電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
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135 巻, 6 号
選択された号の論文の16件中1～16を表示しています
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特集：第31回「センサ・マイクロマシンと応用システム」シンポジウム受賞論文特集
巻頭言
特集論文
  • 酸化物半導体薄膜トランジスタを用いた高感度pHセンサの開発
    岩松 新之輔, 阿部 泰, 矢作 徹, 小林 誠也, 竹知 和重, 田邉 浩
    2015 年 135 巻 6 号 p. 192-198
    発行日: 2015/06/01
    公開日: 2015/06/01
    DOIhttps://doi.org/10.1541/ieejsmas.135.192
    ジャーナル フリー
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    We propose a novel application of amorphous indium-gallium-zinc oxide thin-film transistors (a-InGaZnO TFT) to high sensitivity pH sensors. The concept of our pH sensors are based on the threshold-voltage shift of bottom-gate transfer characteristic owing to the charge generation on the top insulators, which were called top-gate effects. Utilizing top-gate effects on bottom-gate type a-InGaZnO TFTs, pH sensors with TaOx thin-film as an ion-sensitive insulator indicated high pH sensitivity beyond the Nernst-limit.
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  • MEMS心音センサの研究
    竹井 裕介, 青木 亮, 金子 智則, 松本 潔, 下山 勲
    2015 年 135 巻 6 号 p. 199-203
    発行日: 2015/06/01
    公開日: 2015/06/01
    DOIhttps://doi.org/10.1541/ieejsmas.135.199
    ジャーナル フリー
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    In this research, we fabricated a MEMS (Micro Electro Mechanical Systems) heart sound sensor (phonocardiogram sensor). The sensor is based on piezo-resistive silicon cantilever and it detects the skin vibration caused by heartbeat. We made a small water chamber between the cantilever and the skin, so that good impedance matching between the skin and the cantilever was achieved. We measured the heart sound by the MEMS heart sound sensor and the commercial electronic stethoscope simultaneously and comparing the outputs. As a result, we confirmed that our MEMS heart sound sensor can detect the heartbeat as same as electronic stethoscope.
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  • 光ファイバ圧力センサを搭載した細径臓器灌流カテーテル
    橘 侑子, 松永 忠雄, 齋木 佳克, 早津 幸弘, 芳賀 洋一
    2015 年 135 巻 6 号 p. 204-209
    発行日: 2015/06/01
    公開日: 2015/06/01
    DOIhttps://doi.org/10.1541/ieejsmas.135.204
    ジャーナル フリー
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    A small diameter (O.D. 1.47 mm) selective organ perfusion catheter with fiber-optic pressure sensor for monitoring perfusion pressure has been fabricated. As a design of the tip of the sensor, non-opening type and opening type have been fabricated and the opening design decrease influence by external force such as load or the balloon inflation on catheter down to 1 - 2 mmHg and achieved error range ±3 mmHg in the pressure measurement range of 0 - 100 mmHg.
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  • 水晶発振回路を用いた非接触型液体濃度センサ
    須佐 翼, 渡部 尊, 寒川 雅之, 安部 隆
    2015 年 135 巻 6 号 p. 210-213
    発行日: 2015/06/01
    公開日: 2015/06/01
    DOIhttps://doi.org/10.1541/ieejsmas.135.210
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    In this paper, we report the non-contact sensor for measurement of liquid concentration based on quartz oscillator. The non-contact sensing can be realized by using a leaked electric field of a planer sensing capacitor for sensing liquid on a spacer. This sensor measures capacitance changes of the sensing capacitor (SC) as frequency changes of the quartz oscillator. Since the capacitance is dependent on relative permittivity or conductivity of liquid on the spacer, it is possible to measure the concentration of them. The response is very stable because this sensor is incorporated the SC into the quartz oscillator. Because the SC is in contact with the sensing liquid instead of the quartz crystal resonator, the proposed sensor has a high quality factor (about 30,000). Moreover, this sensor can be used with general IC and electronic component, which takes low cost. The proposed sensor is expected to use for non-contact measurements of liquid concentration.
