Proceedings of JSPE Semestrial Meeting
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2006 JSPE Spring Meeting
Displaying 501-550 of 647 articles from this issue
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  • Motion analysis of a microactuator using three piezo elements (2nd report)
    Tomoyuki Ikegami, Akihiro Torii, Kae Douki, Akiteru Ueda
    Session ID: M32
    Published: March 05, 2006
    Released on J-STAGE: January 31, 2007
    DOIhttps://doi.org/10.11522/pscjspe.2006S.0.1005.0
    CONFERENCE PROCEEDINGS FREE ACCESS
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    Displacement of a miniature robot using three stacked–type piezo elements and three electromagnets, is discussed theoretically. The motion is realized by controling the adhesion of the electromagnet and the deformation of the piezo element. Unbalanced deformation of the piezos realizes the revolution around a fixed point and linear displacement in any directions. The formula which describes the motion of the robot is derived in this paper.
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  • Motion of a miniature robot and its legs actuated by the deformation of piezo elements
    Atsushi Shimada, Akihiro Torii, Kae Douki, Akiteru Ueda
    Session ID: M33
    Published: March 05, 2006
    Released on J-STAGE: January 31, 2007
    DOIhttps://doi.org/10.11522/pscjspe.2006S.0.1007.0
    CONFERENCE PROCEEDINGS FREE ACCESS
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    We measure the motion of a miniature robot and the trajectories of three legs. The robot consists of three stacked–type piezoelectric actuators connecting in an equilateral triangle. The three legs, which support the main body of the robot, are fixed at every vertex of the triangle. The deformation of the piezoelectric actuators thrusts the legs of the robot. By repeating the deformations of the piezoelectric actuators, the robot realizes the linear and rotational displacement in a plane surface. The motion of the miniature robot is measured by changing the input waveforms and frequencies. The input waveforms applied to the piezos are rectangle and sinusoidal waveforms. The direction of the rotational displacement is described. The motion of the legs is measured. We discuss the motion of the miniature robot and the trajectories of the legs under the conditions that the miniature robot can rotate or not.
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  • Flexible Piezoelectric Polymer Sensor fabricated by Paste Injection System
    Takefumi Kanda, Takayoshi Iwai, Kenji Kure, Kouichi Suzumori
    Session ID: M34
    Published: March 05, 2006
    Released on J-STAGE: January 31, 2007
    DOIhttps://doi.org/10.11522/pscjspe.2006S.0.1009.0
    CONFERENCE PROCEEDINGS FREE ACCESS
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    Soft actuators are expected to be used in various fields because of its flexibility. In this research, flexible sensors for soft actuators have been fabricated. Piezoelectric polymer: poly (vinylidene fluoride–trifluoroethylene) [P(VDF/TrFE)] was used for the detection of displacement and velocity. Conductive ink was used for electrodes. The piezoelectric polymer has flexibility and paste material is easily patterned. These sensors were fabricated with paste injection system and mounted on soft actuators which had three dimensional structure. To control soft actuators, the sensing performance was also evaluated.
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  • Driving Method for Piezoelectric Actuator by Using Current Pulse (3rd Report)
    Katsushi Furutani, Katsuhiko Iida
    Session ID: M35
    Published: March 05, 2006
    Released on J-STAGE: January 31, 2007
    DOIhttps://doi.org/10.11522/pscjspe.2006S.0.1011.0
    CONFERENCE PROCEEDINGS FREE ACCESS
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    The authors have proposed a driving method of a piezoelectric actuator by using current pulses for the high resolution. It was compared with the voltage drive with a linear amplifier. In open–loop control, the linearity by the current pulse drive was better than that by the voltage drive because of the hysteresis of the displacement to the applied voltage. In displacement feedback control by using a PID controller, the settling time and positioning accuracy by the current pulse drive performed as well as those by the voltage drive.
