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67 巻, 4 号
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序にかえて田村 守2001 年 67 巻 4 号 p. 537-540
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーPDF形式でダウンロード (5356K) -
山田 幸生2001 年 67 巻 4 号 p. 541-545
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーPDF形式でダウンロード (2204K) -
佐藤 学, 丹野 直弘2001 年 67 巻 4 号 p. 546-549
発行日: 2001/04/05
公開日: 2009/04/10
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堀井 章弘2001 年 67 巻 4 号 p. 550-553
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーPDF形式でダウンロード (5507K) -
堀中 博道2001 年 67 巻 4 号 p. 554-557
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーPDF形式でダウンロード (5595K) -
牧 敦, 山下 優一, 小泉 英明2001 年 67 巻 4 号 p. 558-561
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーPDF形式でダウンロード (3994K) -
小笠原 康夫2001 年 67 巻 4 号 p. 562-565
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーPDF形式でダウンロード (5955K) -
超音波とマルチフォトンの活用藤田 克昌, 日坂 真樹, 河田 聡2001 年 67 巻 4 号 p. 566-569
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーPDF形式でダウンロード (5834K) -
宮脇 敦史2001 年 67 巻 4 号 p. 570-573
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーPDF形式でダウンロード (2043K) -
研磨材スラリ―循環方式の提案とその研磨特性進村 武男, 山口 ひとみ, 渡辺 将人2001 年 67 巻 4 号 p. 575-580
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーAn internal magnetic abrasive machining uses a specialized magnetic abrasive, consisting of Al2O3 abrasive grains and iron, as a finishing tool. Because of the particular process used to produce the magnetic abrasive, it is difficult to control the size of the Al2O3 abrasive grains in the magnetic abrasive. This affects not only the finishing characteristics, but also the applicability of the process. The effective life of the magnetic abrasive, caused by the wear of the Al2O3 abrasive cutting edges, must also affect the finishing characteristics over the processing time. This research, thereby, processes the application of a commercialized abrasive slurry as a finishing tool in place of the specialized magnetic abrasive. The aim of the paper is to present the principle of the finishing process using an abrasive slurry and examine the finishing characteristics. The fine surface of 0.01μ mRa in roughness (SUS304 stainless steel tube) was obtained using this abrasive slurry circulating system. These results will characterize the finishing mechanism.抄録全体を表示PDF形式でダウンロード (4486K) -
工作物曲率変化と機械熱変形の影響中島 利勝, 藤原 貴典, 塚本 真也, 谷吉 将和, 山田 龍宙2001 年 67 巻 4 号 p. 581-585
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーIn order to establish the high precision contour grinding method, the reference position correct sensor is first developed for compensating the thermal deformation of a machine structure, and then the controlled normal force grinding method is developed to control a fluctuation of a normal grinding force. Main conclusions obtained in this study are as follows: (1) It is made possible to correct the error of wheel depth of cut accurately, with using developed reference position correct sensor. (2) The controlled normal force grinding technique is developed, through the analysis of the feed rate setting conditions correspond to the curvature variation of a workpiece. (3) High performance contour grinding method, with which both constant surface roughness and high dimensional accuracy can be obtained in any curvature radius of a workpiece, is developed by using the controlled normal force grinding method incorporate the reference position correct sensor.抄録全体を表示PDF形式でダウンロード (483K) -
切削力の聴覚フィードバックにおけるフィードバック情報と特性の影響Nattawoot DEPAIWA, 加藤 秀雄, 楊 友沈2001 年 67 巻 4 号 p. 586-590
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーIn high precision machining using a hand-operated machine tool, the human operator could perform its task well and swiftly, if it could acquire sensory information helpful to the performance effectively. In the previous paper, one of the authors described a system for active auditory feedback of minute cutting force to the human operator in small-diameter deep-hole drilling. In this paper, the authors have discussed the kind of feedback information and characterisitcs in the same system from the viewpoints of operating efficieny and the others. As the results, it is found that the envelope signal of cutting torque as the feedback information and suitable folding line feedback characteristics are superior in improvement of operating efficiency and suppression of operating load.抄録全体を表示PDF形式でダウンロード (1936K) -
宮河 秀和, 山本 暁洋, 二見 茂, 住本 正, 後藤 聡, 中村 征俊2001 年 67 巻 4 号 p. 591-596
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーA gain tuning for contour control of NC machine tools by using genetic algorithm (GA) is discussed. The proposed method are off-line tuning method on simulation, where models are identified as the mufti-degrees-of-freedom mechanism and simulations are used as the evaluation of the tuning. The method gives the optimal control gain of the controller, which influences the accuracy of the machine tools processing. Also the vibration phenomenon at a high gain can be reduced.
