The Review of Laser Engineering

Preface to Special Issue on Advanced Solid State Lasers and Their Applications

Tadashi KANABE

2006 Volume 34 Issue 9 Pages 608-609
Published: September 15, 2006
Released on J-STAGE: March 26, 2014

DOIhttps://doi.org/10.2184/lsj.34.608

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1TW, 10 Hz and 0.1TW, 1 kHz All-Solid-State Femtosecond Lasers

Shinichi MATSUOKA, Takehiro YOSHII, Masatoshi SATO, Fumihiko NAKANO, Y ...

2006 Volume 34 Issue 9 Pages 610-615
Published: September 15, 2006
Released on J-STAGE: March 26, 2014

DOIhttps://doi.org/10.2184/lsj.34.610

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We have designed and developed two types of all-solid-state femtosecond Ti: sapphire laser systems by using diode-pumped Nd: YAG green laser systems as pump sources. One is a high-peak-power femtosecond laser system with a peak power of 1.1 TW, a pulse duration of 74 fs, and a beam quality factor M²≤1.4 at a repetition rate of 10 Hz, the other is a high-repetition-rate femtosecond laser system with an average power of 10.1 W, a peak power of 0.1 TW, a pulse duration of 100 fs, and a beam quality factor M²≥1.5 at a high repetition rate of 1 kHz. We also discuss the development of the diode-pumped Nd: YAG green laser systems for pumping these Ti: sapphire laser systems.

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Development of High Average Power Yb: YAG Ultrashort Pulse Laser System

Keiichi SUEDA, Sakae KAWATO, Takao KOBAYASHI

2006 Volume 34 Issue 9 Pages 616-620
Published: September 15, 2006
Released on J-STAGE: March 26, 2014

DOIhttps://doi.org/10.2184/lsj.34.616

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High beam quality and ultrashort pulse laser is important for industrial applications like laser material processing. The Yb: YAG lasers have been studied extensively because Yb: YAG has several advantages for high power ultrashort oscillation due to low thermal loading and broad emission spectrum for the diode-laser pump scheme. We have developed a high average power ultrashort Yb: YAG master oscillator-power amplifier system based on the Yb: YAG regenerative amplifier. Average output power of 10.3 W has been achieved with 6.2 ps duration and 100 kHz repetition rate.

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Giga-Watt Class, High-Energy Diode-Pumped Solid-State Laser toward the Creation of High-Density-Photon Industries

Toshiyuki KAWASHIMA, Osamu MATSUMOTO, Ryo YASUHARA, Takashi KURITA, Ta ...

2006 Volume 34 Issue 9 Pages 621-627
Published: September 15, 2006
Released on J-STAGE: March 26, 2014

DOIhttps://doi.org/10.2184/lsj.34.621

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High pulse energy and high average power diode-pumped solid-state laser is promising for the creation of new photonics industries. The operation of 21-J output energy in a 7-ns duration at 10 Hz has been demonstrated from a 800-kW diode-pumped Nd: phosphate glass laser based on thermally-edge-controlled (TEC) zigzag slab amplifiers and multi-pass laser architecture. Although the system has no wavefront correction devices except for the TEC amplifier, 51 % of the output energy was focused into a 5 times diffraction limited spot.The laser system has the potential for scaling the output up to 100 J pulseenergy and 1 kW average power.

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Development of High-Peak and High-Average-Power LD Pumped Solid-State Laser System for EUV Generation

Koji TSUBAKIMOTO, Hidetsugu YOSHIDA, Hisanori FUJITA, Masahiro NAKATSU ...

2006 Volume 34 Issue 9 Pages 628-632
Published: September 15, 2006
Released on J-STAGE: March 26, 2014

DOIhttps://doi.org/10.2184/lsj.34.628

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We are developing a 5kW (5kHz, 1J, 1-10ns) solid state laser system for EUV lithography. The Laser system is constructed by the fiber oscillator, regenerative amplifier and three amplifier stages. The output power is achieved at 955W, 10kHz, 7ns. The main amplifier modules are pumped with high power density over 400 W/cm. The thermal lens effect is not sphere, and includes high order phase aberrations. The phase aberration disturbs the propagation of the laser light. In addition, the spectral shift of the fluorescence is caused by rising the temperature of the laser medium.

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Development of High-Performance Laser Diode for Pumping Solid-State Laser

Yujin ZHENG, Hirofumi MIYAJIMA, Akiyoshi WATANABE, Shin-ichi FURUTA, A ...

