This study describes sheet feeding method and its design concept using ultrasonic vibration actuator. The ultrasonic vibration is generated by two sets of piezoelectric actuator. It is an elliptic vibration mode, which rotates two vibtaton modes in the Y-Z and X-Y planes. This paper presents a direct drive method using vibratory rotor and an indirect drive method using idling rotor about sheet feeding mechanism, and proves theoretical relations between amplitude U_z1 and sheet feeding speed υ_H, υ_H^* and feeding force F_H, F_H^*. As a result of fundamental experiments, it was proved that a sheet, such as paper and telephone card, could be fed easily using either of their methods, and high reliable and compact sheet feeding mechanism could be obtained.

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This paper describes the method of detecting the absolute position by four track : the 5 625 pulses absolute track, it's the inverse track, the 5 625 pulses incremental track and 45 000 pulses incremental track, and of doing 2 bit error detection and 1 bit error correction of the 5 625 pulses absolute positions. The 5 625 pulses absolute tracks are made by the selected partof the 8 191 length M-sequences. The 11 200, 22 500 pulses signals for detecting the 45 000 absolute position, are made by interporating of the 5 625 pulses incremental signal. The 45 000 pulses absolute positions are gotten by adjusting the phase relation between the interporated signals and the 45 000 pulses incremental signal. The 36 000 000 pulses absolute positions are gotten by interporating the 45 000 pulses incremental signal. The 2 bit error detections and 1 bit error correction are done by the linear reflexive relations of a M-sequences and look-up table of the ROM (Read Only Memory).

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Steel plate was cut by a newly developed small-diameter-nozzle plasma arc, which can produce a power density of 10⁴ W/mm². The balance of the force and the heat transfer are discussed. Although the force due to the impingement of the plasma particle is large enough to remove the molten material, the plate cannot be separated in case of argon assist gas ; on the other hand, in case of oxygen assist gas, the plate can be separated. From these facts, a new model of cutting mechanism is proposed. The molten material is removed by discontinuous oxidation near the rear surface of the plate and the plate is separated ; this oxidation produces kerf side lines which point in the cutting direction near the rear surface.

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In this study, a high-efficiency mirror finishing method which is named “one-pass mirror finish grinding” has been discussed, in which the mirror finishing is accomplished by only one pass grinding operation. In this report, a metal bonded fine grain diamond wheel (MU diamond wheel) has been newly developed by using a high tin bronze bond and its grinding performance has been investigated to establish the one-pass mirror finish grinding technology for various fine ceramics. Main results are summarized as follows : (1) In grinding the representative fine ceramics such as Al₂O₃-TiC, SiC and Si₃N₄, the MU diamond wheels can generate the mirror surface with roughness of 30-80 nmR_max by only one pass grinding operation, in which the material removal rate reaches 4-10 mm³/mm·min. (2) As the MU diamond wheels have an excellent ability for keeping the grinding sharpness as well as a high wear resistance, in grinding Al₂O₃-TiC ceramics, they can continue over a long time to generate the mirror surface with roughness of less than 50 nmR_max without dressing and in this case the grinding ratio reaches about 400.

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In this paper, the curvature of 304 stainless steel thin plate in one pass grinding using WA, CBN and diamond wheels was investigated. And then the result was compared with carbon steel. The influences of grinding direction (up-cut, down-cut) and repetition of grinding pass were also pursued by considering plastically deformed layer. Main conclusions are as follows : (1) Tn grinding 304 stainless steel plate, WA wheel followed by CBN wheel produced largest concave curvature but diamond wheel causes a little convex curvature. The curvature in grinding 304 stainless steel plate is much larger than carbon steel. The influence of grinding condition, such as depth of cut, wheel speed, and work speed on curvature is generally similar in grinding carbon steel plate. (2) Up-cut grinding causes the larger convex curvature and higher compressive residual stress than down-cut grinding. The plastically deformed layer in up-cut grinding is larger than down-cut grinding in case of carbon steel. (3) As grinding pass is increased, the convex curvature becomes smaller as far as 304 stainless steel is concerned, but the curvature is almost constant in carbon steel plate.

