Ionic liquids have been used in membrane separation for more than a decade due to their physical and chemical properties, such as non–volatility, thermal stability and unique solubility. In this paper, we present a new concept in chemically stabilized IL membranes using a silylated IL as a precursor chemical. The membranes showed selective permeability toward organic vapors against H
2 and CH
4. Their permeation and separation mechanism, and microstructure were discussed by gas and vapor permeation tests, Attenuated Total Reflection–IR, N
2 adsorption measurements, and nanopermporometry. These characterization revealed that the membranes depend on two permeation pathways, “only the dense ionic liquid regions” and “Si–O– network derived–micropores + dense ionic liquid regions”. The membranes contained about 1 nm–sized micropores, and the contributions of two permeation pathways to H
2 permeation were successfully evaluated. In addition, ionic liquid–immobilized siloxane membranes with a different Si–O– network structure were developed, and their CH
3OH permeation characteristics were discussed.
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