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Elimination for the zero difference fluctuating randomly
Tatsuya Kume, Kazuhiro Enami, Yasuo Higashi, Kenji Ueno
Session ID: K06
Published: 2011
Released on J-STAGE: September 01, 2011
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Roll detection using laser
Yu Kanamaru, Naoki Asakawa, Toshihiro Nakayabu, Kenichi Hirosaki, Youi ...
Session ID: K07
Published: 2011
Released on J-STAGE: September 01, 2011
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JungChul Lee, Yoshikazu Arai, Wei Gao, ChunHong Park, JooHo Hwang, Jeo ...
Session ID: K08
Published: 2011
Released on J-STAGE: September 01, 2011
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In order to fabricate 3-D microstructures in a wider area and a higher precision for flat display panels, fuel cells and etc., development of large-scale ultra-precision lathes is strongly demanded. As the fabrication accuracy is influenced by the slide motion error, measurement of the slide error is an important issue. To improve the reliability of the measurement, it is necessary to measure the slide error with respect to axis of the spindle. This paper reports the measurement results of the slide error of a large-scale ultra-precision machine with a travel range of 1.7 m.
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Influence of misalignment of sensors and basic design of the multi-cantilever.
Takahiro Akiyoshi, Hiroki Shimizu, Yuuma Tamaru
Session ID: K09
Published: 2011
Released on J-STAGE: September 01, 2011
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Improvement for the unstable behavior of the probe sphere
Mitsutoshi Kobayashi, Masaki Michihata, Terutake Hayashi, Yasuhiro Tak ...
Session ID: K13
Published: 2011
Released on J-STAGE: September 01, 2011
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Influence of the slope angle of measured surface
Hiroshi Murakami, Akio Katsuki, Hiromichi Onikura, Takao Sajima, Eiji ...
Session ID: K14
Published: 2011
Released on J-STAGE: September 01, 2011
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Evaluation of the measuring instrument
Takemi Asai, SungHo Jang, Yoshikazu Arai, Wei Gao
Session ID: K15
Published: 2011
Released on J-STAGE: September 01, 2011
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Yusuke Kajihara, Keishi Kosaka, Susumu Komiyama
Session ID: K16
Published: 2011
Released on J-STAGE: September 01, 2011
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Our passive THz near-field microscope probes thermally excited surface waves with nanoscale resolution from room temperature object. When a probe is separated from the sample surface, near-field components decay within several 10 nm, whereas standing wave components occur at a height of more than 1 μm. This finding is interesting because our microscope does not use any external coherent source. Here we report theoretical and experimental analyses of localized near-field components and the standing wave components.
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Kazuya Naoi, Hiroshi Sato, Satoshi Gonda
Session ID: K18
Published: 2011
Released on J-STAGE: September 01, 2011
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Shunji Maeda, Hisae Shibuya
Session ID: K19
Published: 2011
Released on J-STAGE: September 01, 2011
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Fast and accurate anomaly detection is becoming essential in maintenance services. In this paper, learning data is respectively selected based on the distance between observed data and learning data, to form an optimum subspace. Through the experiments of projection distance method and mutual subspace method, it is confirmed that generating the constrained pair-wise subspaces for both observed data and learning data can effectively detect weak anomaly, absorbing the transient variation of data.
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Munetoshi Numada, Hiroyasu Koshimizu
Session ID: K20
Published: 2011
Released on J-STAGE: September 01, 2011
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Hidekazu Hara, Yoshinori Nagasu, Shuji Ishiguro, Kohichi Sugimoto
Session ID: K21
Published: 2011
Released on J-STAGE: September 01, 2011
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To develop a micro pump for medical equipment with a high clean environment and a small error of measured values(±2%), nondestructive measurement method of the micro tube inside diameter was investigated. When micro tubes of inside diameter 0.55 and 1.15mm were compressed using compression pin of 1.0 and 2.0mm in diameter respectively, small error of measured values ranging from -0.3 to 2.0% was achieved under condition of compression rate of 10μm/s. Optimum ratio of tube inside diameter to compression pin for nondestructive measurement was 1.74. From simulation using LS-DYNA, it was confirmed that uniform deformation takes place only in case of optimum ratio.