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Conductive zirconia ceramics, which contain 22.5 to 45% NbC, were machined by a wire electro-discharge machining. The zirconia containing 27.5% TiC and the alumina containing 27.5% TiC were also machined. The machining rate and surface roughness were measured for different pulse durations and D. F. values, and cutting mechanism in the zirconia ceramics was investigated by a micrographic analysis of machined surface. It is obvious that there exists an optimum duty factor from a standpoint of machining rate. As NbC content is increased, machining rate increses and reaches a maximum, while the surface roughness becomes better with NbC content. A large number of tiny discharge craters were observed in the machined surface, and due to this tiny craters the surface roughness does not increase so much even at high machining rates.

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Used hydrogels are prepared by repeatedly freezing and thawing a polyvinyl alcohol aqueous solution. Their mechanical characteristics containing a solution of an electrolyte are studied. The behavior on their electrical resistance when they are deformed elastically is also studied. It is found that they have high tensile strength of 0.6MPa, high water content of 90 wt% and flexibility, and that their electrical resistance changes when they are deformed, and the responses and the repeatability of these behavior keep stable for at least 30 minutes. Therefore, sensors using hydrogels are made for trial. For example, gas pressure can be sensed if hydrogels are used as a diaphragm. And motion of the belly can be sensed if hydrogels are attached to it. As a result, the number of breaths can be counted.

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アーク放電プラズマジエット気相成長法によって合成したダイヤモンド粉を高温高圧力下で焼結し, その焼結特性ならびに切削工具として使用したときのその適用性について検討した結果, つぎのことが明らかになった.
(1) CVDダイヤモンド焼結体で観察される空孔の大きさは, 天然ダイヤモンド焼結体および市販品のダイヤモンド焼結体のそれより小さく, 密度はコバルトをベースにした市販品のダイヤモンド焼結体より低い3.7g/cm3を示す.
(2) CVDダイヤモンド焼結体による切削工具は, 天然ダイヤモンド焼結体工具および市販品のダイヤモンド焼結体工具より優れた耐摩性を示す.

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Experimental investigations concerning formation of metal interconnects on LSI chips using laser-induced CVD are described. Molybdenum conductors were deposited by pyrolytic decomposition of molybdenum hexacarbonyl using argon ion-laser irradiation. Increasing molybdenum hexacarbonyl pressure, increasing laser power and decreasing writing speed were accompanied by increasing width and thickness of molybdenum conductors. Decomposition efficiency is 20 to 30% which is higher than conventional thermal CVD. Increased width and thickness diminished the resistance of the conductors, but the resistivity was almost independent of the forming conditions and higher than that of bulk molybdenum. Auger electron spectroscopy revealed that the high resistivity of the as-deposited films was due to the presence of carbon and oxygen as impurities. These impurities are removable by laser annealing in a vacuum, whereby the resistivity can be reduced to 10 μΩ·cm. These low-resistivity conductors can be applied to fault analysis or repair of not only MOS devices but also linear and bipolar devices.

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A pocket-size electro-discharge machine of which electrode-feeding is done by using two piezoelectric elements has been developed. One piezo makes inertial force for the Impact Drive Mechanism (IDM). The other piezo adjusts a gap length between an electrode and a workpiece, or forces an electrode to vibrate. To improve' the machining performance of the pocket-size electro-discharge machine, forced vibration of an electrode (Vibration method) and the electrodefeeding with fine step of 10 nm (Interpolation method) are examined by using the additional piezo. By the vibration method, the machining time is decreased to 67 % of that without the additional piezo. By the interpolation method, which can make the resolution of the precise positioning mechanism utilizing the IDM finer, the machining time is decreased to 74 %.

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The wet grinding temperatures of two kinds of fine ceramics ; normally sintered silicon carbide (SSC) and normally sintered silicon nitride (SSN); are measured by means of an infrared radiation pyrometry, in which a PbS-cell is mounted just below the workpiece. This new direct-type pyrometer makes it possible to measure the temperature above approximately 50°C. The grinding zone temperature is affected by the abrasive-workpiece interaction. The maximum grinding zone temperature below 100°C is obtained with soluble-type grinding fluid for SSC, in which the finished surface is highly fragmented with less flow. In the case of SSN, more flow and less fragmentation of the finished surface is observed, which causes higher grinding zone temperature. Influence of grinding conditions on the grinding temperature of SSN is greater than that of SSC, especially the grinding zone temperature rises considerably as workpiece velocity increases in wet grinding.