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  • An ultrasonic spindle motor built–in preload mechanism
    Manabu Aoyagi, Nobuaki Kawashima, Minoru Ishiguro
    Session ID: M37
    Published: March 05, 2006
    Released on J-STAGE: January 31, 2007
    DOIhttps://doi.org/10.11522/pscjspe.2006S.0.1013.0
    CONFERENCE PROCEEDINGS FREE ACCESS
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    Ordinary ultrasonic motors have a preload mechanism using a spring. A stator vibrator support and preload mechanisms comprise some component parts. Such a structure prevents to make an ultrasonic motor compact. The objective of this study is to make a small ultrasonic motor which can be easily miniaturized. Simple preload mechanism and support were realized by forming a stator vibrator and a flat spring for preload on an elastic metal plate bent into L–shape. From trial constructions of an ultrasonic spindle motor, the high–speed revolution of 100rps was obtained.
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  • Improvement of Durability of UHV Compatible Rotary Feedthrough Using Ultrasonic Motor
    Shintaro Funami, Toshiki Niino
    Session ID: M38
    Published: March 05, 2006
    Released on J-STAGE: January 31, 2007
    DOIhttps://doi.org/10.11522/pscjspe.2006S.0.1015.0
    CONFERENCE PROCEEDINGS FREE ACCESS
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    [in Japanese]
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  • Surface Acoustic Wave Linear Motor Using Segment–Structured Diamond–Like Carbon Films on Contact Surface
    Kotani Hiroyuki, Aoki Yuichi, Takasaki Masaya, Ohtake Naoto, Mizuno Ta ...
    Session ID: M39
    Published: March 05, 2006
    Released on J-STAGE: January 31, 2007
    DOIhttps://doi.org/10.11522/pscjspe.2006S.0.1017.0
    CONFERENCE PROCEEDINGS FREE ACCESS
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    Surface acoustic wave (SAW) linear motor is a kind of ultrasonic motors. The advantages of the SAW linear motor is thin structure, high force, high speed and precise positioning. SAW linear motor has employed silicon slider with distributed projections and acquired high performances. In this research, segment–structured diamond–like carbon (S–DLC) films were applied instead of the silicon slider projections. We expected the films could increase abrasion–resistant performance of contact surface and acquire the same driving characteristics as the conventional silicon sliders. In this report, a silicon slider with S–DLC films was installed to a SAW linear motor. The slider worked successfully.
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  • Development of Micro Motor Driven by Propagating Wave
    Akihei Nakajima, Yuji Furukawa, Tadashi Moriya
    Session ID: M40
    Published: March 05, 2006
    Released on J-STAGE: January 31, 2007
    DOIhttps://doi.org/10.11522/pscjspe.2006S.0.1019.0
    CONFERENCE PROCEEDINGS FREE ACCESS
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    In this paper, driving performance of a prototype ultrasonic micro motor and its application to catheter treatment in blood vessel, are reported. The invented new traveling–wave type ultrasonic motor (USM) has a novel simple structure, hence is easy to be miniaturized, that is, the rotor is installed outside or inside of coil–type stator in which ultrasonic vibration travels. At the contacts between rotor and stator, rotor is accelerated by frictional force and rotated. As a result, a spring for preloading and any piezo–electric element at driving point is not needed. It was verified that the minimum of 0.8mm diameter motor could work well. For a practical use, motor is applied to a catheter treatment for a thrombus. Recently, the treatment of the thrombus with the catheter has the method of pouring the dissolution medicine, and cut off the thrombus directly. Then, this USM was installed at the top of catheter, and whether an effective working was obtained as a medical treatment device such as stirs of the dissolution medicine and crushing the thrombus was verified.
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  • Deformation speed measurement of polar ice using precise laser interferometer
    Masato Aketagawa, Kazuki Anno, Takahiro Kogure, Morimasa Takata, Nobuh ...
    Session ID: N06
    Published: March 05, 2006
    Released on J-STAGE: January 31, 2007
    DOIhttps://doi.org/10.11522/pscjspe.2006S.0.1047.0
    CONFERENCE PROCEEDINGS FREE ACCESS
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    In order to clarify a climate change of the earth, a deformation process of polar ice must be solved. In this paper, a measurement method of deformation speed of polar ice using a precise laser interferometer is described. A prototype of the laser interferometer has been constructed. Its performance at room temparature is evaluated.
