The Review of Laser Engineering
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
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Volume 41, Issue 9
Special Issue on Innovative Progress in Solid-State and Fiber Lasers for Industrial Applications
Displaying 1-12 of 12 articles from this issue
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Special Issue on Innovative Progress in Solid-State and Fiber Lasers for Industrial Applications
  • Special Issue on Innovative Progress in Solid-State and Fiber Lasers for Industrial Applications
    Hakaru MIZOGUCHI, Takashi MATSUNAGA, Takashi SAITOU
    2013 Volume 41 Issue 9 Pages 668-
    Published: 2013
    Released on J-STAGE: September 07, 2020
    DOIhttps://doi.org/10.2184/lsj.41.9_668
    JOURNAL FREE ACCESS
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    Mass production EUV market is delayed 3 years, because of delay of high power EUV light source. Therefore DUV is still used in leading edge of mass production line in semiconductor industry. Requirement for DUV source is higher power, precise spectral control and ECO friendly hardware. Gigaphoton released, 120 W product GT64A with Focus drilling technology into the market. On the other hand bottle neck of EUV lithography is still power of EUV light source. In the fi eld the EUV source achieved only 10W level operation. Gigaphoton is developing Proto-2nd phase machine to demonstrate key technologies. Droplet generator is improved dramatically, stable operation >100 h is demonstrated. CO2 laser achieved 9.0 kW operation with 75% duty. EUV light emission 5 W @I/F(at Intermediate Forcus) Clean power during 2 hours is demonstrated very recently. Target of proto-2 is 50 W level one week operation demonstration by Q4 2013. Base technologies for HVM are under development in parallel. High CE technology, we found around 5% CE average with picosecond prepulse. Also demonstrated remarkable reduction of mist after the picosecond pre-pulse. New 25 kW CO2 laser amplifier development project is on going co-operation with Mitsubishi electric. Our target of “Real pilot” shipment is 2015.
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Special Issue
Laser Review
  • Preface to Special Issue on Innovative Progress in Solid-State and Fiber Lasers for Industrial Applications
    Kunihiko WASHIO
    2013 Volume 41 Issue 9 Pages 677-
    Published: 2013
    Released on J-STAGE: September 07, 2020
    DOIhttps://doi.org/10.2184/lsj.41.9_677
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  • Compact High-Power-VCSEL-Array Pumped Solid-State Lasers
    Robert VAN LEEUWEN, Tong CHEN, Laurence WATKINS, Jean-Francois SEURIN, ...
    2013 Volume 41 Issue 9 Pages 679-
    Published: 2013
    Released on J-STAGE: September 07, 2020
    DOIhttps://doi.org/10.2184/lsj.41.9_679
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    Vertical-cavity surface-emitting lasers (VCSELs) can be processed in large two-dimensional (2-D) arrays of single emitters to scale up the power for solid-state laser pumping. VCSEL-based kW-level 808 nm pump modules, comprising multiple 2-D arrays, were developed to pump compact Nd:YAG lasers. Various quasi-CW (QCW) VCSEL-pumped pulsed Nd:YAG lasers were investigated, both in end- and sidepumping configurations, demonstrating the viability of VCSEL pumping of compact solid-state lasers.
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  • High-Performance Solid-State and Fiber Lasers Controlled by Volume Bragg Gratings
    Leonid GLEBOV
    2013 Volume 41 Issue 9 Pages 684-
    Published: 2013
    Released on J-STAGE: September 07, 2020
    DOIhttps://doi.org/10.2184/lsj.41.9_684
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    The paper is a survey of properties and applications of optical elements which are volume Bragg gratings (VBGs) recorded in photo-thermo-refractive (PTR) glass. These elements are narrow band filters that operate in spectral, angular and temporal domains. They provide spectral narrowing, stabilization and tuning of laser radiation; narrowing of divergence and beam steering; stretching, compression and temporal shaping of laser pulses, integration of different laser components in the same material and fabrication of monolithic solid state lasers; and passive and active coherent combining along with high density spectral combining of fiber lasers.
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  • Flexible and Programmable Pulse Shaping MOPA Fiber Laser Platform, Performances and Applications
    Louis DESBIENS, Pascal DELADURANTAYE, Alain COURNOYER, David GAY, Cla ...
    2013 Volume 41 Issue 9 Pages 691-
    Published: 2013
    Released on J-STAGE: September 07, 2020
    DOIhttps://doi.org/10.2184/lsj.41.9_691
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    Optical fiber amplifiers used in a MOPA architecture open up a lot of possibilities for developing flexible laser sources, thanks to their efficiency, their high single-pass gain, broad spectral gain bandwidth and intrinsic high beam quality and stability. Combining fiber amplifiers with advanced digital electronics, used for synchronizing and modulating high-speed signals for the generation of programmable nanosecond pulse shapes and bursts of picosecond pulses, can make remarkable laser sources offering unprecedented opportunities for the exploration of laser-matter interactions on a wide and fine scale. Those monolithic laser sources show great potential as development tools for speeding up the optimization of laser materials processing as well as sufficient maturity and robustness to be used as single, multi-role laser sources, working in industrial environment and performing multiple tasks requiring wildly varying laser parameters.
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  • DUV Laser Sources for Semiconductor Inspection Tools
    Jun SAKUMA
    2013 Volume 41 Issue 9 Pages 697-
    Published: 2013
    Released on J-STAGE: September 07, 2020
    DOIhttps://doi.org/10.2184/lsj.41.9_697
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    Deep ultraviolet (DUV) lasers are widely used in the semiconductor industry. Photolithographic exposure tools typically employ pulsed excimer lasers operating at 10’s of Watts average power, whereas wafer- and mask-inspection applications utilize lower-power, solid-state, continuous-wave (CW) and quasi-continuous-wave (QCW) ultraviolet (UV) lasers based on nonlinear frequency conversion. In this paper, we review recent technology trends of DUV light sources developed for photomask inspection tools.
