An LSI for the Massive Parallel Electron Beam Lithography using nc-Si (Nano Cristal Silicon) has been developed. It can drive a 100×100 electron emitter as an active matrix electron emitter with an innovative aberration correction scheme, a compensation scheme for electron beam intensity variation and a test circuit for testing LSI during integration on the system. This LSI was evaluated and confirmed its basic function of the active matrix, the electron emitter process variation compensation and the test for integrated devices.

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This paper describes the fabrication method that a lead zirconate titanate (PZT) thin film capacitor, which is formed on a Si substrate by metal organic decomposition (MOD), can be easily transferred to flexible polymer (polydimethylsiloxane; PDMS) without additional chemical contamination. The thin film capacitor is composed of sandwich structure of PZT between two metal layers. To embed the capacitor structure in the polymer substrate by dry peel-off process, three kinds of self-assembled monolayers (SAMs) were investigated for adhesion or anti-adhesion layer between metal, polymer and Si substrate, respectively. Also, the MOD's sintering process with SAMs for PZT lamination was investigated. As a result, the PZT capacitors of 1 µm thickness with a perovskite structure were successfully transferred and embedded in PDMS substrate. These results will be useful for fabricating MEMS devices and integration technology of electrical device to a polymer substrate such as capacitors in 3-dimensional integration or for flexible electronics.

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The slopes and the construction products are observed as an example of the application of wireless sensor network (WSN). And a basic demand of such an environmental monitoring is to be able to observe a long term as for the wide range. However research of wireless and power consumption have been made, but the overall design methodology have not been established. We propose a simulation environment to design WSN system. In order to build a reliable system in an environment with much disturbance, many trade-offs exist. The proposed simulator analyzes this tendency. Finally we developed actual sensors, to perform the installation in the demonstration site has successfully operated without maintenance such as battery replacement one year.

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The bending mechanism of a conventional endoscope operates by drawing wires from outside the human body. The shaft structure of endoscopes is relatively complex to avoid buckling caused by wire traction. In this study, one directional bending mechanisms using shape memory alloy (SMA) wires have been developed for minimally invasive medicine. A large bending angle was accomplished by positioning a working point of driven SMA wires near a center point of the mechanism and by surrounding the SMA wires and an inner tube by helical thin metal wire. External diameter and length of the bending part of the mechanism are 4.1 mm and 35 mm respectively. The curvature radius of the fabricated device is 20 mm while maintaining the surface temperature of the device under 41°C in environmental temperature (38°C). Servo control has been considered to be suitable for the application of active bending mechanisms as micro robots. Feedback control by changing in the electrical resistance of the SMA wire was utilized for precise and safty actuation.

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Existing research have proposed the detection of downstairs on routes for visually impaired people. The existing system takes 0.6 seconds to detect the downstairs within 1.3-meters using hough transform method and stereo matching method. However, visually impaired people can't safely go down the stairs using existing systems. Because visually impaired people have to prepare to go down the stairs immediately before placing one's foot on the downstairs. This paper presents high speed detection method which detects the boundary line between the downstairs and the floor using the luminance of point pattern. Experiments results have shown that the proposed method detects the downstairs within 2-meters with an accuracy rate of 90.0%. In addition, detection time is 0.17 seconds.

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