This study investigates the role of innovation in the growth and productivity of the manufacturing industries of ICT and other high technologies in China. The empirical analysis adopts an endogenous growth production function and examines the cross-provincial data over the period from 1995 to 2016. The result certifies that the value of innovation on productivity is positive and significant in high technology manufacturing sectors in China. A one percent increase in R&D expenditure leads to a 0.280 percent revenue increase in the electronic and telecommunications equipment sector (ETE). In the medical equipment and meters sector (MEM), the pharmaceuticals sector (Ps), and the aircraft and spacecraft sector (AS), it is 0.362 percent, 0.240 percent, and 0.174 percent respectively. Meanwhile, the output elasticity of R&D expenditure in the ETE in the Eastern Coastal Region is 1.39 times that in the Inner Region. It shows that the constant R&D investment leads to greater efficiency in converting R&D expenditures into productivity.