IEICE Transactions on Electronics
Online ISSN : 1745-1353
Print ISSN : 0916-8524
E97.C 巻, 5 号
選択された号の論文の16件中1~16を表示しています
Fundamentals and Applications of Advanced Semiconductor Devices
  • Yuzo OHNO
    2014 年E97.C 巻5 号 p. 392
    発行日: 2014/05/01
    公開日: 2014/05/01
    ジャーナル フリー
  • Katsunori MAKIHARA, Mitsuhisa IKEDA, Seiichi MIYAZAKI
    原稿種別: PAPER
    2014 年E97.C 巻5 号 p. 393-396
    発行日: 2014/05/01
    公開日: 2014/05/01
    ジャーナル 認証あり
    We have succeeded in highly selective growth and positioning of Si- and SiGe-quantum-dots (QDs) on SiO2 patterns by controlling the reactive area, whose surface is terminated with OH bonds for Si nucleation in low-pressure chemical vapor deposition (LPCVD). The selective growth of QDs on thermally grown SiO2 line-patterns was demonstrated in LPCVD of SiH4 and GeH4 just after Si nucleation by controlling the early stages of Si2H6-LPCVD, which indicates effectively enhanced initial nucleation on OH-terminated SiO2 surface and suppression of the nucleation and growth of dots on as-grown SiO2 surface during Si2H6-LPCVD prior to SiH4-LPCVD.
  • Daichi TAKEUCHI, Katsunori MAKIHARA, Mitsuhisa IKEDA, Seiichi MIYAZAKI ...
    原稿種別: PAPER
    2014 年E97.C 巻5 号 p. 397-400
    発行日: 2014/05/01
    公開日: 2014/05/01
    ジャーナル 認証あり
    We fabricated highly dense Si nano-columnar structures accompanied with Si nanocrystals on W-coated quartz and characterized their local electrical transport in the thickness direction in a non-contact mode by using a Rh-coated Si cantilever with pulse bias application, in which Vmax, Vmin, and the duty ratio were set at +3.0V, -14V, and 50%, respectively. By applying a pulse bias to the bottom W electrode with respect to a grounded top electrode made of ∼10-nm-thick Au on a sample surface, non-uniform current images in correlation with surface morphologies reflecting electron emission were obtained. The change in the surface potential of the highly dense Si nano-columnar structures accompanied with Si nanocrystals, which were measured at room temperature by using an AFM/Kelvin probe technique, indicated electron injection into and extraction from Si nanocrystals, depending on the tip bias polarity. This result is attributable to efficient electron emission under pulsed bias application due to electron charging from the top electrode to the Si nanocrystals in a positively biased duration at the bottom electrode and subsequent quasi-ballistic transport through Si nanocrystals in a negatively biased duration.
  • Takashi NOGUCHI, Tatsuya OKADA
    原稿種別: PAPER
    2014 年E97.C 巻5 号 p. 401-404
    発行日: 2014/05/01
    公開日: 2014/05/01
    ジャーナル 認証あり
    Excimer laser annealing at 308nm in UV and semiconductor blue laser-diode annealing at 445nm were performed and compared in term of the crystallization depending on electrical properties of Si films. As a result for the thin Si films of 50nm thickness, both lasers are very effective to enlarge the grain size and to activate electrically the dopant atoms in the CVD Si film. Smooth Si surface can be obtained using blue-laser annealing of scanned CW mode. By improving the film quality of amorphous Si deposited by sputtering for subsequent crystallization, both laser annealing techniques are effective for LTPS applications not only on conventional glass but also on flexible sheet. By conducting the latter advanced annealing technique, small grain size as well as large grains can be controlled. As blue laser is effective to crystallize even rather thicker Si films of 1µm, high performance thin-film photo-sensor or photo-voltaic applications are also expected.
  • Shunjiro FUJII, Takanori OKUKAWA, Zongfan DUAN, Yuichiro YANAGI, Masay ...
