IEICE Transactions on Electronics
Online ISSN : 1745-1353
Print ISSN : 0916-8524
E93.C 巻, 10 号
選択された号の論文の14件中1~14を表示しています
Special Section on Frontier of Thin-Film Transistor Technology
  • Tanemasa ASANO
    2010 年E93.C 巻10 号 p. 1489
    発行日: 2010/10/01
    公開日: 2010/10/01
    ジャーナル 認証あり
  • François TEMPLIER, Julien BROCHET, Bernard AVENTURIER, David CO ...
    原稿種別: INVITED PAPER
    2010 年E93.C 巻10 号 p. 1490-1494
    発行日: 2010/10/01
    公開日: 2010/10/01
    ジャーナル 認証あり
    Hydrogenated polymorphous Silicon allows to fabricate TFTs with very interesting characteristics including better threshold voltage stability than a-Si TFTs, lower leakage current than µc-Si: H TFTs and excellent uniformity. Investigation of threshold voltage shift mechanisms of pm-Si: H TFTs has shown a specific semiconductor material degradation with different activation energies compared to a-Si: H TFTs. TEM analysis has evidenced for the first time a significant structural difference between pm-Si: H and a-Si: H materials, in the TFT device configuration. Pm-Si: H appears to be very suitable for low cost and high performance AM-OLED fabrication.
  • Saurabh SAXENA, Jin JANG
    原稿種別: PAPER
    2010 年E93.C 巻10 号 p. 1495-1498
    発行日: 2010/10/01
    公開日: 2010/10/01
    ジャーナル 認証あり
    Crystallization of amorphous silicon on oxide semiconductors using rapid-thermal annealing in vacuum is investigated. A 30nm n-type amorphous silicon (a-Si) is deposited on zinc-oxide (ZnO) and aluminum doped zinc-oxide (ZnO: Al) by PECVD on glass substrate. Rapid-thermal annealing for 30min to 180min of a-Si on ZnO and ZnO: Al were performed at 600°C. It is found that crystallization of a-Si on oxide semiconductors can be done in shorter time than that of standard solid-phase crystallization (SPC) of amorphous silicon on glass substrate at 600°C. It has been verified using Raman spectroscopy that a-Si on ZnO: Al changes into polycrystalline silicon (poly-Si) in 30min at 600°C.
  • Katsuya SHIRAI, Takashi NOGUCHI, Yoshiaki OGINO, Eiji SAHOTA
    原稿種別: PAPER
    2010 年E93.C 巻10 号 p. 1499-1503
    発行日: 2010/10/01
    公開日: 2010/10/01
    ジャーナル 認証あり
    Opto-Thermal analysis of Semiconductor Blue-Multi-Laser-Diode Annealing (BLDA) for amorphous Si (a-Si) film is conducted by varying the irradiation power, the scanning velocity and the beam shape of blue-laser of 445nm. Thermal profiles, maximum temperature of the a-Si film and the melting duration are evaluated. By comparing the simulated results with the experimental results, the excellent controllability of BLDA for arbitrary grain size can be explained consistently by the relation between irradiation time and melting duration. The results are useful to estimate poly-crystallized phase such as micro-polycrystalline Si, polycrystalline Si and anisotropic lateral growth of single-crystal-like Si.
  • Seung Hyun CHO, Sang Woo KIM, Woo Seok CHEONG, Chun Won BYUN, Chi-Sun ...
    原稿種別: INVITED PAPER
    2010 年E93.C 巻10 号 p. 1504-1510
    発行日: 2010/10/01
    公開日: 2010/10/01
    ジャーナル 認証あり
    Oxide material can make transparent devices with transparent electrodes. We developed a transparent oscillator and rectifier circuits with oxide TFTs. The source/drain and gate electrodes were made by indium thin oxide (ITO), and active layer made by transparent material of IGZO (Indium Gallium Zinc Oxide) on a glass substrate. The RC oscillator was composed of bootstrapped inverters, and 813kHz oscillation frequency was accomplished at VDD = 15V. For DC voltage generation from RF, transparent rectifier was fabricated and evaluated. This DC voltage from rectifier powered to the oscillator which operated successfully to create RF. For data transmission, RF transmission was evaluated with RF from the transparent oscillator. An antenna was connected to the oscillator and RF transmission to a receiving antenna was verified. Through this transmission antenna, RF was transmitted to a receiving antenna successfully. For transparent system of RFID, transparent antenna was developed and verified sending and receiving of data.
  • Li LU, Masahiro ECHIZEN, Takashi NISHIDA, Kiyoshi UCHIYAMA, Yukiharu U ...
    原稿種別: PAPER
    2010 年E93.C 巻10 号 p. 1511-1515
    発行日: 2010/10/01
    公開日: 2010/10/01
    ジャーナル 認証あり
    Ba0.5Sr0.5Ta2O6 (BSTA) thin film was successfully fabricated on a Pt/SiO2/TiO2/Si substrate using the Sol-Gel method. Fundamental electrical properties of the BSTA thin film were investigated using metal-insulator-metal (MIM) structure. No diffusion of ions, from the thin film or the substrate, is observed because of the using of MIM structure. The Root Mean Square roughness of 1.04nm shows that thin film grew well on the substrate. The BSTA thin film shows a much higher dielectric constant of about 130 than conventional gate insulators and high-k materials that are currently used in Thin Film Transistors. Low leakage current density of about 10-8 A/cm2 was obtained at an applied electric field of 500kV/cm. Schottky emission is the dominant conduction mechanism at applied electric fields lower than 500kV/cm and Fowler-Nordheim tunneling is the dominant conduction mechanism at higher applied electric fields. The Schottky barrier height between the Pt electrode and the Ba0.5Sr0.5Ta2O6 thin film was estimated to be 0.75eV.
  • Akira HEYA, Naoto MATSUO
    原稿種別: BRIEF PAPER
    2010 年E93.C 巻10 号 p. 1516-1517
    発行日: 2010/10/01
    公開日: 2010/10/01
    ジャーナル 認証あり
    Effects of atomic hydrogen annealing (AHA) on the film properties and the electrical characteristics of pentacene organic thin-film transistors (OTFTs) are investigated. The surface energy of SiO2 surface and grain size of pentacene film were decreased with increasing AHA treatment time. For the treatment time of 300s, pentacene film showed the (00l) and (011') orientation and high carrier mobility in spite of small crystal grain.
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