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  • Development of laser interferometer with picometer resolution using frequency–tunable laser
    Fumio Matsuura, Masashi Ishige, Masaaki Kawasugi, Yuuta Hoshino, Masat ...
    Session ID: N07
    Published: March 05, 2006
    Released on J-STAGE: January 31, 2007
    DOIhttps://doi.org/10.11522/pscjspe.2006S.0.1049.0
    CONFERENCE PROCEEDINGS FREE ACCESS
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    A phase modulation homodyne interferometer (PMHI), in which an incident light phase is modulated with Pockels–Cell and the output signal is demodulated with a lock–in amplifier, can determine an optical path difference of wavelength times integer with an accuracy of picometer using the null–method. In the case of dark fringe, the output of the lock–in amplifier of the PMHI must be zero. We have constructed a PMHI with a tunable laser diode (TLD) to calibrate nanometer sensor. In the interferometer, a displacement of the movable mirror, which can be linked with the nanometer sensor, can be determined by tracking the dark fringe and measuring a change of the TLD frequency.
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  • Three Dimensional Displacement Measurement using Ring–Slit Ray (5th report)
    Shin Usuki, Daisuke Kageyama, Kazuhiro Enami, Masahiko Hiraki, Satoru ...
    Session ID: N08
    Published: March 05, 2006
    Released on J-STAGE: January 31, 2007
    DOIhttps://doi.org/10.11522/pscjspe.2006S.0.1051.0
    CONFERENCE PROCEEDINGS FREE ACCESS
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    For 3D positioning of a complex 3D mechanism flexibly, it is needs to measure 3D displacement of an end–effecter of the mechanism in the high precision by non–contact method. It was common to put the plural sensor or scale together and to measure the 3D displacement of the mechanism. However, it is difficult to calibrate positions and sensitivities of the plural sensor or scale. Therefore, the novel three dimensional displacement measuring method is proposed using the optics that focus is collected in the center of the spherical target which has been used for the radius measurement of the ball. Instead of high sensitivity on measuring in the XY direction, new ideas are necessary for the measurement in the Z direction in this optics. Therefore, a ring beam is used instead of the simple ray for Z direction measurement. The theoretical examination and simulation of the three dimensional displacement measurement using the ring beam were done and that validity is confirmed by the series of the experiments. And the non–linearity was improved by the ellipse approximation of the ring image. In this report, we developed the compact equipment for 3D displacement measurement and the influence of the temperature change was investigated.
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  • Study on high precise 3–dimensional coordinate measurement with laser trapping probe
    Masaki Michihata, Yasuhiro Takaya, Takashi Miyoshi, Terutake Hayashi
    Session ID: N09
    Published: March 05, 2006
    Released on J-STAGE: January 31, 2007
    DOIhttps://doi.org/10.11522/pscjspe.2006S.0.1053.0
    CONFERENCE PROCEEDINGS FREE ACCESS
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    Manufactures have being strongly desiring dimensional measurement instruments that have an ability to measure complex shaped microscopic objects. In this paper, a prototype of Nano–CMM, which equipped the laser trapping probe as a high sensitive position detection probe and 3–axes–stage with high accurate linear scales as a positioning stage, was introduced. This study aims to finally achieve the dimensional measurement of micro–devices such as micro–parts or micro–lens dies, for which measuring range of over 10mm and measuring accuracy of 10nm should be accomplished.
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  • Precision Nanometrology of Micro–Aspheric Profiles
    Atsushi Shibuya, Yasuo Yoshikawa, Gao Wei, Satoshi Kiyono
    Session ID: N32
    Published: March 05, 2006
    Released on J-STAGE: January 31, 2007
    DOIhttps://doi.org/10.11522/pscjspe.2006S.0.1073.0
    CONFERENCE PROCEEDINGS FREE ACCESS
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    In the 21st century micro aspheric lenses have become more and more important in medical technology and information technology. The necessary accuracy of micro aspheric lenses is higher than 100nm. However, there are no methods to measure the profile of the micro aspheric lenses to assure this accuracy. In this paper a method to measure the profile of the aspheric profile is presented. In this method, error motions of the scanning stage and the profile of the aspheric surface are measured simultaneously, and the method to measure a ring artifact which is used as a reference of the error motion measurement is also presented. Last of all, the measurement result of the artifact is presented.