Experimental results by using an actual NC machine tool showed effectiveness of the proposed method.抄録全体を表示PDF形式でダウンロード (1965K) -
餅田 正秋, 守屋 茂, 島宗 勉, 宇根 篤暢2001 年 67 巻 4 号 p. 597-601
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーPolishing of CVD diamond plate with metallic disk wheel in air is proposed as a practical and simple polishing method. The effects of polishing temperature and disk materials on removal rate and surface roughness are examined experimentally, and the optimum conditions and the polishing mechanism are discussed. When disk materials of mild steel, cast iron, nickel alloy and titanium alloy are used, the adhesion between the CVD diamond and the metallic disk happens. Removal rate and surface roughness are the best when stainless steel is used, because various oxides produced in the disk prevent adhesion between the CVD diamond and the disk. At polishing temperature below 400°C, the diamond is polished mechanically. As polishing temperature reaches from 500°C to 600°C, the diamond is oxidized and removal rate increases extremely.抄録全体を表示PDF形式でダウンロード (3510K) -
森本 喜隆, 平尾 政利, 市田 良夫, 佐藤 隆之介, 加賀 宗明, 小川 剛2001 年 67 巻 4 号 p. 602-606
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーA new laser machine has been developed to improve the accuracy of trajectory. In this machine, an original numerical control unit that compensates the non-linear dynamic characteristics of the laser machine is equipped based on new compensation method so that the laser head corresponds to the high speed machining with enough accuracy. Because the parameters of dynamic characteristics change during motion depending on position, the conventional control method by inverse transfer function is not able to adapt at ordinary way. Two methods are proposed to accomplish an improvement of the accuracy of trajectory to coop with these problems. In the first method, parameters are calculated previously as a function of position from the synthesized transfer functions, and in the second method, these are obtained by real-time calculation during motion for the lather head travel as the second order regression functions of position of the laser head travel. Experimental control results showed the considerable improvement of the accuracy of trajectory, settling time and suppression of vibration of the laser machine at the corner cutting.抄録全体を表示PDF形式でダウンロード (471K) -
nmオーダでの加工精度の評価森 勇藏, 山内 和人, 杉山 和久, 稲垣 耕司, 三村 秀和, 今井 利幸2001 年 67 巻 4 号 p. 607-612
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーTo develop the ultraprecision figuring system is very important and strongly required in many scientific fields. The mirrors for synchrotron radiation X-ray facilities or EUV (extreme ultraviolet) lithography system are required to have atomically smoothed surface and extremely high figure accuracy with the order of nanometer range. EEM that has been developed by authors has been known to be able to prepare the many kinds of optical components with the atomically smoothed surface without any crystallographic damage. On the other hand, several basic researches are performed to evaluate the possibilities of the visualization of numerically controlled EEM system for the ultraprecision figure corrections. In this work, a new type of EEM head, that is for the transportation of ultrafine powders, utilizing a jet flow of the ultrapure water has been developed for the numerically controlled figuring system to realize the good controllability and stability of machining properties such as removal rate and the processed surface qualities. A new EEM system for the figuring practically required optical components described above has been constructed, tested and concluded to have sufficiently good performances for the ultraprecision figuring with the nanometer accuracy.抄録全体を表示PDF形式でダウンロード (4293K) -
藤井 健次, 清水 茂夫, 森 正継2001 年 67 巻 4 号 p. 613-617
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーSpindles used in machine tools, especially machining centers, must operate at high speeds with high stiffness and low temperature rise in order to achieve improvements in productivity and accuracy of the machine. Usually, preloaded angular contact ball bearings are used to satisfy these requirements. However, during high-speed operation, bearing internal clearance is reduced due to thermal and centrifugal expansion of inner ring. Besides the expansion of the inner ring, the centrifugal force acting on the balls increases the preload on the bearings. As a result, these bearings can have problems of short life and seizure. Therefore, in high-speed operations, it is important to simulate the increase in ball contact load on races and determine the optimum internal clearance for the bearings. This paper introduces an analytical method to calculate ball loads considering the centrifugal effects on the inner ring and balls simultaneously.抄録全体を表示PDF形式でダウンロード (380K) -
