The surface structure of silica gel treated with 1, 4-butanediol (1) or of Chemically-Vapor-Deposited (CVD) SiO
2 thin film treated with n-butanol (2) was investigated from their X-ray photoelectron spectra. These spectra showed that they were consisted of Si, O and C atom. The scanning photo-electron spectra of C
1s, electron indicates the asymmetric broad band with the maximum at 1196. 4 eV for (1) and at 1197. 5 eV for (2), respectively. The spectrum for (1) was analysed into 3 component spectra with maxima at 1196, 1195 and 1193. 5 eV, respectively, in a near 2 : 1 : 1 peak intensity ratio. The spectrum for (2) was analysed into 2 component spectra with maxima at 1197. 5 and 1196. 4 eV, respectively, in a near 3 : 1 peak intensity ratio. Thus the surface group for (1) was perceived to be consisted of 3 different kinds of C atoms like SiOCH
2|CH
2CH
2|CH
2OH. Furthermore, the surface group for (2) was also perceived to be consisted of 2 different kinds of C atoms like SiOCH
2|CH
2CH
2 CH
3.
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