IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
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Volume 136, Issue 8
Displaying 1-11 of 11 articles from this issue
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Paper
  • SPICE Equivalent Circuit Model of Electrostatic Energy Harvester including Electrostatic Force
    Koji Sonoda, Keidai Minami, Naoki Miwatani, Kensuke Kanda, Takayuki Fu ...
    2016 Volume 136 Issue 8 Pages 323-329
    Published: August 01, 2016
    Released on J-STAGE: August 01, 2016
    DOIhttps://doi.org/10.1541/ieejsmas.136.323
    JOURNAL FREE ACCESS
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    In this paper, we present a SPICE equivalent circuit model of an electrostatic vibration energy harvester. The SPICE model consists of a generation part and a mass-spring system part considering electrostatic force. The change in capacitance between electrodes with the position of the mass is analyzed by FEM analysis and is applied for the generation part. For investigating the characteristics of the actual harvester, the harvester was fabricated and charged by a -200 V monopolar potential. The maximum output power of the monopolar-charged harvester is 1.1 µW with applied vibration amplitude of 350 µmpp at 323.3 Hz with 0.8 MΩ optimum load resistance. We confirmed that the examined and analyzed results indicate high correspondence.
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  • Embedding of a Discrete Element to the Inner Wall of PDMS Microchannel
    Keita Araki, Yoshiki Takesako, Yuji Murakami
    2016 Volume 136 Issue 8 Pages 330-336
    Published: August 01, 2016
    Released on J-STAGE: August 01, 2016
    DOIhttps://doi.org/10.1541/ieejsmas.136.330
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    This paper reports a novel approach to modify a microfluidic chip by hybrid molding of small pieces to the inner wall of PDMS microchannel exposing the surface of the pieces. In this research, we employed a LSI chip and a microfabricated chip as an embedded piece. Addition of intermediate material between a piece to be embedded and a mold prevent a functional surface of the piece from possible coverage with PDMS. Agarose gel showed the best performance as such intermediate material. The use of the optimal amount of agarose successfully embedded a bare LSI chip as a functional piece into the inner wall of PDMS microchannel without wraparound or moat. This research enables us to fabricate microfluidic chips of complicated hybrid structure with various sensors as chip at low cost.
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  • Fabrication Techniques of Low-cost PZT Pyroelectric Sensor Adopt the Lift-off Patterned Pt Electrode
    Hideaki Mizusaki, Yusuke Iida, So Yonekubo, Toshiro Sato, Makoto Soneh ...
    2016 Volume 136 Issue 8 Pages 337-342
    Published: August 01, 2016
    Released on J-STAGE: August 01, 2016
    DOIhttps://doi.org/10.1541/ieejsmas.136.337
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    To curtail manufacturing cost of PZT pyroelectric sensor device, we reduced ion milling and ashing process by the lift-off method Pt formation and CSD method PZT thin film deposition. Remanent polarization of the PZT film on patterned Pt was approximately 2Pr = 15 µC/cm2. This value was 2/3 of all over coated Pt deposited at 600°C, but its pyroelectric current was 0.6 pA/mm2. PZT on SiO2/Si has cracks, but by splitting the SiO2 face into 20 µm rectangular through patterning Pt, these cracks were reduced to 20%. Furthermore, ladder-formed Pt electrode was satisfactory for crack-free PZT film on SiO2/Si.
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  • Shape Optimization of Combo Sensor using Quartz Crystal Resonator for Liquid Analysis
    Ryo Sakai, Hiroaki Imai, Masayuki Sohgawa, Takashi Abe
    2016 Volume 136 Issue 8 Pages 343-347
    Published: August 01, 2016
    Released on J-STAGE: August 01, 2016
    DOIhttps://doi.org/10.1541/ieejsmas.136.343
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    In this paper, we report the optimized combo sensor using quartz crystal resonator for analyzing the physicochemical properties of liquids. This sensor can measure the mechanical properties and the electrical properties simultaneously by integrating a LFE (Lateral Field Excited) sensor with an ACR (Antiparallel Coupled Resonator) or two types of ACR sensor on a same substrate. We optimized the electrode diameter of resonator for measuring a glucose aqueous solution or NaCl aqueous solution. Moreover, we measured concentration of glucose aqueous solution and NaCl aqueous solution with optimized sensor. This sensor is expected to be used for product quality control in industrial plants.
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  • Study of Droplet Manipulation Condition in Droplet Manipulation Device using Ultrasonic Vibration
    Kenichi Onishi, Takefumi Kanda, Naoya Ogawa, Koichi Suzumori
    2016 Volume 136 Issue 8 Pages 348-356
    Published: August 01, 2016
    Released on J-STAGE: August 01, 2016
    DOIhttps://doi.org/10.1541/ieejsmas.136.348
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    In this study, we have fabricated a droplet manipulation device which has a microchannel oscillated by piezoelectric actuator. This device can manipulate droplets by producing a pressure distribution of a standing acoustic field caused by ultrasonic vibration in the microchannel. The manipulated droplet's size has been estimated from the relationship between acoustic force and viscous force. The device has been designed by using a finite element method analysis. Fabricated device has been evaluated by observing droplets in manipulation experiment and measuring a manipulated droplet's distribution. When n-dodecane was used as dispersed phase, this device can manipulate a droplet whose diameter is larger than 20µm when the applied voltage and the driving frequency were 80Vp-p and 2.25MHz. When Silicone oil was used as dispersed phase, the manipulated droplets diameter was larger than 15µm. From these results, we have indicated that the microchannel device can manipulate droplets by using ultrasonic vibration.
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  • Review of Physiological Balance Sensing in an Unobtrusive Manner
    Keishi Ohashi, Shigeki Kuroiwa, Sho Hideshima, Takuya Nakanishi, Tetsu ...
    2016 Volume 136 Issue 8 Pages 357-361
    Published: August 01, 2016
    Released on J-STAGE: August 01, 2016
    DOIhttps://doi.org/10.1541/ieejsmas.136.357
    JOURNAL FREE ACCESS
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    The concept of unobtrusive physiological balance sensing system implementing biosensors is discussed. Biosensors connected with a data system is expected to play a significant role when we extend the sensing objects from body to mind and spirit. Here, we describe the unobtrusive monitoring system using FET-type sensors and wireless communication devices. Substances subject to the survey of our research will include small ions, immunoglobulins, and hormones.
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