各種形状の市販スローアウエイチップが適用可能な工具の開発神 雅彦, 渡邉 健志, 小日向 工, 村川 正夫2001 年 67 巻 4 号 p. 618-622
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーIn this study, the practical inclined ultrasonic vibration cutting tool, on which commercially available throw-away inserts of various shapes can be mounted, is investigated. As a result, the objective mentioned above can be achieved by, for example, using the tool in the longitudinal vibration mode, optimizing the shape and material of the tool shank, and investigating the fixing force of inserts on the tool shank. Some cutting tools for turning operations such as cylindrical turning and facing are fabricated, and turning tests using throw-away inserts are carried out. Consequently, it is found that the fabricated inclined ultrasonic vibration cutting tool is as useful as a conventional cutting tool, and a high accuracy can be obtained when cutting workpieces of difficult-to-cut shapes and materials.抄録全体を表示PDF形式でダウンロード (4268K) -
加納 正明, 守屋 孝彦, 古矢 正明, 山内 健資, 山崎 修, 青木 克明, 山田 勝哉, 片岡 好則2001 年 67 巻 4 号 p. 623-627
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーA large microwave-excited plasma source with a slot antenna for 300mm wafers has been developed, and a high-speed downflow process is achieved by low damage. In this system, the following developments are realized:(1) a high-density plasma source with a slot antenna, (2) a processing chamber whose shape is optimized by gas flow simulations and evaluation of damage. As a result of process evaluation of the optimized processing chamber, an ashing rate of 4.5 μm/min, a poly-Si etching rate of 470nm/min, and an SiN etching rate of 140nm/min are obtained. These values are approximately two-or fivefold of the corresponding values obtained by conventional chemical dry etching. In order to maximize the process performance, a compact, high-speed wafer transport system has been developed The maximum overall throughput is 160 wafers/h.抄録全体を表示PDF形式でダウンロード (2137K) -
濃淡画像による非積層造形林 照剛, 三好 隆志, 高谷 裕浩, 高橋 哲2001 年 67 巻 4 号 p. 628-632
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーThis paper presents a new method for fabricating micro structure by applying the stereolithography. This process is characterized by the mask exposure method and the nonlaminate 3-D constructing process for fabricating 3-D object precisely. The exposing method of stereolithography is roughly classified into two categories. One is a laser scanning method, the other is a mask method. The mask method is more suitable for small size parts fabrication than the laser scanning method. However, precise adjustment of many masks is difficult for manufacturing 3-D structures. In this paper, a new stereolithography process for micro manufacturing is proposed, namely stereolithography using liquid crystal display (LCD) mask. Fundamental experiments were performed to verify the proposed method. Both a micro gear with a tooth width of about 80 μm and pyramidal shape 1.5mm in height can be fabricated in a few seconds without lamination. This method enables precise fabrication of various microstructures at high speed as compared with conventional techniques.抄録全体を表示PDF形式でダウンロード (3802K) -
小原 治樹, 辻 晶樹, 大住 剛, 羽多野 正俊2001 年 67 巻 4 号 p. 633-637
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーThis paper describes the developed system to measure accuracy of the fine contour shape of the penetrated specimen. Examples, usually, the accuracy of the parts machined by wire EDM are measured with a projector. But it can not be useful to check the error of shape in a cross section at any desired height, except at the top and bottom surfaces of the specimen. The developed system uses the fine wire as a probe having partially convex shape. The wire probe moves along the programmed contour path, and approaches to the surface of specimen with 1μm step in a cross section at the desired height. The touching of the wire probe to the specimen is found from the wire displacement at the outside of the specimen. The wire displacement is detected with the developed measuring instrument composed with optical fibers and slits. Some difficulties to function this system are discussed and the countermeasures of them are proposed. And also the possibility and the method to use it for submicron measurement are discussed. It was found that this system is useful to measure the accuracy of specimen in a cross section at any height of specimen.抄録全体を表示PDF形式でダウンロード (1826K) -
試作システムの構成とその基本的な評価阿部 誠, 高増 潔, 大園 成夫2001 年 67 巻 4 号 p. 638-643