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Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu
Session ID: K31
Published: 2011
Released on J-STAGE: September 01, 2011
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Seiichiro Hara, Ryoma Kishimoto, Kazuyuki Sasajima
Session ID: K32
Published: 2011
Released on J-STAGE: September 01, 2011
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Takayuki Kurihara, Ryuichi Sugimoto, Ryota Kudo, Satoru Takahashi, Kiy ...
Session ID: K33
Published: 2011
Released on J-STAGE: September 01, 2011
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Daiyu Fujii, Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamas ...
Session ID: K34
Published: 2011
Released on J-STAGE: September 01, 2011
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Experimental Verification of Near-Field Optics Property
Yuuichi Ikeda, Satoru Takahashi, kiyoshi Takamasu
Session ID: K36
Published: 2011
Released on J-STAGE: September 01, 2011
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Analysis and basic experiment of spot shape change by displacing probe ball
Atsuo Ogawa, Hiroki Shimizu, Yuma Tamaru
Session ID: K37
Published: 2011
Released on J-STAGE: September 01, 2011
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Precision Measurement and Small-Size Device with 45°CCut Optical Fiber
Kenta Matsui, Kiyoshi Takamasu, Satoru Takahashi, Hirokazu Matsumoto
Session ID: K38
Published: 2011
Released on J-STAGE: September 01, 2011
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Ryota Fujisawa, Yuto Kato, Tomohito Morikawa, Masato Aketagawa
Session ID: K39
Published: 2011
Released on J-STAGE: September 01, 2011
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Recently the improvement of the tilt measurement is required in shape measurement. We propose a novel level for tilt measurement. In this report, the instrumentation and the experimental results are discussed.
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6th report: Evaluation of optics-induced error
Akira Takahashi, Yuichi Takigawa, Nobuharu Miwa
Session ID: K43
Published: 2011
Released on J-STAGE: September 01, 2011
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Measurement error due to the defocus and the curved caustic of the optical system of the line-detecting microscope for the line scale calibration system was investigated. A procedure for evaluating this type of error was proposed. Comparative measurements were carried out using the proposed procedure for two conditions of an objective lens of NA=0.175 with better adjustment and a lens of NA=0.4 with standard adjustment. The results were 4 nm for NA=0.175 and approximately 200 nm for NA=0.4 at a defocus range of ±10 um.
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Experimental evaluation of long path heterodyne interferometers with optical frequency comb and continuous-wave laser
Xiaonan Wang, Satoru Takahasi, Kiyoshi Takamasu, Hirokazu Matsumoto
Session ID: K44
Published: 2011
Released on J-STAGE: September 01, 2011
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An optical-frequency comb can be used directly as the light source of long-path interferometers. The interference happens only when a pair of optical comb pulse trains overlaps with each other. So the measurable distance is long, but is discrete in sapce. In this paper, a new heterodyne interference system is presented to evaluate the measurement stabilities of optical-frequency comb and continuous-wave laser diode interferometers. Two optical combs and a laser diode with the same center wavelength are used as light sources for their comparison, and the experiments have been done to measure the distance of 22.5 m and 22.909 m. The result shows that the measurement stability in 50 s of optical comb and laser diode is similar due to the effect of the new heterodyne lock-in technique. The measurement standard deviation decreases to several tens nanometers when the time constant of lock-in amplifier increases to 10 s.
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(Fourth report : An absolute optical distance measurement of a Fabry-Perot cavity with a movable mirror)
Hiroshi Iwata, Yoshinosuke Murai, quoc/Tuan Banh, Kenji Hirata, Masato ...
