Gap phenomena and discharge current
Id are investigated experimentally under the conditions of krypton concentration
GKr of 1 to 20% in (Kr/He) mixture gas and fluorine concentration
GF2 of 0.1 to 1% in (F
2/He) mixture gas to clarify influences of krypton and fluorine gas on discharge characteristics for a KrF excimer laser. When
GKr is over 10% in (Kr/He) mixture gas, corresponding to the production of filamentation in glow discharge,
Id is seen to be changed discontinuously in the second or third half cycle. Based on both experimental and numerical results, the discontinuity of the current is concluded to be a sign of the generation time of filamentation. In the case of 0.1_??_0.3% of
GF2 in (F
2/He) mixture gas, filamentation and arc with glow are observed.
Id terminates in first half cycle owing to an electron attachment by fluorine gas, but begins to flow again after the termination or has a plateaus due to arc and filamentation. More than 0.4% of
GF2, only arc is generated.
Id becomes small and pulse width of the first half cycle is extended due to extreme contraction of discharge area. In the case of (Kr/F
2/He) mixture gas, filamentation and arc with glow are observed and
Id terminates in first half cycle. Fluorine gas is clarified to have a large effect on discharge and current characteristics in KrF laser mixture gas.
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