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  • Development of a New Gear Measuring Instrument using Direct Drive Systems (3rd report)
    Tetsuya Taguchi, Akiko Aoki, Naoki Takahashi, Ryohei Takeda, Aigo Ming ...
    Session ID: N33
    Published: March 05, 2006
    Released on J-STAGE: January 31, 2007
    DOIhttps://doi.org/10.11522/pscjspe.2006S.0.1075.0
    CONFERENCE PROCEEDINGS FREE ACCESS
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    The purpose of this research is to develop a highly accurate gear measuring instrument with small uncertainty of measured values and a repeatability less than 1 micro meter. And a gear measuring instrument consisting of direct drive linear axis and rotary axis is being developed. In this paper, the results for measuring the tooth profile of an involute artifact are described.
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  • Precise Measurement of Involute Profile by Laser Interferometer(3rd Report)
    Fumi Takeoka, Masaharu Komori, Aizo Kubo, Toshiyuki Takatsuji, Sonko O ...
    Session ID: N34
    Published: March 05, 2006
    Released on J-STAGE: January 31, 2007
    DOIhttps://doi.org/10.11522/pscjspe.2006S.0.1077.0
    CONFERENCE PROCEEDINGS FREE ACCESS
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    The vibration / noise of gear is one of the serious problems for vehicles, e.g. automobile, train and helicopter. The characteristics of vibration / noise of gear are influenced by tooth flank form of sub micron meter order and therefore strict quality control of tooth flank form is demanded. Involute artifact, which is used to calibrate the measuring machine of tooth flank form of gear, must be measured extremely precisely. In previous report, the method to measure the involute artifact directly by laser interferometer is proposed. In this report, it is revealed that slip between artifact and rail harm measurement in this method and non–slip driving method is developed. It improves repeatability of the measurement and it is confirmed that highly precise measurement of involute artifact is possible.
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  • Development of Surface Shape Measurement Sensor System by Contact Stress Distribution
    Takatoshi Tonsho, Yoshikazu Kobayashi, Kenji Shirai
    Session ID: N35
    Published: March 05, 2006
    Released on J-STAGE: January 31, 2007
    DOIhttps://doi.org/10.11522/pscjspe.2006S.0.1079.0
    CONFERENCE PROCEEDINGS FREE ACCESS
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    The purpose of this study is to reinvent contact sensor system by contact stress distribution. This system calculates stress distribution output by contact with elastic body and rigid measured object. And, surface displacement of elastic body is calculated by the contact transformation theory. It is a system that outputs the surface profile of the measured object from the two calculation results. Moreover, we developed simulation program of contact sensor system. This program is on the same principle as contact sensor system. This system can be simulated contact stress and surface displacement of elastic body before this system is developed.
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  • Form Measurement and Accuracy Evaluation by Multi–axis Robot System
    Yoshihiro Iida, Tomohisa Tanaka, Yoshio Saito
    Session ID: N37
    Published: March 05, 2006
    Released on J-STAGE: January 31, 2007
    DOIhttps://doi.org/10.11522/pscjspe.2006S.0.1081.0
    CONFERENCE PROCEEDINGS FREE ACCESS
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    The evaluation technology of products with complex form is needed along with the various type and amount of production of machining. It has the problem with a difficult measurement of the slope and free form surfaces due to quantities of light shortage though a lot of noncontact CMM(Coordinate Measuring Machine) are being done by the technique of laser now. In this research, the multi–axis robot system was constructed using confocal laser sensor and the multi–joint robot that combined 6–axis manipulator with 2–axis table. The effectiveness of the multi–axis use and the improvement of measurement accuracy were experimentally evaluated for complex form including the free form surface.