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーA new calibration system for up to a middle size CMM is developed. The spatial coordinate comparison method is realized for the practical system by applying direct coordinate comparison between the reference CMM and the object one through measurement of the sphere feature. The first report describes results from conceptual consideration of the method and evaluation experiment of the prototype system for confirming its primitive performance. The experiment is performed on a conventional CMM with measuring volume of 500-400-400 mm3 and resolution of 0.5μm. The result shows that the prototype system is able to provide the complete parametric errors of the object CMM in the fully automated manner as the calibration result which minimizes the observed systematic deviation.抄録全体を表示PDF形式でダウンロード (611K) -
作業領域解析システム趙 暁明, 門脇 聡, 渋川 哲郎, 遠山 退三, 服部 和也, 堤 正臣2001 年 67 巻 4 号 p. 644-648
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーIt is required to get large working space when the parallel mechanism based machine tools are used. However, the shape of working space is considerably complicated because of the influence of the self-interference generated between the parts and of singular points. In this paper, an analysis system for calculating the working space of parallel mechanism based machine tools is developed. It can be adapted to various types of parallel mechanism based machine tools including tilting type, perpendicular type, telescopic type and revolving type. Taking HexaM machine developed by Toyoda Machine Works Co. as the model, the developed software is proved to be effective by comparing the results of experiment and simulation. Moreover, the HexaM machine is evaluated by investigating the influence of the shape and dimension of parts on the working space.抄録全体を表示PDF形式でダウンロード (4039K) -
奥山 栄樹2001 年 67 巻 4 号 p. 649-653
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーIn the field of the roundness measurement, the inverse matrix method for the V-block method was proposed in 1999. This method uses a matrix equation formed by a coefficient matrix, a column vector of actual surface data and another column vector of measured data. The surface profile can be obtained as the solution of this equation. In this article, the inverse matrix method is applied to the 3-point method and the foundation of this theory is established. Some simulation results show that the relationship between the input and the output of the inverse matrix method is fundamentally equal to that of the inverse filtering method. It means that the influence of the random error and the influence of the sensor's setting angle error of the both methods are the same. The inverse matrix method can set the number of sampling free. On the other hand, this method requires the long calculation time and the large memory.抄録全体を表示PDF形式でダウンロード (343K) -
深谷 直樹, 沢田 潔, 奥 秀明, 和田 博, 遠山 茂樹2001 年 67 巻 4 号 p. 654-659
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーThis paper presents a new artificial arm for physically handicapped people by using a spherical ultrasonic motor. The ultrasonic motorhas high performance such as it has high torque at low speeds, high holding torque, no braking mechanism, no magnetic noise, a gear is unnecessary and the motor can be driven silently. Especially, a spherical ultrasonic motor has these characteristics and three degrees-of-freedom in one unit which is similar to the joint of the human being. In additional, newly developed a small size ultrasonic motor and a high output torque type of ultrasonic motor which called a sandwich type ultrasonic motor. In this paper a spherical ultrasonic motor and a sandwich type ultrasonic motor are attempted to apply an artificial arm. Then the artificial arm has a spherical ultrasonic motors on a wrist joint, and it also has a three-finger hand by using a small size ultrasonic motor. The artificial arm by using shperical ultrasonic motor shows good maneuverability and excellent controllability.抄録全体を表示PDF形式でダウンロード (5704K) -
タペット音と片打ち音の特徴抽出のアルゴリズムについて黎 子椰, 秋下 貞夫, 加藤 利彦2001 年 67 巻 4 号 p. 660-664
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーThis study proposes an automatic diagnosis system for engines based on sound signal analysis. First, the wavelet transform and the FFT frequency analysis are employed to extract the features of the signal of tappet clicks and misfire. Comparing results of the wavelet transform and the FFT frequency analysis, it is found that the wavelet transform method is more effective. Second, through experimental results, it is revealed that even with the high level noise in engine assembly site, the tappet clicks can be detected by means of the wavelet transform analysis, so long as the level of the noise is the same as that of the tappet clicks. The expermental results pvove the effectiveness of the proposed algorithm.抄録全体を表示PDF形式でダウンロード (467K) -
高橋 健, 早瀬 仁則, 初澤 毅2001 年 67 巻 4 号 p. 665-670
