IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Volume 125, Issue 1
Displaying 1-6 of 6 articles from this issue
Paper
  • Kazuhiro Tsuruta, Takayuki Shibata, Nobuaki Kawahara
    2005 Volume 125 Issue 1 Pages 1-6
    Published: 2005
    Released on J-STAGE: April 01, 2005
    JOURNAL FREE ACCESS
    We present a new method to reduce substrate losses and parasitic capacitances of passive elements on silicon RF ICs. The method is based on a fabrication process to selectively bury thick oxide layer regions in a silicon substrate. The process consists of two steps, such as high aspect-ratio trench forming using a D-RIE (Deep Reactive Ion Etching) technique, high temperature oxidation in a wet environment, polycrystalline silicon deposition and etching. This is also CMOS compatible one.
    Using the method, we have succeeded in fabrication of 25μm thick oxide layer regions in a silicon substrate. The maximum Q value of a spiral inductor on the thick oxide layer has been improved twice as large as one on a field oxide layer fabricated by a conventional CMOS process. In addition, the power consumption of a 1.6GHz VCO (Voltage Controlled Oscillator) using the spiral inductor on the thick oxide layer has been reduced by 40% compared with the one by conventional technologies.
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  • Naoki Saito, Toshiyuki Satoh, Shinya Kajikawa, Hideharu Okano
    2005 Volume 125 Issue 1 Pages 7-14
    Published: 2005
    Released on J-STAGE: April 01, 2005
    JOURNAL FREE ACCESS
    In this paper, we propose a flexible contact force sensor that enables a robot to detect a contact location and measure four-axis contact force with environment. This sensor consists of two part: one is a flexible contact part which is composed of silicon rubber, and the other is a metallic plate. The structure of this sensor and a procedure for calculating contact location and four-axis contact forces are explained. We perform an experiment of grasping an object with a translational gripper equipped with the developed sensor. From this experiment, we confirm about that this sensor is useful in real grasping task, and that an optimal approaching velocity is increased owing to a flexible structure.
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  • Zhiyu Chi, Katsunori Shida
    2005 Volume 125 Issue 1 Pages 15-20
    Published: 2005
    Released on J-STAGE: April 01, 2005
    JOURNAL FREE ACCESS
    The aim of this study is to propose a multifunctional tactile sensor with a simple structure imitating the human hand. This paper is an improvement of the previous one(1) and here we add the sensing function of testing the horizontal force to the previous sensor. The central components of this sensor are four coils and two dielectric mediums. A step-by-step method is used to realize the multifunctional sensing and in each step, a different quantity is sensed. Making a general survey of the entire sensor, it can not only discriminate the material but also measure the magnitude, direction of the contact force and the contact location. We herein discuss the design guideline for and the structure of the sensor, with deep inquiries into the step-by-step measuring method and experimental results.
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  • Toshiaki Nomura, Satoshi Yamamura, Yukihiko Arikawa
    2005 Volume 125 Issue 1 Pages 21-26
    Published: 2005
    Released on J-STAGE: April 01, 2005
    JOURNAL FREE ACCESS
    An electrode-separated piezoelectric quartz crystal (electrode-separated PQC) is constructed with no electrode attached to either side of the quartz plate, but electrodes are separately inserted in the electrolyte solution on both sides of the quartz plate, and are connected to an oscillator. The frequency shifts due to the solution properties and the mass change on the quartz plate is just the same as for a normal piezoelectric quartz crystal (normal PQC) having two electrodes. The electrode-separated PQC will be more useful than the normal PQC because it can be made smaller, higher frequency, and then cheaper. Amino acid, organic acid and sugar are important substances in the alcoholic beverage made by fermentation, such as sake. The Amino acids were determined using electrode-separated PQC coated with chitosan in copper (II) solution. Formation of complex with chitosan on the quartz plate, Cu(II) and amino acid in the sample solution induced the frequency shift of PQC. On the other hand, using non-coated electrode-separated PQC, concentration of organic acid and sugar in the liquid were determined, because the frequency of the crystal filled with the liquid containing organic acid and sugar was shifted with the viscosity and conductivity, respectively.
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  • Han Ji-song, Tan Zhi-yong, K. Sato, M. Shikida
    2005 Volume 125 Issue 1 Pages 27-36
    Published: 2005
    Released on J-STAGE: April 01, 2005
    JOURNAL FREE ACCESS
    We have presented the characteristics of polyimide (PI) film wet-etching using the commercially available and most commonly used Kapton Upilex PI-film as the testing materials and a strong alkaline solution named TPE3000 (from Toray Engineering Co., Ltd., Japan) as the etchant. We have introduced the fabrication process of micro through-holes on the PI-film by wet-etching using two types of etching-mask materials, i.e. a photosensitive dry film and thin copper film. We have also developed thermal-type micro sensor device using densely arrayed micro heaters as the sensing elements. The sensing elements were resistors made of sputtered 200-nm-thick platinum film on the thin (50-μm-thick) flexible PI-film substrate. The electrical feed-through was arranged on the different sides of the substrate and interconnected to the micro heater elements via the wet-etched through-holes, inside walls of which were deposited with thin metal film by means of the electroless copper plating technology. The fabricated device was robust, flexible and can be attached to non-flat curved surface.
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Letter
  • Shigeo Nakamura, Takashi Miyazaki, Hiroshi Matsuoka, Ryouhei Aduma, Ma ...
    2005 Volume 125 Issue 1 Pages 37-38
    Published: 2005
    Released on J-STAGE: April 01, 2005
    JOURNAL FREE ACCESS
    The flow-induced vibration of a head gimbal assembly, known as “windage", is a very large obstacle for achieving the higher track densities in hard disk drives. We developed a windage measurement system that can measure windage by a laser Doppler vibrometer in a spin stand at various conditions, such as different disk-rotational speeds, temperatures, and so on. Therefore, the developed system is useful for investigating the nature of windage and to design new head gimbal assembly to reduce windage.
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