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  • Error compensation of a position measurement system using PSD for a miniature robot
    Toru Inoue, Akihiro Torii, Kae Doki, Akiteru Ueda
    Session ID: N38
    Published: March 05, 2006
    Released on J-STAGE: January 31, 2007
    DOIhttps://doi.org/10.11522/pscjspe.2006S.0.1083.0
    CONFERENCE PROCEEDINGS FREE ACCESS
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    The authors developed a position measurement system using position sensitive detectors (PSDs) for a miniature robot. The measurement error includes the systematic error which consists of the arrangement error of measurement system and the PSD output error. We evaluate the PSD error by using the standard stage, which is used for the error compensation. The error in the PSD output is compensated by using the compensation factor, which cannot compensate the non linearity of the PSD output. In this paper, we describe the error compensation of the position measurement system and propose the error correction method using the least–square method. The experimental results indicate the feasibility of the proposed method. We discuss the accuracy of the position measurement.
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  • Study on Calibration of Planar Linear Motor
    Xin Chen, Kiyoshi Takamasu, Toshihiro Ishida
    Session ID: N39
    Published: March 05, 2006
    Released on J-STAGE: January 31, 2007
    DOIhttps://doi.org/10.11522/pscjspe.2006S.0.1085.0
    CONFERENCE PROCEEDINGS FREE ACCESS
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    Planar linear motor is a kind of 2D precision positioning stage, which is different from the usual XY stage and consisted of multiple linear motors arranged orthogonally in the same layer. It is a general way to employ laser interferometers and reflecting mirrors as the positional sensor of the planar linear motor for nano–order resolution′s application. A low cost and simple method is proposed for users to calibration the accuracy of the planar motor without square–gauge or cross grid–scale. In this paper, x–axis reflecting mirror is measured by straightness method and 2–point method. Next, a method to measure the squareness error of motor motion is explained, which uses a common hexahedral block and no need a high accuracy datum like a square–gauge. According to the measured profile and the squareness of the reflecting mirrors, the geometry motion error could be calibrated when ignoring the error from the flatness of the platen.
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  • Natural Spline Filter for Reduction of End Effect
    Munetoshi Numada, Takashi Nomura, Kazuhide Kamiya, Hatsuzo Tashiro, Ko ...
    Session ID: N40
    Published: March 05, 2006
    Released on J-STAGE: January 31, 2007
    DOIhttps://doi.org/10.11522/pscjspe.2006S.0.1087.0
    CONFERENCE PROCEEDINGS FREE ACCESS
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    A low–pass filter is applied to finite length data. Because of this, unexpected vibration which is called an end–effect occurs at the end of data as an output of the low–pass filter. To solve this problem, a spline filter which uses a smoothing spline has been proposed. The smoothing spline is one of a natural spline that interpolates given data smoothly most. By using a natural boundary condition of the natural spline, this paper proposes the natural spline filter that generates no end–effect and can apply to low–pass filters having various transmission characteristics.
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  • Evaluation of Sharpness of Dental Scalers Using Optical Reflection – Evaluation Method of Optical Reflection Images of Blades Rotated in Two Directions –
    Yosuke Hosoya, Shizuichi Higuchi, Kyohei Matsui, Hideo Kato, Kazuya Ok ...
    Session ID: N61
    Published: March 05, 2006
    Released on J-STAGE: January 31, 2007
    DOIhttps://doi.org/10.11522/pscjspe.2006S.0.1099.0
    CONFERENCE PROCEEDINGS FREE ACCESS
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    Dentists and dental hygienists remove dental calculus using a cutting tool called dental scaler. The evaluation of sharpness of dental scalers requires skill which depends on sensory examination. The aim of this research is to evaluate the sharpness of scalers objectively. An apparatus for taking photos of scalers was developed by taking into account the evaluation method of observing the cutting edge reflection used by experts. The scaler to be inspected was fixed on a turn table driven by a stepping motor. The angle of the scaler was changed by the stepping motor and the angle of a scaler fixture on the turn table was changed by a RC servo motor. And photos of the cutting edge of the scaler were taken from various angles by a CCD camera. Next, the relation between the optical reflection pattern of the cutting edge and the sensory evaluation was examined. As a result, the implications between them were found and the angle of the scaler fixture was also an important factor for evaluating the sharpness of the scaler as well as the angle of the scaler.
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