Single crystalline silicon films were grown on the polycrystalline silicon substrate at 450°C substrate temperature using an ArF excimer laser. Laser beams were irradiated simultaneously parallel and perpendicular to the substrate. The focused parallel beam induced two photon decomposition of SiH
4 near the surface of a substrate to produce radicals. Amorphous silicon films were deposited by parallel irradiation only, and poly or single crystalline silicon films were grown with the additional perpendicular irradiation. Crystallinity was confirmed by measurements of refraction index, optical band gap, infrared absorption, electron diffraction and X-ray diffraction.
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