精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
65 巻, 7 号
選択された号の論文の26件中1~26を表示しています
  • 信頼性表現の統一に向けて
    今井 秀孝
    1999 年 65 巻 7 号 p. 937-940
    発行日: 1999/07/05
    公開日: 2009/04/10
    ジャーナル フリー
  • 小池 昌義
    1999 年 65 巻 7 号 p. 941-944
    発行日: 1999/07/05
    公開日: 2009/04/10
    ジャーナル フリー
  • 田中 健一
    1999 年 65 巻 7 号 p. 945-948
    発行日: 1999/07/05
    公開日: 2009/04/10
    ジャーナル フリー
  • デュアルヘッド測定機
    首藤 俊二
    1999 年 65 巻 7 号 p. 949-952
    発行日: 1999/07/05
    公開日: 2009/04/10
    ジャーナル フリー
  • 山領 泰行
    1999 年 65 巻 7 号 p. 953-957
    発行日: 1999/07/05
    公開日: 2009/04/10
    ジャーナル フリー
  • 石井 恭
    1999 年 65 巻 7 号 p. 958-961
    発行日: 1999/07/05
    公開日: 2009/04/10
    ジャーナル フリー
  • 辻本 隆雄
    1999 年 65 巻 7 号 p. 962-965
    発行日: 1999/07/05
    公開日: 2009/04/10
    ジャーナル フリー
  • 野口 賢三
    1999 年 65 巻 7 号 p. 966-970
    発行日: 1999/07/05
    公開日: 2009/04/10
    ジャーナル フリー
  • 対話的なモデル変形のための基礎理論
    吉田 典正, 加納 顕也, 北嶋 克寛
    1999 年 65 巻 7 号 p. 971-975
    発行日: 1999/07/05
    公開日: 2009/04/10
    ジャーナル フリー
    Interactive and intuitive modeling is one of the most important issues in geometric modeling. However, modeling a complex object interactively and intuitively is still a difficult problem. In this paper, new Free-Form Deformations (FFDs) based on Gaussian functions are introduced. Different from previous FFDs that are based on Bernstein or B-spline functions, FFDs based on Gaussian functions allow an arbitrary number of control points to be placed in arbitrary positions. Moreover, the standard deviations of Gaussian functions can control the localness of the effects of control points. These facts provide designers with more interactivity and more intuitiveness. The designer can place a manipulation point in the region to be modified, and by changing the standard deviations, the designers can choose the effect of localness of the movement of the manipulation point. The definition of FFDs based on Gaussian functions, as well as several examples of the FFDs, is presented.
  • 板倉 勝利, 黒田 基文, 重川 英文, 猪谷 彦太郎, 山本 惠一, 有浦 泰常
    1999 年 65 巻 7 号 p. 976-981
    発行日: 1999/07/05
    公開日: 2009/04/10
    ジャーナル フリー
    In continuous cutting, adhesive is formed on the tool rake face and cutting is continued while taking the form of adhesive as protective layers. At the beginning of cutting, both adhesive wear and, abrasive wear of coating film on flank progress.On the other hand, in interrupted cutting, when the tool parts from the work the adhesive formed on rake face and coating film flake at the same time. With these repetition tool wear progresses. Flaking can be restrained by reducing undeformed-chip thickness at the end of cutting.
  • 石田 徹, 竹内 芳美
    1999 年 65 巻 7 号 p. 982-986
    発行日: 1999/07/05
    公開日: 2009/04/10
    ジャーナル フリー
    The study deals with manufacturing curved holes such as water channels of mould and die, which are difficult to create. As holes are generally formed by drilling operations, curved holes cannot help but be formed by the combination of straight holes, which leads to the interference with smooth stream of water. To solve the problem, a quite simple mechanism to create a curved hole was devised, which consists of a helical compression spring, wires, pulleys and an electrode for electrical discharge machining (EDM), and was installed on an electrical discharge machine. The mechanism allows the electrode to move along, a curved line. From experimental results, it is found that the mechanism has the potential of creating a curved hole.
  • 宮川 治, ソウスウイッツ ナッタポン, 竹内 芳美, 河合 知彦, 沢田 潔, 佐田 登志夫
    1999 年 65 巻 7 号 p. 987-991
    発行日: 1999/07/05
    公開日: 2009/04/10
    ジャーナル フリー
    The study proposes a new method of bonding two small parts without the use of any adhesive by making use of ultraprecision V-shaped microgrooves on the surfaces of each part. These V-shaped microgrooves allow small parts to be bonded together with high positioning accuracy due to a wedge effect and an adhesion phenomenon between the mating surfaces. Ultraprecision V-shaped micro-grooves are created by using an ultraprecision machining center having 1 nm positioning resolution and a diamond milling cutter. From experimental and simulated results, it is found that the bonding strength in general increases with decreasing wedge angle. The effect of the wedge length on bonding strength though varies with the wedge angle where the strength increases with increasing length for wedge angles greater than 8 degrees but increases with decreasing length for wedge angles less than 8 degrees.
