This paper describes reliability of a capacitive humidity sensor based on the moisture sensitivity of polyimide. The sensor consists of a simple polyimide capacitor structure fabricated directly on Si substrate which is used as a lower electrode. Polyimide layer was coated with spinner by the thickness of about 1.2μm, and then a comb-shaped upper Au electrode was attached on it, which was about 10nm in thickness. Moreover, another type of polyimide layer was formed on the top surface as a protective one.
In order to improve the sensitivity and stability characteristics, the mixing of two different kinds of polyimide resin was considered. As a function of the polyimide mixing ratio, the sensitivity for humidity variation and the durability for high temperature and high humidity conditions were studied.
Characteristics of the sensor such as sensitivity, linearity, hysteresis, response time and durability were evaluated. The durability has been examined in various extreme environment such as high temperature, high humidity, temperature cycles and wetting cycles with dew. Long-term stability was typically less than 5%RH.
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