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーA new technique to estimate the measurement force caused by a topographic measurement system using a microfork (tapping stylus) is proposed. Although Hertz model has been used to estimate the repulsive force of AC-mode AFM probes, precise constants such as Young's moduli and radius of the probe tip are required to calculate the force. In this paper, the microfork is modeled by a spring-dumper system with an effective mass. Samples are also modeled by a passive spring-dumper system. Then experimental results of the near field characteristics and the motion of the microfork obtained by a numerical simulation are compared. The spring constant and the dumping coefficient obtained from the simulations are fitted to those of expermantal results. Then the tapping force can be estimated by numerical simulations using the two parameters.抄録全体を表示PDF形式でダウンロード (429K) -
植木 正明, 水島 茂喜, 孫 建新, 大岩 彰2001 年 67 巻 4 号 p. 671-675
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーIn order to improve the reliability of weight calibration, a fully automatic mass comparator has been installed in an airtight chamber. In the chamber, the density of the inner air is controlled within ±0.0001 kg/m3 in the density range from 0.7 to 1.2 kg/m3, and mass comparison can be done with the fixed environmental conditions. Utilizing this setting, the mass and the volume of a test weight are simultaneously measured. Moreover, a decrease of the uncertainty of the air buoyancy correction and the standard deviation of the mass comparison will be expected. An airtight chamber was made of stainless steel, divided into upper and lower cases, and has a cylindrical shape with an inner diameter of about 700 mm and height of about 740 mm. A mass comparator having a capacity of 1002 g and a readability of 0.001 mg was used for carrying out automatic mass comparison between four weights. This paper describes the features and results of performance evaluations of the comparator.抄録全体を表示PDF形式でダウンロード (4059K) -
多点位置決め法におけるパラメータ,測定点数,測定ポーズの選択に関する検討藤岡 潤, 青柳 誠司, 石井 一久, 関 啓明, 神谷 好承2001 年 67 巻 4 号 p. 676-682
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーA 6-DOF articulated robot (PUMA 560) is calibrated by using a laser tracking system according to the multiple positioning method and the effectiveness of this system is certified. A method which calibrates only angle parameters is newly proposed, since there is a possibility that true values of length parameters are directly measured by some other methods. The relationship between sensibility index and the number of measurement are simulated and it is inferred that 10 random measurements with fixed orientation is enough in case of calibrating only angle parameters and 20 random measurements with random orientation is enough in case of calibrating both angle and length parameters. The combination method which obtains length parameters by the joint axis estimating method and calibrates angle parameters by the multiple positioning method is experimentally developed. The accuracy of the combination method and that of the normal multiple positioning method are experimentally investigated. From the results, the effectiveness of the strategy of how to select parameters, number and pose (position and orientation) of measurement, which is mentioned above, is experimentally confirmed. The accuracy of 0.12mm is achieved in wide area and this value is better than already reported ones about PUMA 560.抄録全体を表示PDF形式でダウンロード (2855K) -
大内 英俊, 長田 佐, 河西 敏雄2001 年 67 巻 4 号 p. 683-687
発行日: 2001/04/05
公開日: 2009/04/10
ジャーナル フリーThis paper deals with a piezoelectric force sensor with static sensitivity and the improvement of the static characteristics. It is difficult for an electric-charge type force sensor to have static sensitivity because of the leak of the charge. On the other hand, the piezoelectric element has electrical resonance characteristics, and the resonance frequency is slightly shifted by the impedance change due to the applied stress. The voltage induced to the sensor element corresponds to the given load when it is oscillated with the fixed frequency near the resonance and with the alternating current of constant amplitude. It has been confirmed that the output stability is maintained and the drift is made negligible when the oscillation frequency is strictly fixed and that the hysteresis between the load and the sensor output is removed when the amplitude of current is kept constant by the feedback control. The force is applied directly on the sensor without converting the force into the deformation of elastic material. Then, the sensor can be made thin and it will be expected to be used in the wider application fields.抄録全体を表示PDF形式でダウンロード (2235K)
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