  • 柴田 隆行, 藤井 茂, 小野 敦, 牧野 英司
    1999 年 65 巻 7 号 p. 992-996
    発行日: 1999/07/05
    公開日: 2009/12/04
    ジャーナル フリー
    Diamond-turned single-crystal silicon surfaces and formed chips were studied by transmission electron microscope (TEM) method. The crystallographic structure of ductile-regime turned surfaces consisted of amorphous material forming a thin surface layer with underlying dislocations generated by the {111} <110> slip systems. Continuous chips were also converted into amorphous material by turning. As depth of cut increased, microcracks were partially formed through the accumulation of excessive dislocations, and consequently brittle fractures occurred. Under these conditions, no continuous chips were obtained. The chips were fragmented and polycrystalline, and contained many crystal defects. At a greater depth of cut, where the material removal mechanism was governed by brittle fracture, the turned surfaces were covered with microcracks, and few dislocations were observed in the damaged layer. Even though the continuous chips had been obtained using a diamond tool with a sharp cutting edge, their structure remained that of single crystal. TEM observations revealed that amorphization and {111} <110> slip deformation are essential in realizing ductile-regime turning of single-crystal silicon.
  • エクテサビ アリ, 佐野 智一
    1999 年 65 巻 7 号 p. 997-1001
    発行日: 1999/07/05
    公開日: 2009/04/10
    ジャーナル フリー
    The physical phenomena which occur during ion micro beam processing of polymers are basically different from those of metals. The electrical and thermal conductivity of polymers are extremely low. The first one induces charge-up phenomenon and the second may cause the evaporation of the materials owing to localized heating around the beam irradiated area. The purpose of this study was to investigate the thermal effects and evaporation of the materials which influence the removal rate of the surface material together with sputtering. Sputtering and thermal evaporation are responsible for removal of the material during the microprocessing of polymers using a highly focused ion beam. Investigations were done for the case of nylon-6 which are widely used as biomaterials. The highly focused, ion beam of Ga, with a diameter of 0.2 μm and energy of 30 keV, was used with different irradiating time, ranging from 10 to 70 s. The widths and depths of fabricated lines were measured using AFM. The machinability of nylon-6 was evaluated by estimating the removal rate.
  • 側面ばり,上面ばり,入口ばりおよび入口側面ばりに関する生成機構の検討と分類法の適用
    橋村 雅之, David A. DORNFELD
    1999 年 65 巻 7 号 p. 1002-1007
    発行日: 1999/07/05
    公開日: 2009/04/10
    ジャーナル フリー
    To solve the troubles due to burrs formed in cutting process, it is important to understand formation mechanism of the burrs and to classify those. In the previous paper, formation mechanism of the exit burrs formed at edge of exit and machined surfaces in milling was analyzed and a classification method for the exit burrs was proposed. In milling process, however, not only exit burrs, but also other kinds of various burrs are formed on various edges located on a workpiece. In the case of cutting a rectangular parallelepiped workpiece in face milling operation, five kinds of burrs are observed as follows: (1) exit burr, (2) side burr, (3) top burr, (4) entrance burr and (5) entrance side burr. In this study, formation mechanism of the various burrs except exit burr, such as side burr, top burr, entrance burr and entrance side burr are, analyzed. These burrs have similarity and difference with exit burr in the formation mechanism each other. Therefore, the similarity and difference with exit burrs in the burr formation mechanism are explained in the proposed classification. Moreover, those burrs are classified applying the classification method proposed in the previous study.
  • 閻 紀旺, 庄司 克雄, 厨川 常元
    1999 年 65 巻 7 号 p. 1008-1012
    発行日: 1999/07/05
    公開日: 2009/04/10
    ジャーナル フリー
    Material removal behavior of single crystal silicon in ultra-precision diamond turning is experimentally studied. Microscopic chip morphology is investigated to clarify the brittle-ductile transition mechanism. A straight-nosed diamond tool is used to obtain the uniform chip thickness along the cutting edge. Three dominant types of chips are observed under different undeformed chip thickness. In the brittle regime, irregular grain chips and pitted surface are formed by cleavage fracture. As an intermediate regime, periodical shear deformation occurs with producing line chips and striated surface. The chip formation phenomenon in the ductile regime is confirmed to be similar to that of metal cutting, where continuous ribbon chips and perfectly transcribed surface can be obtained. Moreover, the crystallographic anisotropy effects in the chip morphology are found.