Session ID: K45
Published: 2011
Released on J-STAGE: September 01, 2011
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An absolute optical distance of Fabry-Perot cavity can be determined by measuring its Free Spectrum Range(FSR). In the previous reports, we reported a FSR measurement method using electric optical modulator. Real time FSR measurement can be performed, because this method is based on the null-method. In this report, we demonstrate the capability of proposed method by measuring FSR of a Fabry-Perot cavity with a movable mirror.
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Step gauge measurement using double-path interferometer
Chanthawong Narin, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsum ...
Session ID: K46
Published: 2011
Released on J-STAGE: September 01, 2011
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We develop a Fabry-Perot etalon to select high-frequency parts of repetition frequency modes of a short pulsed, mode-locked fiber laser. The 2GHz repetition-modified laser is transmitted to a Michelson interferometer for measuring each distance of 75mm. The optical path of the interferometer is designed as double-path in which the separation center between two beams is located at the position of measuring probe. Using this design, we can apply the mode-locked fiber laser to artifact following contact method. The advantage of the contact method can measure variety-shape artifacts that non-contact method cannot be used, i.e. step gauge. In this report we discuss the concept and design of new double-path interferometer system.
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Length Measurement using gage blocks and uncertainty evaluation
Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto
Session ID: K47
Published: 2011
Released on J-STAGE: September 01, 2011
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Jiwan Yan
Session ID: K61
Published: 2011
Released on J-STAGE: September 01, 2011
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Huanming PENG, Zhiyu ZHANG, Jiwang YAN, Tsunemoto KURIYAGAWA
Session ID: K62
Published: 2011
Released on J-STAGE: September 01, 2011
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Yuusuke Tanaka, Zhou Tianfeng, Yan Jiwang, Tsunemoto Kuriyagawa
Session ID: K63
Published: 2011
Released on J-STAGE: September 01, 2011
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Effect of carburizing
Yumiko Inui, Naomichi Furushiro, Masahiro Higuchi, Tomomi Yamaguchi, S ...
Session ID: K64
Published: 2011
Released on J-STAGE: September 01, 2011
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Akira Fujimoto, Shinya Morita, Yutaka Yamagata, Toshiro Higuchi
Session ID: K66
Published: 2011
Released on J-STAGE: September 01, 2011
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This study describes a fabrication of blazed gratings using a 5 axis ultrahigh precision machine tool with burnishing method. Recently microgrooves on free curve surface were fabricated by 5 axis ultrahigh precision machine tool. Although ultraprecision cutting method produces burrs which decrease diffraction efficiency and resolution of the grating. Burnishing method makes fewer burrs and can improve surface accuracy. This paper reports the result of fabrication experiments of blazed gratings using a 5 axis ultrahigh precision machine tool and single crystalline diamond burnishing tool. Comparing with cutting,the surface roughness of grating grooves fabricated by burnishing was improved.
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Jiang Guo, Hirofumi Suzuki, Kazufumi Yoshida, Toshiro Higuchi
Session ID: K67
Published: 2011
Released on J-STAGE: September 01, 2011
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Micro-glass lenses for digital cameras and blue laser DVD pick-up devices are generally molded by using micro-aspheric ceramic molds made of tungsten carbides. Demands are increasing for the improvement to the accuracy and surface roughness of the molds with high numerical aperture (NA) optics with steep angles. In order to finish the molds with high accuracy, surface roughness and high NA, a magnetostriction vibration assisted polishing system with was proposed and developed. A small polishing tool is mounted on the head of the magnetostriction vibrator, and the magnetostriction vibrator is fixed on a 3-axis controlled table, and vibrated at the frequency of about 9.2 kHz with the amplitude of 30 µm. The polishing pressure can be controlled at range of 0.2 mN ˜ 20m N with a resolution of 0.2 mN. Some micro-aspheric molds made of binderless tungsten carbide were polished, and surface roughness of about 10 nm Rz was obtained.
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Naoki Kobayashi, Akira Kubota, Weimin Lin, Yongbo Wu, Masakazu Fujimot ...