    原稿種別: BRIEF PAPER
    2014 年E97.C 巻5 号 p. 405-408
    発行日: 2014/05/01
    公開日: 2014/05/01
    ジャーナル 認証あり
    We characterized bulk-heterojunction (BHJ) solar cells using a new phenylene-thiophene oligomer, 3,7-bis[5-(4-n-hexylphenyl)-2-thienyl]dibenzothiophene-5,5-dioxide (37HPTDBTSO), and phenyl-C61-butyric-acid methyl ester (PCBM). Their photovoltaic properties including current-voltage characteristics and spectrum response were investigated. It was found that 37HPTDBTSO is appraised to be valuable electron donor. The characteristics of BHJ solar cells using mixed two donors of 37HPTDBTSO and a polymer of poly(3-hexylthiophene) (P3HT) were further investigated. OSC using the blend film of mixed donars and PCBM achieved a power conversion efficiency of 0.89%.
  • Hiroshi OKADA, Yuki OKADA, Hiroto SEKIGUCHI, Akihiro WAKAHARA, Shin-ic ...
    原稿種別: PAPER
    2014 年E97.C 巻5 号 p. 409-412
    発行日: 2014/05/01
    公開日: 2014/05/01
    ジャーナル 認証あり
    380keV proton irradiation effects are investigated on p-GaN and n-GaN layers in GaN-based light emitting diode (LED) by characterizing current-voltage (I-V) characteristics of p-n junction, and two-terminal resistance of p- and n-GaN on both type of layers in LED wafer. Two-terminal resistance on n-GaN kept its initial value after the 1×1014cm-2 fluence, and was remained the same order after the 1×1015cm-2 fluence. On the other hand, p-GaN showed sensitive increase in two-terminal resistance after the 1×1014cm-2, and six orders of increase after the 1×1015cm-2 fluence. Observed sensitive increase of resistivity in p-GaN is explained as a lower initial hole density in p-GaN than the initial electron density in n-GaN layer.
  • Dae-Hee HAN, Shun-ichiro OHMI, Tomoyuki SUWA, Philippe GAUBERT, Tadahi ...
    原稿種別: PAPER
    2014 年E97.C 巻5 号 p. 413-418
    発行日: 2014/05/01
    公開日: 2014/05/01
    ジャーナル 認証あり
    To improve metal oxide semiconductor field effect transistors (MOSFET) performance, flat interface between gate insulator and silicon (Si) should be realized. In this paper, the influence of Si surface roughness on electrical characteristics of MOSFET with hafnium oxynitride (HfON) gate insulator formed by electron cyclotron resonance (ECR) plasma sputtering was investigated for the first time. The surface roughness of Si substrate was reduced by Ar/4.9%H2 annealing utilizing conventional rapid thermal annealing (RTA) system. The obtained root-mean-square (RMS) roughness was 0.07nm (without annealed: 0.18nm). The HfON was formed by 2nm-thick HfN deposition followed by the Ar/O2 plasma oxidation. The electrical properties of HfON gate insulator were improved by reducing Si surface roughness. It was found that the current drivability of fabricated nMOSFETs was remarkably increased by reducing Si surface roughness. Furthermore, the reduction of Si surface roughness also leads to decrease of the 1/f noise.
  • Masayuki YAMADA, Ken UCHIDA, Yasuyuki MIYAMOTO
    原稿種別: BRIEF PAPER
    2014 年E97.C 巻5 号 p. 419-422
    発行日: 2014/05/01
    公開日: 2014/05/01
    ジャーナル 認証あり
    The delay time component (τs) of an InGaAs MOSFET caused by dynamic source resistance is discussed. On the basis of the relationship between the current density (J) and the dynamic source resistance (rs), the value of rs is proportional to 1/J with some offset at low current densities, whereas the offset becomes smaller in a region of high current density. The value of τs depends on the current in a way similar to rs. Because the offset in the high-current-density region is proportional to the square root of the effective mass, an InGaAs MOSFET with a small mass has a shorter rs than a Si MOSFET.
