Effect of porosity on the oxidation behavior of porous SiC was investigated at oxygen partial pressures of 20 kPa and 1 kPa.Evolution rate of gases generated during oxidation was measured using quadrupole mass spectrometer.
Weight gain was observed after oxidation in every sample.Cristobalite was detected
as oxidation product on the surface of the sample after oxidation. These results indicate that the oxidation behavior of porous SiC was passive oxidation forming the protective film. In the case of oxidation at oxygen partial pressure of 20 kPa,both weight gain and amomt of gas evolved were increased with increasing apparent porosity. On the other hand,in the case of oxygen partial pressure
of 1 kPa,weight gain and amount of gas evolved were nearly constant values in spite of increasing apparent porosity.