The Review of Laser Engineering
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
Volume 27, Issue 1
Displaying 1-15 of 15 articles from this issue
  • Susumu NAMBA
    1999 Volume 27 Issue 1 Pages 1
    Published: January 15, 1999
    Released on J-STAGE: March 17, 2010
    JOURNAL FREE ACCESS
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  • Takayasu MOCHIZUKI
    1999 Volume 27 Issue 1 Pages 2
    Published: January 15, 1999
    Released on J-STAGE: March 17, 2010
    JOURNAL FREE ACCESS
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  • Hiroyuki DAIDO
    1999 Volume 27 Issue 1 Pages 3-8
    Published: January 15, 1999
    Released on J-STAGE: March 17, 2010
    JOURNAL FREE ACCESS
    We briefly describe the present status of laser plasma x-ray sources for various applications. One of the main problems in soft x-ray applications is the production of debris by the source, which degrades the quality of the x-ray optics. To overcome this problem we propose the use of a cryogenic target or a high pressure gas-puff target. The cryogenic target provides x-rays as intense as those from a laser-irradiated solid target. Gas-puff targets are created by the pulsed injection of high-density gas through a nozzle. Experiments with plasmas produced using a gas-puff target irradiated with a Nd: YAG laser are described. The obtained results would allow for the development of an efficient and debrisless laser-produced x-ray source that would be useful for applications in various fields.
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  • 1999 Volume 27 Issue 1 Pages 8-8,13
    Published: January 15, 1999
    Released on J-STAGE: March 17, 2010
    JOURNAL FREE ACCESS
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  • Tamio HARA
    1999 Volume 27 Issue 1 Pages 9-13
    Published: January 15, 1999
    Released on J-STAGE: March 17, 2010
    JOURNAL FREE ACCESS
    Table-top x-ray lasers are of profound importance for a number of practical applications in science and technology. Significant progress towards the realization of short wavelength compact x-ray lasers has been achieved by essentially different and novel experimental approaches. As a result, high repetition table-top x-ray lasers are expected to emerge in near future. On the other hand, at present, applications of large scale x-ray lasers in photoluminescence and interferometry are underway.
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  • Kazuo IMASAKI
    1999 Volume 27 Issue 1 Pages 14-19
    Published: January 15, 1999
    Released on J-STAGE: March 17, 2010
    JOURNAL FREE ACCESS
    This article describes the characteristics of the Thomson scattered laser photon. The brightness of the scattered photon and its energy in a photon storage cavity are discussed. The brightness of the photon and its energy can be expected to reach up to 1024 photon/s/mm2/mrad2/0.1%BW and 107eV, respectively.
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  • EUV Lithography
    Hiroo KINOSHITA
    1999 Volume 27 Issue 1 Pages 20-24
    Published: January 15, 1999
    Released on J-STAGE: March 17, 2010
    JOURNAL FREE ACCESS
    Several candidates for 0.1-μm generation of lithography may be used on semiconductor production lines. Of particular note is EUVL, which has the potential to handle feature sizes from 0.1 μm all the way down to 0.01 μm. We have designed 3-aspherical-mirror optics that meet the specifications for 0.1-μm generation lithography, and are developing an EUVL laboratory tool suitable for device fabrication experiments. This paper describes the status of EUV Lithography and design concepts and individual technologies we have developed.
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  • Manabu ANDO, Mahito NEGISHI, Yasuaki FUKUDA
    1999 Volume 27 Issue 1 Pages 25-29
    Published: January 15, 1999
    Released on J-STAGE: March 17, 2010
    JOURNAL FREE ACCESS
    This paper describes an overview of the manufacture and measurement of aspherical mirrors for X-ray optics. In X-ray lithography and astronomical observation, to which X-ray optics are typically applied, especially in EUV lithography that uses extra ultraviolet light, it is necessary to achieve a degree accuracy of 0.25 nm RMS, which is higher than that in the past. The manufacture of this kind of mirror requires a high level of technology for three domains: figuring (low spatial frequency), smoothing ripples (mid-spatial frequency) and surface roughness (high spatial frequency). Polishing is the most reliable technique for these three domains. Therefore, stabilization of the polishing process is the most important factor in improving the accuracy of the mirrors. The measurement accuracy for roughness and ripple is now approaching the target value for the manufacture of EUV optics. A new interferometer that utilizes point diffraction has been developed, providing an accuracy of 0.5 nm RMS. Increasing the aspherical surface volume remains a goal for the future.
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  • Koujun YAMASHITA
    1999 Volume 27 Issue 1 Pages 30-34
    Published: January 15, 1999
    Released on J-STAGE: March 17, 2010
    JOURNAL FREE ACCESS
    The total external reflection of a single-layer mirror is no longer useful for grazing incidence optics in the hard x-ray region (10-100keV), whereas the Bragg reflection of multilayers is more advantageous in this region. Recently, a hard x-ray telescope was tested for practical use in the energy band 24-36 keV by making use of multilayer supermirrors. The focused image was measured by a newly developed position-sensitive CdZnTe solid-state detector. Further development of hard x-ray optical systems is proceeding in orderto extend the energy region up to 100keV and to improve the image resolution. These developments may open upnew research fields in the hard x-ray region.