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  • 金粒子配列ナノチャネルを用いた表面増強ラマン分光分析デバイス
    竹下 俊光, 末國 啓輔, 饗庭 清仁, 菅野 公二, 磯野 吉正
    2015 年 135 巻 6 号 p. 214-220
    発行日: 2015/06/01
    公開日: 2015/06/01
    DOIhttps://doi.org/10.1541/ieejsmas.135.214
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    A micro/nanofluidic device containing linearly arranged gold nanoparticles embedded in nanochannels was developed for highly sensitive surface-enhanced Raman spectroscopy (SERS). The Si nanochannel array was fabricated using a photolithography-based process. Synthesized colloidal particles of mean diameter 100 nm were arranged linearly in the nanochannels, using a nanotrench-guided self-assembly process. The particle geometry provides significant Raman enhancement by matching the polarization direction of the incident light to the connection direction of the particles. The SERS spectrum was obtained from 1 mM 4,4’-bipyridine solution using the fabricated micro/nanofluidic SERS device. The directionally arranged particles showed the same polarization angle dependency as the simulated result. The molecule was detected from 10 pM solution using the particle arrangement. We confirmed that the particle arrangement was appropriate for highly sensitive SERS.
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  • 超並列電子線描画装置用アクティブマトリックスナノ結晶シリコン電子源の開発と動作特性評価に関するレビュー
    池上 尚克, 小島 明, 宮口 裕, 吉田 孝, 吉田 慎哉, 室山 真徳, 菅田 正徳, 越田 信義, 戸津 健太郎, 江刺 正喜
    2015 年 135 巻 6 号 p. 221-229
    発行日: 2015/06/01
    公開日: 2015/06/01
    DOIhttps://doi.org/10.1541/ieejsmas.135.221
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    This paper reviews our recent progress of application studies on planer-surface-type and Pierce-gun-type nanocrystalline silicon (nc-Si) ballistic electron emitter arrays, which were designed and prototyped to be able to integrate with a separately fabricated active-matrix large scale integrated driving circuit for the realization of massively parallel electron beam (EB) direct-write lithography. The unit enables all the pixels to be simultaneously driven in accordance with a bitmap image stored in a built-in memory and the beamlets to be switched on and off by operating the CMOS compatible voltage. Discussion in this paper will be focused on the process design and performance evaluations of the prototype nc-Si electron emitter arrays, which include electron emission and 1:1 pattern transfer characteristics. In addition, our currently addressing preliminary assessment of the 1:1 EB projection test, made using a test bench by externally LSI-driving the planer-surface-type emitter array, will be introduced.
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  • マイクロ流体電気化学発光素子を励起光源として用いたポータブル蛍光検出デバイスの作製
    津脇 美帆, 笠原 崇史, 江面 知彦, 大島 寿郎, 國澤 栄里, 石松 亮一, 松波 成行, 今任 稔彦, 安達 千波矢, 庄子 習一, ...
    2015 年 135 巻 6 号 p. 230-235
    発行日: 2015/06/01
    公開日: 2015/06/01
    DOIhttps://doi.org/10.1541/ieejsmas.135.230
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    In this study, we propose an electrochemiluminescence (ECL)-induced fluorescence detection chip toward portable point-of-care diagnostics. A prototype chip consists of polydimethylsiloxane (PDMS)-based flow channels for target samples and on-demand multi-color microfluidic excitation sources. The microfluidic ECL cells were fabricated via a heterogeneous bonding technique through the use of self-assembled monolayers. The flow channels for target samples, which were formed by soft lithography, were combined with the excitation source. A pink fluorescence of resorufin was successfully detected with yellow ECL emission of 5,6,11,12-tetraphenyltetracene (rubrene). The proposed principle can open a new possibility for on-onsite multiple fluorescence detections.
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特集研究開発レター
  • Chip-Level Microassembly of XYZ-Microstage with Large Displacements
    Gaopeng Xue, Masaya Toda, Takahito Ono
    2015 年 135 巻 6 号 p. 236-237
    発行日: 2015/06/01
    公開日: 2015/06/01
    DOIhttps://doi.org/10.1541/ieejsmas.135.236
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    This letter reports a novel chip-level microassembly technology to construct an XYZ-microstage with large displacements into X-, Y-, Z-directions. The main parts of the XYZ-microstage, consisting of a comb-drive XY-microstage, two comb-drive Z-microstages and a bottom silicon base substrate, are assembled together by using micro manipulators. Small conductive mechanical springs are used to realize the electrical connections between XY-microstage and Z-microstages. It is demonstrated that the fabricated XYZ-microstage based on microassembly technology can achieve displacements of 25.2 µm in X direction, 20.4 µm in Y direction and 58.5 µm in Z direction, respectively.
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