High efficient singlet oxygen generator for a discharge pumped oxygen-iodine laser was developed. The discharge under conditions of a radio-frequency 100 MHz and an input power of 200 W was done in various gas mixing conditions. The best result was obtained when O
2 and N
2 were supplied to the generator before a discharge nozzle, and NO and NO
2 were put into afterglow plasma region after the nozzle. The O
2 (a
1Δ) relative yield of 41.0 % was achieved in the case of O
2: N
2/NO: NO
2=250: 50/100: 100 sccm atthe pressure of 0.3 Torr. Moreover, the O
2 increase by the recombination of O atoms that caused by the dissociation of NO and NO
2 under the discharge was small when both gases were put after the dischargenozzle.
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