High-K inorganic/organic composite materials for the interlayer insulation material of capacitors, which can be used for next generation high density packages, have been developed. The high volume loading of the below sub-micron diameter BaTiO
3 to the epoxy resin was studied to achieve high permittivity. 79 vol% filler loading was attained by improving the dispersion of the BaTiO
3 filler through surface treatment and controlling the particle size, which showed a relative permittivity of 130 at 1 MHz with 10 μm thick film. The relative permittivity in the RF region was also evaluated at higher than 100. The mechanical property, the temperature dependence of dielectric property, and the laser drilling process were also investigated.
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