The breakdown voltage and the breakdown time of pulse discharge in capacitor-transfer type excimer laser devices are measured under various experimental conditions. The experimental results show that the breakdown voltage-time area
Sb and the electron drift length
l are constant at a fixed gas density
n and a distance between electrodes
d. It is also obtained from the experiments made at different values of
n and
d that
Sb is proportional to
n0.4 d and
l is proportional to
n-0.6. These results are not explained by the breakdown culculated based on a streamer theory by using known data of the first ionization coefficient of gas. When the first ionization coefficient is assumed to be proportional to 1/[d(
E/n)/d
T], theoretical results are in good agreement with the experimental results and the total ionization number leading the gas breakdown is always nearly constant.
View full abstract