巻号一覧
63 巻, 8 号
選択された号の論文の19件中1～19を表示しています
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宮川 豊美, 堀 光平, 伊藤 賢一1997 年 63 巻 8 号 p. 1073-1076
発行日: 1997/08/05
公開日: 2009/06/30
ジャーナル フリーブラシレスDCモータと遊星歯車減速機および光ファイバエンコーダを一体化して, 外径3mm, 5mmのサーボアクチュエータを開発した.トルクと回転数の間, トルクと電流の間の出力特性には線形関係があった.さらに, これらのアクチュエータを用いてマイクロスカラロボットを開発し, 本アクチュエータはマイクロマシンなどの駆動源として有用であることを確認した.
アクチュエータのさらなる高トルク化を図るために, モータの高出力化と減速機の高減速比が課題である.今後はこれらの課題を解決し, 発電プラントの配管内のような狭い場所を点検する移動ロボットの駆動源として応用範囲を広げていく.抄録全体を表示PDF形式でダウンロード (1137K) -
持田 英樹, 内海 敬三1997 年 63 巻 8 号 p. 1077-1080
発行日: 1997/08/05
公開日: 2009/06/30
ジャーナル フリー以上述べたように, マイクロFF加工およびHYPER 5は, 最近需要が増えている精密金型加工の生産性を飛躍的に向上させる新たな加工法 (加工技術, 加工機械) である.また, この加工法は, 精密加工分野の生産性を高めるだけでなく, 一般の切削加工の進歩に共通する基本技術であり, さらに広い加工分野に適用されることを期待する.抄録全体を表示PDF形式でダウンロード (1129K) -
徳永 仁史, 田中 文基, 岸浪 建史1997 年 63 巻 8 号 p. 1081-1085
発行日: 1997/08/05
公開日: 2009/06/30
ジャーナル フリー部品の幾何要素間の接合関係に基づいて, 組立品の運動可能領域を導出することが可能な組立品の機構モデルを提案することを目的として, 以下のことを行った.
(1) 位置と姿勢の範囲を考慮した幾何要素間の接触拘束の配位空間における表現方法を示した.
(2) それら接触拘束の表現を多部品の組立品に対して拡張した.
(3) 組立晶の運動可能領域を導出するために拘束問関係の表現方法を提案した.
(4) 提案した組立品の機構モデルを機構解析に対して適用し, 本手法の有効性を確認した.
今後は, 導出された運動可能領域から機構の自由度をチェックする手法の提案, より効率的な計算のための拘束数削減法の提案, 形状誤差を伴う機構への拡張等が, 課題として考えられる.抄録全体を表示PDF形式でダウンロード (990K) -
乾 正知, 金田 光広1997 年 63 巻 8 号 p. 1086-1090
発行日: 1997/08/05
公開日: 2009/06/30
ジャーナル フリー本論文では, 公差に起因する組立品の位置姿勢の曖昧さを, 配位空間を用いて解析する新しい手法を説明した.この手法は, 公差が指示された2部品の配位空間中で, 公差が許容する実部品が非相貫条件, 接触条件, 最適化条件を満足し得る部分空間を算出することで公差解析をおこなう.公差に起因する位置姿勢の変動は, ごく微小と考えられる.この性質を利用して, 組立てられた二つの多面体部品の相対的な位置姿勢の変動範囲を, 線形不等式の解の積集合が定める幾つかの凸領域の和として算出する手法を開発した.また手法の有効性を検証するために, 2次元多角形からなる組立品の公差解析をおこなうプログラムを作成し, 計算実験をおこなった.現在3次元多面体からなる組立品の, 公差解析をおこなうプログラムを作成中である.また曲面を含む組立品を解析するために, 手法の拡張を検討している.本研究は, 科学研究費補助金基盤研究 (C) 課題番号08650307を受けておこなわれた.抄録全体を表示PDF形式でダウンロード (1143K) -
逆格子ベクトルを用いた自動格子計数法明田川 正人, 高田 孝次, 高橋 秀昭1997 年 63 巻 8 号 p. 1091-1095
発行日: 1997/08/05
公開日: 2009/06/30
ジャーナル フリーThis paper presents a method to automatically extract periodic atomic features from scanning tunneling microscopy (STM) images of crystal surfaces and count the number of lattice points. The method is based on the FFT analysis of STM images. Reciprocal lattice vectors of a crystalline lattice are obtained through two dimensional FFT processing the STM image, and, by using the spatial frequency and phase of the obtained reciprocal lattice vectors, the distance between any two points on the STM image is determined with a resolution smaller than the lattice spacing of the crystal. The present method was applied to comparative length measurement using a dual tunneling-unit scanning tunneling microscope (DTU-STM) in which a highly oriented pyrolytic graphite (HOPG) is used as the reference scale. The experimental results have verified the effectiveness of the present method for automatic counting the number of lattice points as well as the possibility for length measurement with a high resolution of sub-nanometer.抄録全体を表示PDF形式でダウンロード (864K) -
フォロアが1次遅れ系の場合小泉 邦雄, 笹木 亮, 佐々木 基文, 岡部 佐規一, 横山 恭男1997 年 63 巻 8 号 p. 1096-1100
発行日: 1997/08/05
公開日: 2010/05/07
