To verify infrared multiple photon decomposition (IRMPD) by our free electron laser (FEL), 0.8 Ton of CF
3I was irradiated with 9.5μm FEL pulses. The fluence of the macropulse used was estimated to be 8J/cm
2 at the beam waist. About 3% of the CF
3I sample was found to decompose without selectivity by irradiating it with 3. 6 × 10
4 macropulses. In order to examine decomposition yields and isotope selectivities, 5 Torr of CHBrF
2 was irradiated at a fluence of 16J/cm
2 with FEL pulses in the wavelength region from 9.3 to 9.7μm. The IRMPD of CHBrF
2 was found to produce C
2F
4. The significant enrichment of
13C in the product was obtained with the irradiation at 9.7μm. The atomic fraction of
13C obtained was as high as 6%. The decomposition yield is related to the diffusion of reactant molecules in a vicinity of a small photolysis volume.
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