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  • Development of High Energy and High Average Power Ultrafast Thin Disk Lasers
    Taisuke MIURA, Akira ENDO, Tomáš MOCEK
    2013 Volume 41 Issue 9 Pages 703-
    Published: 2013
    Released on J-STAGE: September 07, 2020
    DOIhttps://doi.org/10.2184/lsj.41.9_703
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    Overview of the HiLASE project is reported. Development of high-power, picosecond laser sources is desirable for industrial, scientifi c, and medical applications. The framework of the Research Program 1 (RP1) of the HiLASE project is to develop both the 500-mJ at 1-kHz repetition rate and the 5-mJ at 100-kHz repetition rate laser systems with 1‒2ps pulse duration based on thin disk technology. The front-end of our laser system contains a regenerative amplifi er as the fi rst stage of amplifi er chain. We are developing a high energy regenerative amplifi er and a high repetition rate regenerative amplifi er. The average power of 50-W of the high repetition rate amplifi er has been achieved at the repetition rate of 100-kHz. Also, we have obtained the output energy of 45-mJ at the repetition rate of 1-kHz from the high energy amplifi er. The measured M2 of amplifi ed beam was 1.2.
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  • High Power Optical Vortex Lasers and Their Application to Material Processing
    Takashige OMATSU
    2013 Volume 41 Issue 9 Pages 708-
    Published: 2013
    Released on J-STAGE: September 07, 2020
    DOIhttps://doi.org/10.2184/lsj.41.9_708
    JOURNAL FREE ACCESS
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    Optical vortex laser, showing an annular intensity profile and orbital angular momentum owing to a spiral wavefront, has a potential to be applied to various fields such as optical manipulation, super resolution microscopy, and optical telecommunication. Recently, we and our co-workers have discovered that optical vortex lasers enable us to provide chiral structured materials on nano-scale. In this paper, we review a recent progress of high power optical vortex lasers based on a fi ber and solidstate laser technologies, and we also address physical properties of chiral structured materials formed by irradiation of optical vortex lasers.
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Laser Original
  • Recent Progress on Power Scaling Narrow Linewidth Fiber Amplifiers and Their Applications
    Bryce SAMSON, Adrian CARTER
    2013 Volume 41 Issue 9 Pages 714-
    Published: 2013
    Released on J-STAGE: September 07, 2020
    DOIhttps://doi.org/10.2184/lsj.41.9_714
    JOURNAL FREE ACCESS
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    Power scaling of single mode Yb‐doped fiber lasers operating at around 1064 nm has now reached the 10 kW level making it suitable for a variety of high power industrial material processing applications1）. However, progress on narrow linewidth, single frequency fiber amplifiers has been much slower because of the fundamental limitations from fiber non-linearities such as stimulated Brillouin scattering (SBS) in the optical fiber. In this paper we discuss the physics of SBS, the fiber and amplifier designs that overcome this limitation and through optimization have allowed narrow linewidth fiber amplifiers to achieve output powers exceeding 1 kW for the first time. We also discuss some of the applications enabled by the latest advances in fiber technology.
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Regular Paper
Laser Original
  • A Novel Optical Fiber Sensor Fabricated by Femtosecond Laser Processing for Directional Bending Detection
    Kenji GOYA, Kazuhiro WATANABE
    2013 Volume 41 Issue 9 Pages 718-
    Published: 2013
    Released on J-STAGE: September 07, 2020
    DOIhttps://doi.org/10.2184/lsj.41.9_718
    JOURNAL FREE ACCESS
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    A novel optical fiber sensor has been developed using a femtosecond laser which emits single pulses of 210 fs, 3.6 μJ irradiation at a wavelength of 800 nm. Femtosecond laser machining has successfully been applied to create a bending direction sensing function in an optical fiber sensor, which has previously been impossible for conventional fiber sensors. The sensing portion of the fiber has an internal array micro-voids aligned along the optical fiber axis. The non-axisymmetric disposition of the micro-void array allows bending direction to be detected by observing increases and decreases in the light intensity propagated in the core. In this paper, the performances of fiber bending sensors are shown in terms of directional bending detection capability, sensitivity, reproducibility and laser machining conditions for sensor fabrication. A 2 mm-long sensor element gives average sensitivities of －0.08 and +0.06 dB/mm over a 5 mm displacement range for bending in opposite directions.
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Technical Note
  • Experimental Study on the Focusability of Ultra-intense Laser Light with a Plasma Mirror
    Akira KON, Motoaki NAKATSUTSUMI, Julien FUCHS, Sebastien BUFFECHOUX, P ...
    2013 Volume 41 Issue 9 Pages 723-
    Published: 2013
    Released on J-STAGE: September 07, 2020
    DOIhttps://doi.org/10.2184/lsj.41.9_723
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    One critical goal of ultra-intense laser applications is the achievement of an ultra-high fi eld, which has never been obtained in laboratories; this would open a new fi eld of science. To realize a high fi eld with high power lasers that are as strong as possible, extremely small f-number or fast focusing optics have been recently developed using a plasma mirror (PM) technique and introduced to high power laser systems. To optimize PM utilization, we experimentally studied the focus abilities of ultra-intense laser light with PM by measuring the focal spot and the laser light refl ectivity. Such PM surface dynamics as thermal expansion depend on the laser intensity and could become one critical factor to determine the PM performance by comparing the experimental result of focus spot with calculations of the laser light foci by a PM.
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Laser Lecture
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