To obtain the basic data of hydrogen isotope separation by the Pd-alloy membrane, permeabilities and solubilities of hydrogen and deuterium were measured. Permeabilities are proportional to P
u0.62 and solubilities are proportional to P
e0.52, where P
u and P
e is upstream pressure and equilibrium pressure, respectively. Since it was observed experimentally that the separation factor was affected by the boundary layer, the boundary layer equations of velocities and concentrations were solved numerically and results were compared with the experimental data, which were taken under various inlet velocities u
0 and various He concentrations in the system of H
2-He and D
2-He. Both results coincided very well and it can be considered that the boundary layer effect was taken into account correctly. The relation of heads separation factor and u
0, which was obtained for the system of H
2-D
2 by using the same analysis, and the numerical results agreed well with the experimental results. To find the effects of flow pattern, the relation between separation factor α and the cut θ were calculated. Since α is very much affected by the flow pattern and u
0, when θ is close to 1, it was found that it is necessary to use more precise flow meter to distinguish each effect.
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