2006 Volume 34 Issue 9 Pages 633-635
Published: September 15, 2006
Released on J-STAGE: March 26, 2014

DOIhttps://doi.org/10.2184/lsj.34.633

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The spectral bandwidth of a broad-area laser diode is effectively suppressed by use of an off-axis external-cavity technique. The external cavity consisted of a rod lens, a cylindrical lens and a volume Bragg grating. The laser beam has 5.8-fold improvement in spectral bandwidth and its peak power versus wavelength is effectively enhanced. On the basis of this technique, we focus the beam of the high-power laser diode to effectively end pump a solid-state laser.

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SHG Lasers Over 200 W & Laser Processing Applications

Hiroyuki MORITA

2006 Volume 34 Issue 9 Pages 636-639
Published: September 15, 2006
Released on J-STAGE: March 26, 2014

DOIhttps://doi.org/10.2184/lsj.34.636

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In recent years, the use of all solid-state high power green lasers (more than 100 W) has spread into manufac-turing lines. Especially in liquid crystal display (LCD) industries, high power green lasers are becoming highly sought after for the annealing process of amorphous-silicon (a-Si), instead of conventional eximer lasers, due to lower maintenance costs, higher stability and better results in the crystallization process. Laserfront Technologies, Inc.(LFT) has developed a very stable all solid-state high power green laser using the intra cavity second harmonic generation (SHG) technique of the Nd: YAG laser. Its maximum output power has reached 259W, which is the highest power output using the intra cavity SHG technique currently known in the world. In this paper, we report its features and demonstrate cutting copper, which is well known as being a very difficult metal to cut with infrared lasers due to very high reflectivity.

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High-Power and High-Repetition Frequency Conversion LD-YAG Laser for Industrial Applications

Susumu KONNO, Tomotaka KATSURA, Tetsuo KOJIMA, Miki KUROSAWA

2006 Volume 34 Issue 9 Pages 640-643
Published: September 15, 2006
Released on J-STAGE: March 26, 2014

DOIhttps://doi.org/10.2184/lsj.34.640

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We report on the recent developments of laser-diode pumped frequency conversion solid-state lasers in our section. A 150W TEM₀₀ mode, linearly polarized 1064nm beam was generated with a MOPA system. The system was applied for high-power frequency conversion. 30W 355nm and 5.6W 213nm output power was generated at a repetition rate of more than 10kHz. Frequency-tripling-efficiency of CBO (CsB₃O₅) crystal was compared with LBO (LiB₃O₅) crystal experimentally. We also introduce an industrial 200W 532nm laser, developed for TFT annealing process.

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Side-Pumped Yb: YAG Composite Thin-Disk Laser

Takayuki YANAGISAWA, Syuhei YAMAMOTO, Yoshihito HIRANO

2006 Volume 34 Issue 9 Pages 644-651
Published: September 15, 2006
Released on J-STAGE: March 26, 2014

DOIhttps://doi.org/10.2184/lsj.34.644

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Since Yb: YAG thin-disk has a potential to efficiently generate high energy and Q-switched long pulses at high repetition rate, we have designed and developed a side-pumped Yb: YAG composite thin-disk laser as a pump source of OPA for high performance coherent Doppler LIDAR. In the thin-disk design, we propose Yb: YAG composite thin-disk to obtain high pumping intensity, high pumping efficiency and uniform pumping distribu-tion. As a result of development, uniform pumping distribution and low thermal distortion of thin-disk were confirmed. The output power of 44-W with 59% slope efficiency was obtained in multimode laser operation that is almost consistent with designed value. The scaled output power of 111-W with 3-disks operation was also confirmed as power scaling property. In TEM₀₀, single longitudinal mode, we finally obtained Q-switched output energy of 3.3-mJ with the pulse width of as long as 227-ns at the repetition rate of 4kHz.

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Development of Scale-Down Laser (Class of 10 J & 10 Hz) for Inertial Fusion Reactor

Tadashi KANABE, Toshiyuki KAWASHIMA, Takashi KURITA, Osamu MATSUMOTO, ...

2006 Volume 34 Issue 9 Pages 652-656
Published: September 15, 2006
Released on J-STAGE: March 26, 2014

DOIhttps://doi.org/10.2184/lsj.34.652

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A diode-pumped solid-state laser (DPSSL) for inertial fusion energy driver has been demonstrated, which produces the 1053-nm output energy of 10 J at 10 Hz. The glass slab laser amplifier is pumped by quasi-continuous wave 290-kW AlGaAs laser-diode arrays at 803 nm. The optical system enable to compensate for thermal effects by use of zig-zag optical propagation, image-relayed telescope, and 45 degree Faraday rotator. The output energy of 8.4 J at 10 Hz with the optical to optical conversion efficiency of 15.8 % has been successfully obtained, collecting within a 4.4 times diffraction limited area. The results indicate that the DPSSL technology is promising for realizing rep. rate, high average power as well as high energy scaling.

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