  • 高橋 一郎, 安斎 正博, 中川 威雄
    1999 年 65 巻 7 号 p. 1013-1015
    発行日: 1999/07/05
    公開日: 2009/04/10
    ジャーナル フリー
  • 青山 英樹, 鈴木 由宇
    1999 年 65 巻 7 号 p. 1016-1020
    発行日: 1999/07/05
    公開日: 2009/04/10
    ジャーナル フリー
    This paper describes a system to automatically measure the shape of an unknown physical object for constructing the computer model of a physical object. The system is composed by two sub-systems: one is for rough recognition of a physical object and the other is for precise measurement of it. A physical object is roughly recognized as the Z-map model that is constructed by analyzing and processing the shadow images of an object obtained by CCD cameras. Then, precise measurement of discrete points on an object is automatically carried out by a three coordinate measuring machine. The strategy for the precise measurement of an object is automatically made according to the Z-map model.
  • 裏面うねりの表面平坦度への影響の低減
    宇根 篤暢, 津島 佳男, 餅田 正秋, 松井 伸介, 石川 良征, 大平 文和
    1999 年 65 巻 7 号 p. 1021-1025
    発行日: 1999/07/05
    公開日: 2009/04/10
    ジャーナル フリー
    Fabrication of ULSI devices requires a 12-in. silicon wafer to have a site flatness better than 0.1 μm /30 mm. Vacuum pin chucks have been developed for flattening processed wafers. This paper describes to reduce the influence of the back-surface waviness on wafer flatness resulting from vacuum clamping. It was found that the contact ratio between the back-surface and the pin tops decreases with an increase in pin pitch or waviness, which degrades wafer flatness. Reducing the vacuum pressure improves flatness only slightly, but polishing for a short time produced good results. It is also shown that flatness better than 0.05μm/30 mm is obtained by reducing the waviness to better than 0.1μm /30 mm in clamping a 775 -μm-thick silicon wafer.
  • 後藤 聡, 中村 政俊, 久良 修郭
    1999 年 65 巻 7 号 p. 1026-1029
    発行日: 1999/07/05
    公開日: 2009/04/10
    ジャーナル フリー
    In mechatronic software servo systems, the position of the servo motors is measured by using encoders which are connected to the servo motors. For the industrial software servo systems, the velocity feedback signal is calculated by the difference operation of the accumulated pulse of the encoder. Ripples of the velocity output of the software servo systems occur because of the deterioration of the velocity feedback signal. In this paper, we analyzed the behavior of the system by using the software servo model, and obtained a relationship between the control performance and the resolution of the encoder in the software servo systems, which can be effectively used in designing the mechatronic software servo systems in industries.
  • 竹内 亨, 白石 昌武
    1999 年 65 巻 7 号 p. 1030-1034
    発行日: 1999/07/05
    公開日: 2009/04/10
    ジャーナル フリー
    The electric wheelchair is one of the tools for providing mobility for the elderly and handicapped. However, it is sometimes necessary to practice the operation at a rehabilitation center, etc. in order to be able to use an electric wheelchair effectively. With this sort of background, electric wheelchair operability and drive stability are a problem. For example, it is impossible to cope with changes in the driving environment such as slopes crossing transverse to the direction of travel. Up to now, research and development efforts have been, aimed at attaching new mechanisms to the electric wheelchair to solve these problems. However, there has been a few report made using the control engineering approach. Rather than using construction, or hardware, research and development using control engineering, or software approach, methodology shows strong hope for improving electric wheelchair operability and drive stability. The goal of this research is to improve electric wheelchair drive stability through the development of a control algorithm. In this report, the applicability of the electric wheelchair control system dynamic analysis is confirmed by experiment. A more stable control algorithm based on the drive control experiments is also considered.
  • ロボットの絶対位置決め精度の検証と対偶軸同定法の問題点の指摘
    青柳 誠司, 藤岡 潤, 石井 一久, 関 啓明, 神谷 好承
    1999 年 65 巻 7 号 p. 1035-1040
    発行日: 1999/07/05
    公開日: 2009/04/10
    ジャーナル フリー
    Aiming at realizing off-line programming, many researches of improving robot's accuracy by calibrating the kinematic parameters of a robot are being carried out now. For an effective calibration it is necessary to measure the position of the tip of a robot arm precisely in a comparatively wide area. Although a laser tracking system is regarded as the most practical measuring system for this purpose in ISO 9283, there is no report yet which actually applies this system to the robot calibration. In this paper a 6-DOF articulated robot is calibrated by using a laser tracking system according to the joint axis estimating method and the effectiveness of this system is certified. A method of estimating the accuracy which refers to the robot base coordinate system is proposed. It is proved experimentally that the accuracy of the robot before calibration is worse than 3mm. The robot after calibration is positioned to the limited grid which is in the area near the initial pose of the calibration and to the wide grid. The accuracy in the limited grid is improved to be 0.27mm by the calibration, however the accuracy in the wide grid is worse compared with that in the limited grid. From this result it is proved that the joint axis estimating method is not so effective except for the neighborhood of the initial pose.
