Inductively coupled plasma mass spectrometry (ICP-MS) and ICP atomic emission spectrometry (ICP-AES) using argon ICP as an ionization or an excitation source have been widely utilized for trace elemental analysis . To overcome some limitations of conventional argon ICP new plasma sources have been investigated . In order to utilize other gas plasma for spectroscopic analysis, multi-gas ICP source was developed . And to reduce consumption of the sample solutions, droplet direct injection nebulizer (D-DIN) and microplasma source was designed and tested. In this article, recent works of these inventions are described.
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