  • Satoru TANOI, Tetsuo ENDOH
    原稿種別: PAPER
    2014 年E97.C 巻5 号 p. 423-430
    発行日: 2014/05/01
    公開日: 2014/05/01
    ジャーナル 認証あり
    A low VDD current mirror with deep sub-micron vertical MOSFETs is presented. The keys are new bias circuits to reduce both the minimum VDD for the operation and the sensitivity of the output current on VDD. In the simulation, our circuits reduce the minimum VDD by about 17% and the VDD sensitivity by one order both from those of the conventional. In the simulation with 90nm φ vertical MOSFET approximate models, our circuit shows about 4MΩ output resistance at 1.2-V VDD with the small temperature dependence, which is about six times as large as that with planar MOSFETs.
  • Kazuki ITOH, Tetsuo ENDOH
    原稿種別: PAPER
    2014 年E97.C 巻5 号 p. 431-437
    発行日: 2014/05/01
    公開日: 2014/05/01
    ジャーナル 認証あり
    Voltage Regulator Module, called VRM is a dedicated module for supplying power to microprocessor units. Recently, significant improvement of microprocessor units arises new challenges for supplying stable power. For stable and efficient control, multiphase interleaved topology is often used in today's VRM. To achieve high performance VRM, a current sensing circuit with both high efficiency and high accuracy is demanded. To achieve high accuracy, thermal dependency is a problem to be solved. In this paper, a novel alternating voltage controlled current sensing method is proposed for suppressing thermal dependency. In the proposed method, a high frequency AC voltage is superposed on the gate-ON-voltage. Then, the AC channel current is generated, and its amplitude becomes proportional to inductor current. The AC channel current is detected through a LC filter. The proposed current sensing method is very effective for realizing a current mode control DC-DC converter. In first, we simulated the relationship between our proposed current sensing method and a electrical characteristic of a power MOSFET. We used a power MOSFET device model published by a manufacture in this simulation. From the results, we find the gate parasitic capacitance of power MOSFET effects on the sensitivity of the current sensing circuit. Besides, the power dissipation in a power MOSFET increases by the frequency of applied gate ac voltage. Moreover, the proposed current sensing circuit based on the proposed method was designed and simulated the operations by Hspice. From the results, the designed current sensing circuit based on the proposed method has enough wide sensing window from 3A to 30A for VRM applications. Moreover, comparing to the conventional current sensing circuits with the MOSFET ON-resistance, the error of the proposed current sensing circuit can be decreased over 25% near 100°C.
  • Ryo MATSUSHIBA, Hiroaki KOTANI, Takao WAHO
    原稿種別: PAPER
    2014 年E97.C 巻5 号 p. 438-443
    発行日: 2014/05/01
    公開日: 2014/05/01
    ジャーナル 認証あり
    An energy-efficient ΔΣ modulator using a novel switched-capacitor-based integrator has been investigated. The proposed dynamic integrator uses a common-source configuration, where a MOSFET turns off after the charge redistribution is completed. Thus, only the subthreshold current flows through the integrator, resulting in high energy efficiency. A constant threshold voltage works as the virtual ground in conventional opamp-based integrators. The performance has been estimated for a 2nd-order ΔΣ modulator by transistor-level circuit simulation assuming a 0.18-µm standard CMOS technology. An FOM of 29fJ/conv-step was obtained with a peak SNDR of 82.6dB for a bandwidth and a sampling frequency of 20kHz and 5MHz, respectively.
  • Namhyung KIM, Kyungmin KIM, Jae-Sung RIEH
    原稿種別: BRIEF PAPER
    2014 年E97.C 巻5 号 p. 444-447
    発行日: 2014/05/01
    公開日: 2014/05/01
    ジャーナル 認証あり
    This paper presents a G-band triple-push voltage controlled oscillator (VCO) operating around 177GHz. The VCO, implemented in a commercial 0.13-µm RFCMOS technology, adopts a triple-push topology that is composed of 3 symmetrically coupled identical Colpitts sub-oscillators. Oscillation frequency can be tuned from 175.9GHz to 178.4GHz with varactor tuning voltage swept from 0 to 1.2V. The calibrated output power ranged from -19.7dBm to -16.6dBm depending on the oscillation frequency. The measured phase noise of the VCO is -80.2dBc/Hz at 1MHz offset. The results clearly demonstrate the possibility of applying triple-push topology for VCOs operating beyond 100GHz, enabling various high frequency applications that require tunable frequency sources.
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