magnetic sensor technology were reviewed. Tin (Sn) doped InSb thin films grown on GaAs substrates by molecular beam epitaxy, showed high electron mobility and sheet resistance with very small temperature dependence. High sensitivity Hall elements and magnetoresistance elements were fabricated using Sn doped InSb thin films and their electrical and magnetic properties were investigated. The potential use of magnetic sensors for non-contact detection of linear motion, rotation and future energy saving in electric power systems was discussed.
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Paper
  • Quantitative Analysis and Influence of CO2 Absorbed in TMAH Solution for Silicon Etching
    Yupeng Jing, Kazusuke Maenaka, Hiroshi Nishioka, Sunao Ioku, Takayuki ...
    Article type: Paper
    2003 Volume 123 Issue 3 Pages 79-84
    Published: 2003
    Released on J-STAGE: June 01, 2003
    DOIhttps://doi.org/10.1541/ieejsmas.123.79
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    This paper presents the quantitative analysis and influence of CO2 dissolved in TMAH for silicon etching. The etching rate on the (100) plane increases at first and then decreases with the increase of CO2 concentration. The etching rate on the (110) plane decreases monotonously with the increase of CO2 concentration. Although the etching rate on the (110) plane is higher than that on the (100) plane at ordinary conditions, this relationship is reversed at a certain quantity of CO2 dissolution. The etch-stop appears at higher concentration of CO2 dissolution. It was confirmed that changes of the silicon etching characteristics are caused by concentration of carbonate anions. The CO2 dissolution has influence on the (100) plane and no influence on the (110) plane.
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  • Palpation Simulator of Beating Aorta for Cardiovascular Surgery Training
    Yasuhiro Yamamoto, Megumi Nakao, Tomohiro Kuroda, Hiroshi Oyama, Masar ...
    Article type: Paper
    2003 Volume 123 Issue 3 Pages 85-91
    Published: 2003
    Released on J-STAGE: June 01, 2003
    DOIhttps://doi.org/10.1541/ieejsmas.123.85
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    In field of cardiovascular surgeries, palpation of aorta plays important roles in decision of surgical site.This paper develops palpation simulator of aorta based on a finite element based physical model.The proposed model calculates soft tissue deformation according to the affection of inner pressure and the operation of a surgeon.The proposed method is implemented on a prototype with dual PHANToM device.Experimental results confirmed our model achieves real time simulation of the surgical palpation.
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  • Bio-mimicry Sound Source Localization with Gimbal Diaphragm
    Nobutaka Ono, Akihito Saito, Shigeru Ando
    Article type: Paper
    2003 Volume 123 Issue 3 Pages 92-97
    Published: 2003
    Released on J-STAGE: June 01, 2003
    DOIhttps://doi.org/10.1541/ieejsmas.123.92
    JOURNAL FREE ACCESS
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    The parasitoid fly Ormia Ochracea shows a remarkable ability to detect the direction of an incident sound even though its ears are in very close to each other, where the interaural differences in intensity and time are extremely small.In this paper, with mimicking the unique auditory organ of the fly, we propose a sound source localization mechanisms with a gimbal diaphragm which realizes a simple and optimal transduction mechanism for a very small pressure gradient caused by the sound field.We made a model sensor using a thin metal plate and confirmed that it localizes the direction of the sound source by experiments.
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