  • 平面研削装置への適用
    松本 潔, 畑村 洋太郎, 中尾 政之
    1999 年 65 巻 7 号 p. 1041-1045
    発行日: 1999/07/05
    公開日: 2009/04/10
    ジャーナル フリー
    Deformation of a machining system due to machining force is a major cause of decrease in product preciseness. Generally, to increase the preciseness, rigidity of frame, chuck and tool of the machining system is to be reinforced. This induces increase of size, mass and complexity of the system. The authors propose an another approach. By employing a negative compliance device, it is possible to compensate deformation of the machining system caused by machining force. In this paper, a machining system with the negative compliance device is analyzed. Control conditions for stabilization and compensation are shown. A 3-axis negative compliance system is realized by using a ring-shaped active force sensor. To confirm reduction of machining error, the negative compliance system is applied to a face grinding machine of silicon wafers. Through experiments of grinding wafers, it is confirmed that the error can be reduced from 0.9μm to less than 0.1μm with cutting depth of 10μm.
  • 人間の感覚と測定値の関係
    楜澤 信, 尊田 嘉之, 嶋崎 剛, 下薗 裕明
    1999 年 65 巻 7 号 p. 1046-1050
    発行日: 1999/07/05
    公開日: 2009/04/10
    ジャーナル フリー
    In this study, a new method of measurement and evaluation for optical distortion of glass or transparent objects is proposed. The parameter "CP-contrast" that means the contrast of checkered pattern viewed through the object is selected as evaluating value of the method. In the previous paper, the strong correlation is confirmed between the CP-contrast and the magnitude.of optical distortion determined from surface profile and installation angle. In this paper, relation between the CP-contrast and the human sensitivity is examined. The CP-contrasts and probabilities discriminated by testee are measured for each artificial sample with various installation angles. The sensory scores corresponding to human sensing magnitude of optical distortion are calculated from the probabilities. Strong correlation (r2=0.84) between the CP-contrast and the sensory score is shown, and accuracy of the evaluation by the CP-contrast is higher than that by testee including individual difference and reproducibility. As the next step, dot type optical distortion defects on windshield glasses are evaluated by the CP-contrast and expert inspectors. Strong correlation (r2=0.82) between the both results is observed. It is shown that measuring the CP-contrast can substitute for visual inspection.
  • 高野 健, 中井 徹志, 佐々木 健
    1999 年 65 巻 7 号 p. 1051-1055
    発行日: 1999/07/05
    公開日: 2009/12/04
    ジャーナル フリー
    Manipulation system for rectangular shaped object based on primitive motions is presented. Tasks involving contact with the environment require adjustment of control parameters for specific contact state for each application. In order to alleviate this problem, control programs for primitive motions have been implemented in the robot controller. This is based on an assumption that most tasks can be decomposed into a finite set of primitive motions, and that a task can be fulfilled by executing a sequence of primitive motions. In this paper, the object's shape is restricted to prism. The environment was also assumed to be composed of vertices, edges, and planes. First, all possible contact states were analyzed, and a control program for each contact state was written based on impedance control. Signal processing of the force sensor is presented. An experiment where a wooden block grabbed by a robot hand passed through a maze-like environment is presented. The system detected the contact state transition and chosed the appropriate primitive motion as it moved.
  • 加藤 俊之, 井越 昌紀
    1999 年 65 巻 7 号 p. 1056-1061
    発行日: 1999/07/05
    公開日: 2009/12/04
    ジャーナル フリー
    In this study, in order to investigate visibility in a smoke-filled environment like a firefight scene, a simulation system was constructed using a transmission model and a reflection model based on experimental data. Scattering and absorption of smoke layers as functions of wavelength and smoke characteristics are derived from analyzing transmission of smoke with Mie-theory. Reflections of object surface are obtained by applied experimental data to Sparrow's reflection model. With a result from the simulation, it shows good correspondence with real image, and scattering, absorption and reflection effect was clarified in visible and infrared image in a smoke-filled environment.
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