A high output voltage micro thermoelectric generator (µTEG) has been developed by fabricating thermocouples having a high aspect ratio with a high integration density. They have been made by a novel and simple fabrication method, in which thermoelectric nanopowders are filled in a photosensitive glass mold by using aerosol deposition (ASD). This method has a possibility to increase the aspect ratio of thermocouples drastically while increasing their toughness and increasing their thermal resistance. We have fabricated thermocouples with an aspect ratio of 3.3 and a high integration density of 620 TCs/cm
2. Their Seebeck coefficient and electrical resistivity are 290 µV/K and 1.5 mΩcm, respectively. The µTEG reaches a thermal resistance of 3.6 K/W·cm
2, output voltage efficiency of 0.18 V/K/cm
2, and output power efficiency of 18 µW/K
2/cm
2. These HAR thermocouples have an advantage for energy harvesting from a human body because they can result in a high temperature difference because of their high thermal resistance.
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