Session ID: K68
Published: 2011
Released on J-STAGE: September 01, 2011
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Development of micro polishing system using piezoelectric actuator incorporated with mechanical transformer
Sze/Keat Chee, Hirofumi Suzuki, Mutsumi Okada, Kazufumi Yoshida, Weimi ...
Session ID: K69
Published: 2011
Released on J-STAGE: September 01, 2011
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Demands of precision molds with complicated microstructures for digital devices, μ-TAS and etc. are increasing
[1]. The structured molds must be polished after grinding or cutting in order to improve the surface roughness. In this report, a two dimensional low frequency vibration (2DLFV) polishing actuator using PZT is proposed and developed. The 2DLFV consists of 4 MechaTrans, a multiplayer stacked piezoelectric actuator (PZT) incorporated with mechanical transformer, and a center piece. Mechanical transformer is a kind of flexure hinges structured that magnifies the stroke of the multiplayer stacked piezoelectric actuator around 7 times to 120 μm. With this actuation, the tool vibrates in a circle trajectory to achieve polishing effect
[2]. In the polishing experiments, tungsten carbide molds (work pieces) are polished with diamond slurry. The surface roughness of the work pieces and polishing efficiency are evaluated. From the experimental results, we found low frequency vibration especially 2DLFV is a useful micro polishing system for micro structured mold.
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Takuya Shigeta, Shinnosuke Hirata, Hisayuki Aoyama
Session ID: L01
Published: 2011
Released on J-STAGE: September 01, 2011
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Yoshitaka Kito, Syohei Ishimori, Amornphun Phunopas, Takahiro Ito, Ter ...
Session ID: L02
Published: 2011
Released on J-STAGE: September 01, 2011
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Bin/Jamil/Kofli Johari, Shigeji Osawa, Atsushi Okazaki, Koichi Ozaki
Session ID: L03
Published: 2011
Released on J-STAGE: September 01, 2011
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These days, micro-manipulator is became main tools in the micro-operation. This paper proposes a method for evaluate the shape of abrasive grain using micro-manipulator. Degree of Circularity and Equivalent Circle Diameter is being used to evaluate the shape of abrasive grain. However these evaluation methods are not appropriate for abrasive grain selection. Therefore, we propose a proper method for evaluate the shape of abrasive grain, and using micro-manipulator with rotation system, we evaluate the three-dimensional shape of abrasive grain.
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Satoshi Honda, Hironori Hayashi
Session ID: L05
Published: 2011
Released on J-STAGE: September 01, 2011
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A micro screw and a micro nut are developed by utilizing extra fine wires which materials are molybdenum and tungsten, and their diameter are 20 micrometers. The micro screw and micro nut have a pitch of 40 micrometers, and their major diameters are 0.54 millimeters. The micro-screw made as follows; a pair of a molybdenum wire and a tungsten wire is coiled around a needle pin, and the coiled wires are soldered with lead-free solder on the needle pin. The tungsten wire is removed from the soldered needle pin, the molybdenum wire remains around the needle pin as the screw thread. The micro-nut is made as follows; the coiled pin with the molybdenum wire and the tungsten wire is inserted into head hole of a split pin, and the coiled wires are soldered with lead-free solder on the inside of the head hole. The needle pin and the tungsten wire are removed from the head hole, the molybdenum wire remains inside of the head hole as the screw thread of the nut. In this paper, making process of the micro-screw and the micro-nut were described, and the product screw and nut were estimated by experiments.