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This paper develops a new parameter design method of improving quality of products with multi objective characteristics. Optimal levels of control or signal factors can not be determined uniquely by trivial extensions of conventional parameter design methods for single characteristic. A loss function is introduced to unify the multiple characteristics via unification of mean and variance of each objective characteristic. A minimization problem of the loss function is formulated as an unconstrained nonlinear programming, and the optimal parameter levels are determined successfully.

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A new type of atomic force microscope (AFM) is described, in which an optical angular sensor detects the deflected angle of a cantilever instead of the deflected displacement, and the cantilever is able to be driven by a piezo actuator directly in accordance with the profile of surface. The developed AFM has advantages that it is sensitive, compact in size, and well suited for roughness measurement of big workpieces with high scanning speed, large scanning area and small interference among three axes. It has a vertical resolution of better than 1 nm and has been successfully used to obtain several stable images of machined surfaces. The results by our AFM are compared with those by SEM and STM, and the importance of making comparisons between results by different measuring principles has been confirmed.

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This paper describes a floating characteristics of a rectangular squeeze-film gas bearing using a piezoelectric actuator as a vibrator. In this bearing, a counter weight is attached to a piezoelectric actuator to make a bearing vibrate and cause a squeeze-film pressure. The influences of various design parameters on the floating characteristics of the proposed bearing are investigated theoretically and experimentally. Further, a new bearing-guideway system for a linear motion guide is proposed and the floating characteristics of the bearing are also investigated. Consequently it is found that the squeeze-film bearing with 450 mm² area for a linear motion guide can carry a counter weight of about 0.4 kg with only the amplitude of 0.5 μm of the actuator.

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In this study, two types of biological potential measuring system have been designed and established in order to bring a detailed sight on the biological information system. In the first system, two types of movable electrodes were developed to detect the potential changes on the leaf surface at a micro-scale level. These movable electrodes can be resiliently engaged onto the leaf geometry and are able to perform a multiple and simultaneous potential measurements at 1 and 2 mm pitch. They are also assisted with a pre-amplifier which can correspond to any fluctuation in impedances of each electrode. The second system is related to measuring system which an insertion depth of a micro-electrode into the leaf to be observed can be arbitrarily controlled by moving a micro-electrode in order to investigate a correlation between the leaf surface potential and intracellular potential of the leaf.

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This paper presents a novel TTL (through the lens) alignment method, called SMART (separated marks TTL alignment), for optical lithography system. This alignment optical system could be accomplished without any complicated chromatic aberration compensation mechanisms. It was clarified that the relative displacement between the reticle and the wafer can be directly detected by measuring the intensity change from detector or the phase difference in the optical heterodyne beat signals. It is also demonstrated that the alignment signal is independent from the wafer focus variation, and can always be detected, even during exposure. An alignment signal stabilization method, in which part of the diffraction lights from the reticle marks are used as reference beat signal, has been adapted to obtain high positioning accuracy. As a result, alignment signal variation of less than ± 12 nm (0.012 μm) has been obtained.

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This paper describes observations of semiconductor device structure by a scanning hard X-ray microscopy with a pair of aspheric mirrors as X-ray focusing optics. Scanning X-ray microscopic images are obtained from detected X-ray diffraction signal by scanning a sample while an X-ray focusing beam is fixed. Hard X-ray focusing beam is produced a pair of elliptical cylinder mirrors arranged in a crossed mirror geometry (Kirkpatrick-Baez configuration). Both mirrors are cut with 5 nm figure contour error by a numerically controlled diamond flycutting machine. A focal spot size of 2.8 μm × 8.3 μm is obtained at a wavelength of 2.3 Å using synchrotron radiation from KEK Photon Factory 2.5 GeV storage ring. A GaAs FET with 2 μm gate length is measured as a model sample of a thin film structure. X-ray scanning microscopic images are derived by diffracted X-ray detection at a crystal plane of (422). A difference in gray level of those images between gate metal and source or drain metal shows a difference of X-ray absorption ratio.

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