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Volume 128, Issue 9
Displaying 1-5 of 5 articles from this issue
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Review
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Mitsuhiro Shikida2008 Volume 128 Issue 9 Pages 341-346
Published: September 01, 2008
Released on J-STAGE: September 01, 2008
JOURNAL FREE ACCESSAnisotropic wet etching process is now widely used in MEMS fabrication. The etching characteristics, mechanism of etch-pit formations on both of {100} and {111} Si surfaces, and micro pyramid formation on the etched {100} surface is described in this review paper. Advanced processes for fabricating complicated 3-D structures by wet etching are also explained.View full abstractDownload PDF (1430K)
Paper
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Daisuke Yamazaki, Lin Zhang, Joanna Pawlat, Toshitsugu Ueda2008 Volume 128 Issue 9 Pages 347-351
Published: September 01, 2008
Released on J-STAGE: September 01, 2008
JOURNAL FREE ACCESSThermo-resistive platinum(Pt) thin film sensor was produced using Micro Electro Mechanical Systems (MEMS) fabrication techniques. The sensor design incorporated resistor elements that would facilitate the temperature-resistance characteristics and mechanisms of Pt based thin film thermo-resistors. The sensor was fabricated with lift-off process that allowed the dual sensing surface area. Furthermore, the dual sensing surfaces ensured faster response to hydrogen gas. To increase the catalytic reaction comparing with at the room temperature, the sensor was heated to a specified temperature by applying the current to a Pt thin film. The catalytic reaction took place when the heated sensor came into the contact with hydrogen. Additionally, the differential Pt thin film hydrogen gas sensor was also developed. This gas sensor was able to compensate the changes in the external environment such as temperature, moisture, etc. The fabricated hydrogen sensor detected the concentration of hydrogen gas in air from 2% to 9%.View full abstractDownload PDF (733K) -
Dzung Viet Dao, Akihiro Miyaoka, Susumu Sugiyama, Hiroshi Ueno, Kouich ...2008 Volume 128 Issue 9 Pages 352-357
Published: September 01, 2008
Released on J-STAGE: September 01, 2008
JOURNAL FREE ACCESSIn this paper, a thermoelectric generator with a flexible structure is presented. The thermoelectric generator consists of 1625 thermocouples made from two materials, i.e. n-type BiTe and Cu thin films, on a flexible polyimide sheet by utilizing micromachining technology. The prototype of the flexible thermoelectric generator has dimensions of 100mm × 80mm × 3mm (length × width × thickness). Theoretical calculations show an output voltage of 317mV/K and a power of 7.8μW/K2. Preliminary experimental results measured on the test thermocouple samples show an average Seebeck voltage of 58.8μV/K per one thermocouple was obtained. This thermoelectric generator structure can be bent flexibly, so it can be used on both flat and cylindrical surfaces, e.g. on the skin of human body.View full abstractDownload PDF (1921K) -
Wang Xin, Katsunori Shida2008 Volume 128 Issue 9 Pages 358-363
Published: September 01, 2008
Released on J-STAGE: September 01, 2008
JOURNAL FREE ACCESSInstead of functioning as part of a pointing device in computing, the optical mouse sensor is employed for non-contact tactile sensing in this study. The translation direction, the height and the category of an object surface can be sensed. It is an interesting idea to make an optical mouse sensor work in the manner of a human hand but in a non-contact way to “feel” the object surface. Based on the data table obtained from the experiments, the translation direction is calculated and the nonlinearity of the translation direction sensing is studied. It can be concluded that the resolution of an optical mouse sensor is direction-related. The feasibility of surface height measurement is analyzed and the optical mouse sensor can be used for crack detection on a plane surface. Height variation of 0.2mm can be detected. Besides, the feasibility of the optical mouse sensor for surface discrimination is proposed.View full abstractDownload PDF (648K)
Letter
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Yuhki Kitazono, Takeshi Inoue, Masato Miyauchi, Seiichi Serikawa2008 Volume 128 Issue 9 Pages 364-365
Published: September 01, 2008
Released on J-STAGE: September 01, 2008
JOURNAL FREE ACCESSConventionally, a system for prevention of thing left behind uses only an electric wave of the radio machinery. The precision for detection is, however, low. It is proposed that a system which used a detection of the walking and an electric wave of the radio machinery in this study. Acceleration sensors, and RFID tag are adopted for the system. The precision for detection of thing left behind becomes high compared to conventional system.View full abstractDownload PDF (294K)
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