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Satoshi Honda, Toshiki Ishida
Session ID: L06
Published: 2011
Released on J-STAGE: September 01, 2011
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An axial micro-turbine impeller is developed by utilizing an extra fine wire which diameter is 100 micrometers. The extra fine wire is bound and hooked around a stainless tube and cemented carbide pins which attached at the center of both ends of the stainless tube. Knitted extra fine wire forms the axial micro-turbine impeller with three wings on the ends of the stainless tube. Outer diameter of the micro-turbine impeller was 4.8 millimeters and its length was 20.5 millimeters, and its weight was 0.75 grams. The micro-turbine was rotated at 43,523 rpm with compressed air of 10 liter per minute. In this paper, structure and making processes of the micro-turbine impeller are described, and prompt rotational performances of the micro-turbine were given in the experiments.
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Kenji Sawai, Wataru Takarada, Takeshi Kikutani, Kunio Takahashi, Shige ...
Session ID: L07
Published: 2011
Released on J-STAGE: September 01, 2011
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Electrostatic chuck (ESC) is a tool which attracts objects using electrostatic force. Currently ESC is used only for objects having flat surface because the attractive force reduces for curved or rough surface. An ESC that can handle curved surface will expand its applications to MEMS or optical parts handling. An ESC consisting of compliant electrostatic inductive fibers which transform according to the profile of surface has been proposed for such use. This paper reveals the potential of the fiber ESC and shows its feasibility. The attractive force of the fiber ESC is theoretically investigated using a force curve of each fiber based on its mechanics. In addition, a prototype of the fiber ESC consisting of ten fibers arranged in a tilt is employed to experimentally observe its attractive force for curved surface. The attractive force for the surface which is modeled as sine wave with various amplitudes is observed, which shows the feasibility of the fiber ESC.
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Daizo Nakabayashi, Kenji Sawai, Kunio Takahashi, Shigeki Saito
Session ID: L08
Published: 2011
Released on J-STAGE: September 01, 2011
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Yasuhiko Nara, Kunio Takahashi, Shigeki Saito
Session ID: L09
Published: 2011
Released on J-STAGE: September 01, 2011
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Kohei Kuroda, Reo Kometani, Shinichi Warisawa, Sunao Ishihara
Session ID: L13
Published: 2011
Released on J-STAGE: September 01, 2011
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Kouhei Nishimura, Kazuyoshi Tsuchiya, Yasutomo Uetsuji
Session ID: L14
Published: 2011
Released on J-STAGE: September 01, 2011
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When the shape-memory treatment is administered to the TiNi thin film as the actuator for MEMS, the possibility that the wrinkle and the damage such as break are caused in the thin film is thought in the transformation that uses the external force. In the former report, the transformation when the inside residual stress of the thin film was opened was controlled, and it proposed the technique for transforming it into the aimed shape. However, because the transformed condition of the thin film is different depending on the angle of the residual stress, an appropriate actuator designing is needed. Then, an appropriate designing factor is selected by a statistics analysis.
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Toshitake Tateno, Akira Kakuta
Session ID: L15
Published: 2011
Released on J-STAGE: September 01, 2011
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- Effect of ultrasonic vibration on Rhodopseudomonas palustris -
Sachiko Tokoro, Toshitake Tateno, Akira Kakuta, Shouhei Tokudome
Session ID: L16
Published: 2011
Released on J-STAGE: September 01, 2011
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Yusuke Kuruma, Akio Yamamoto, Toshiro Higuchi
Session ID: L31
Published: 2011
Released on J-STAGE: September 01, 2011
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Shinya Tsuruta, Akio Yamamoto, Toshiro Higuchi
Session ID: L32
Published: 2011
Released on J-STAGE: September 01, 2011
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Ryohei Takamatsu, Hiroshi Hosaka, Yohei Kamiya, Tomoyuki Takahashi
Session ID: L33
Published: 2011
Released on J-STAGE: September 01, 2011
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Yoichi Kadota, Kazuhiko Inoue, Kazuo Uzuka, Hideyuki Suenaga, Takeshi ...
Session ID: L34
Published: 2011
Released on J-STAGE: September 01, 2011
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Yusuke Kobayashi, Akio Yamamoto, Toshiro Higuchi
Session ID: L36
Published: 2011
Released on J-STAGE: September 01, 2011
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