電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
119 巻, 7 号
選択された号の論文の6件中1~6を表示しています
  • 大草 武徳, 中尾 政之, 土屋 健介, 畑村 洋太郎, 佐藤 知正
    1999 年 119 巻 7 号 p. 359-367
    発行日: 1999/07/01
    公開日: 2008/12/19
    ジャーナル フリー
    This paper proposes an operation support system using images of scanning electron microscope (SEM) for micro assembly, which is called “image driven operation system (IDOS)”. IDOS works as an interface between an operation site and a micro processing site. The authors designed the following three functions in IDOS for micro assembly using a real time image matching and a SEM magnification controlling: (1) indication of a deformed figure for easy operation, (2) image-driven manipulation using a visual pixel feedback, and (3) automatic operation of tasks which hides low magnification images. Through the experimental pick-and-place task using a 100μm-sized “micro torii” under SEM observation, we evaluated that IDOS worked effectively as intended.
  • Sangchoon Ko, Dongyoun Sim, Masayoshi Esashi
    1999 年 119 巻 7 号 p. 368-373
    発行日: 1999/07/01
    公開日: 2008/12/19
    ジャーナル フリー
    An electrostatic servo silicon accelerometer with mG resolution for measurment of the seismic movement was developed. The sensor is composed of a glass-silicon-glass structure by using bulk silicon micromaching techniques. It has a mass and four suspending beams. The working range of the sensor is ±1G and operating frequency bandwidth is 1kHz. The resolution is 1.6mG. To achieve high sensitivity thin beams are required for springs and shield electrodes are formed on the glass to prevent an electrostatic bonding of the beam to the glass.
  • 林 健司, 下田 英雄, 松藤 誠剛, 都甲 潔
    1999 年 119 巻 7 号 p. 374-382
    発行日: 1999/07/01
    公開日: 2008/12/19
    ジャーナル フリー
    The present study investigates adsorption of taste substances to lipid membranes for the multichannel taste sensor. To clarify the mechanism of adsorption of taste substances to a lipid membrane, we measured adsorption quantities of taste substances, such as amino acids and quinine-HCl, with fluorometry, and the surface of the lipid membrane was analyzed with ESCA (Electron spectroscopy for chemical analysis). Furthermore, we measured potential responses of a lipid membrane and pH of monosodium glutamate and lipid solutions. The results showed that amino acids adsorb to the lipid membrane, but no specific adsorption site exists on the membrane. The adsorption occurred by weak interaction between a phosphoric acid group of lipid molecules and an amino group of amino acids. Quinine-HCl adsorbed to membrane with strong electrostatic coupling and weak hydrophobic effects to lipid molecules in the membrane.
  • 角崎 雅博, 寺澤 孝志, 谷野 克巳, 龍山 智榮
    1999 年 119 巻 7 号 p. 383-389
    発行日: 1999/07/01
    公開日: 2008/12/19
    ジャーナル フリー
    Recently, the number of people taken ill in new house by indoor-air pollution, is steadily increasing. The phenomenon is what is called “sick house syndrome”. Mostly it is caused by formaldehyde and VOC (Volatile Organic Compound) included in adhesive or paint. The development of a sensor system available to measure the indoor-air pollution level at high sensitivity is highly desired. The present work was carried out for searching highly sensitive oxide semiconductor materials to formaldehhyde, xylene, toluen. Among 23 metal oxides examined, SnO2, WO3, In2O3, ZnO, Co3O4 and Cr2O3 showed relatively high sensitivity. Formaldehyde could be detected with excellent sensitivities by both SnO2 and In2O3 elements operated at 350°C. The high sensitivity to xylene and toluene was achieved by both WO3 and In2O3 elements operated at 350°C. Further, the sensing property of SnO2 element to formaldehyde was extremely improved by the addition of Ag, and that of In2O3 one to xylene or toluene was also largely improved by the addition of Pd.
  • 広林 茂樹, 山淵 龍夫, 吉沢 寿夫
    1999 年 119 巻 7 号 p. 390-395
    発行日: 1999/07/01
    公開日: 2008/12/19
    ジャーナル フリー
    Changes in electical conductivity are measured for a tin dioxide-based semiconducting sensor, due to reactions occurring between the original adsorbates and the gases present in the surrounding atmosphere. This gas sensor provides a stable and reproducible performance for indoor monitoring of gas leakage and air contamination. However, this type of gas sensors is not selective and the gas concentrations cannot be precisely estimated. Therefore, a model of the gas sensor response using a linear relationship between the gas concentrations in a mixture and the sensor resistance is proposed. Furthermore, using two gas sensors having different characteristic models it is possible to evaluate the concentrations of gases in a mixture. This method has been applied to evaluate the gas concentrations in ammonia-ethanol and CO-ethanol mixtures. The results of this study indicate that the evaluation of the gas ratio and gas concentrations in a mixture is made feasible by using the proposed model for the gas sensor response.
  • 横濱 敦史, 三澤 顕次, 有澤 準二
    1999 年 119 巻 7 号 p. 396-397
    発行日: 1999/07/01
    公開日: 2008/12/19
    ジャーナル フリー
    This paper describes electrical and optical characteristics of a single artificial lipid membrane for basic taste solutions. The characteristics were measured using a new complex measurement system with electrical and optical components. Since the characteristics varied remarkably with five kinds of basic taste, the single artificial lipid membrane had a possibility to be applied to a taste sensor material.
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