In this work a new
Microwave
Induced
Plasma (MIP) source with an axially-varied bore discharge tube was developed, which is able to introduce liquid aerosols directly into the plasma. The resonant frequency and electric field in the MIP TM
010 cavity were calculated using the finite element method. The axially-varied tube highly enhanced the electric field on the edge at the center of the plasma discharge tube.
To confirm the effect of the discharge tube newly developed, the electron number density and the plasma temperatures were measured. The result shows that the density and the temperatures were both elevated. Accordingly, the calculation seems to be qualita tively adequate.
抄録全体を表示