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  • Kunio SHINOHARA
    1999 Volume 27 Issue 1 Pages 35-39
    Published: January 15, 1999
    Released on J-STAGE: March 17, 2010
    JOURNAL FREE ACCESS
    Medical and biological applications of x-rays are reviewed with respect to the application of newly developing x-ray sources, synchrotron radiation, and laser-produced plasma x-rays. Our focus is on the soft x-ray microscopy of biological specimens, including hydrated mammalian cells, and medical applications of hard x-rays such as phase-contrast imaging, high-speed single-shot imaging, and the idea of photon activation therapy. Soft x-ray microscopy with synchrotron radiation has been extensively developed in order to make possibleobservations at a resolution of less than 50 nm. However, short single-pulse exposure may be required to image hydrated live biological specimens at high resolution to stop Brownian motion. Laser-produced plasma x-rays are suitable for this purpose. The absorption spectra of biological molecules in the soft x-ray region have been studied in relation to their application to the spectromicroscopy of elements and molecules ina cell. For this purpose synchrotron radiation is the best source. Future study of new modalities of tumor therapy is anticipated.
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  • Kenji TATSUMI, Tadashi IMAI, Yasuaki KAWAMURA
    1999 Volume 27 Issue 1 Pages 40-44
    Published: January 15, 1999
    Released on J-STAGE: March 17, 2010
    JOURNAL FREE ACCESS
    A solid-state airborne lidar for profiling cloud and aerosol scattering has been demonstrated.The transmitter of the lidar is a laser diode-pumped Q-switched Nd: YLF laser. The wavelength of the laser is 1053 nm, the output energy from the transmitter optics is 16.5mJ and the repetition rate is 50 pps. Eye safety is obtained through beam expansion, for which divergence is 2.6 mrad. The diameter of the telescope made of beryllium is 200 mm, and the field of view is 0.3 mrad. The receiver employs a photon-counting solid-state Geiger-mode avalanche photodiode. The vertical resolution is 75 m. The received signals were integrated 300 times in the horizontal direction to improve the signal-to-noise ratio. The measurements for air moleculesaerosol, and cloud were performed using the lidar in November, 1997. The airplane made a round trip from Nagoya airport to Tsukuba via Kashima nada. The altitude of the airplane was 6, 150 m. The measurements indicate that the lidar is capable of detecting and profiling cloud and aerosol scattering through the atmosphere.
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  • Yoshiyuki KAWAMURA, Atusi TAKENAKA
    1999 Volume 27 Issue 1 Pages 45-47
    Published: January 15, 1999
    Released on J-STAGE: March 17, 2010
    JOURNAL FREE ACCESS
    A five axis laser micromachining system has been developed, that can be used for the laser machining of threedimensional micro structures. Using an appropriate correction for the eccentric displacement between the rotational axes and the center axis of the target, the patterning of longitude lines and latitude lines has been successfully performed on the spherical surface of a miniature still ball with a diameter of 1.2mm. C60-like geometry (soccer ball pattern) has also been successfully fabricated on this still ball.
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  • Hitoshi NAKANO, Yoshio HAMADA, Tsuyoshi FUKUDA
    1999 Volume 27 Issue 1 Pages 48-50
    Published: January 15, 1999
    Released on J-STAGE: March 17, 2010
    JOURNAL FREE ACCESS
    A simple and flexible method to fabricate a large-sized plastic hollow shell is presented for use in future laser fusion experiments. A modified and extended emulsion method is used employing gelled gelatin as the water phase of the emulsion. A large-sized shell of 10 mm in diameter has been successfully fabricated. Possible conditions for producing a large-sized shell are discussed.
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  • Hideyuki NASU, Hideyuki OMURA
    1999 Volume 27 Issue 1 Pages 51-53
    Published: January 15, 1999
    Released on J-STAGE: March 17, 2010
    JOURNAL FREE ACCESS
    We fabricated Fiber Grating Lasers (FGLs) which consist of a Strained-LayerMultiple-Quantum-Well Semiconductor Optical Amplifier (SL MQW SOA) and an externally distributed Fiber Bragg Grating (FBG) reflector to evaluate its potential for use in Wavelength Division Multiplexing (WDM) systems.By using 600μm long SL MQW SOAs, the fiber output power through an inline isolator is higher than 15 mW at 100 mA at 20 to 30°C To the best of our knowledge, our resulting level of performance is higher thanany previously reported. On the other hand, the limit of data rates is specified with relaxation frequency.In order to achieve high bit rates, a Bragg grating is positioned beside a lensed fiber end to obtain shorter cavity length. The lasers achieve 2.5 Gbit/s direct intensity modulation, according to evaluated relaxation frequency.We demonstrate this fabrication process and the fundamental performance of the packaged laser. These lasershave great potential for use in wavelength-specified, wavelength-stabilized, high-power, low-noise, andlow chirping WDM transmitters.
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  • Tatsuo YAJIMA
    1999 Volume 27 Issue 1 Pages 54-62
    Published: January 15, 1999
    Released on J-STAGE: March 17, 2010
    JOURNAL FREE ACCESS
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