Novel nitride based foaming agents were explored by making our innovated superplastically ceramic foams. Ceramic mono-foams were fabricated successfully using AlN and Si3N4 foaming agents following the procedure based on conventional SiC foaming agent. By using BN as a foam agent, on the other hand, such process should be thoroughly changed to make mono-foam. Gas evolution of Si3N4 foaming agent was indicated to be an active oxidation similar to SiC one, while that for AlN was decomposition. Both AlN and Si3N4 are promising foaming agents insensitive to previous oxidation.