ジャーナル フリーVibration with collision has widely utilized on industrial techniques, especially in the fields of impulsive working, impact machining and parts assembly, because its generated impact force has impulsive property, the very high peak and a short impact time. Hence, a tool can easily work with very high level of the force in the working, and parts can be given a positioning of the high accurate resolution to the specified position by the force which can be easily over the maximum friction force and can't move only the short distance according to the short impact time. The impact is generated between an impacter of one degree of freedom vibratory system and the impact follower of the first order lag system with a mass and a damper. The paper deals analytically with characteristics of a steady-state repetitive impact motion which has the period agreed with one of a harmonic excitation force for many industrial utilities. The impulse, impact intensity is proportional to the pressure force level required to support the follower. In the specified condition, the modal of the impacter approaches that of an impact system having a rigidly fixed follower, a wall.抄録全体を表示PDF形式でダウンロード (1052K) -
鈴木 陽子, 近藤 由憲, 花田 武尚, 片桐 祥雅, 板生 清1997 年 63 巻 8 号 p. 1101-1106
発行日: 1997/08/05
公開日: 2010/02/16
ジャーナル フリー光エネルギーを用いて駆動エネルギーをワイヤレス伝達する光ファイバ振動子を構成し, 駆動方法および振動検出方法について実験を行い, 理論解析結果と比較し, 以下の点を明らかにした.
(1) 振動子の振動モード関数の2階微分が最大になる点に光を照射して駆動する時, 振動振幅が最大になる.
(2) 光熱駆動時の振動子先端の振動振幅は, 振動子の縦弾性係数および線膨張係数に比例し, 熱伝導率に反比例する.
(3) 光結合による振動検出条件は, 光ファイバ振動子の駆動を結合効率70%付近で励振し, 振動振幅をできる限り小さくすることである.
(4) 単一モード光ファイバ振動子に, 光ディスクなどに広く用いられている20mWクラスのレーザを用いると10μm程度の励振が可能である.
(5) 以上を総合して光ファイバ振動子系を構成し, 光熱駆動で振動子を励振し, 振動を光結合により検出するというエネルギーと情報の融合した実用性の高い光振動子システムの設計法を示した.抄録全体を表示PDF形式でダウンロード (980K) -
短波長成分のエイリアシング除去の試行原 精一郎, 塚田 忠夫, 笹島 和幸1997 年 63 巻 8 号 p. 1107-1111
発行日: 1997/08/05
公開日: 2009/06/30
ジャーナル フリーSometimes the aliasing effect may change characteristics of surface asperity data which are sampled discretely. In this report, the behaviors of asperity data affected with aliasing are made clear by the simulation using the power law of traced profile of asperities. In general, very small sampling intervals are needed to eliminate the aliasing. As it is not profitable to reduce the sampling interval for aliasing only, the authors present the hybrid low-pass filter composed by both of Gaussian digital filter and analogue one. This new hybrid filter is able to reduce the aliasing and the phase delay even if larger sampling interval is applied. This paper gives the applicable conditions of the hybrid filter for practical use.抄録全体を表示PDF形式でダウンロード (762K) -
伊藤 巧, 舛屋 一弘, 秋山 伸幸1997 年 63 巻 8 号 p. 1112-1116
発行日: 1997/08/05
公開日: 2009/06/30
ジャーナル フリーSmall particles (approximately larger than 1μ, m) adhered on to TFT-LCD (Thin Film Transistor-Liquid Crystal Display) plates in a production process cause the defects in circuit patterns. The particles have been detected strictly in a production process by employing automatic inspection systems. But, the small particles on a transparent conductive film can not be detected by conventional automatic inspection machines. In this development, the TFT-LCD plate is illuminated by a laser diode obliquely. The technology to detect the particles larger than 1μm diameter by detecting the forward light scattered by particles has been developed. In the experiment, the incident light angle is set to 75°and the detection angle is set to 45°. Experimental results show that the detected output is 12 times as large as the output obtained by the conventional inspection machines.抄録全体を表示PDF形式でダウンロード (753K) -
井上 晴行, 片岡 俊彦, 遠藤 勝義, 押鐘 寧, 森 勇藏, 杉山 和久, 安 弘, 井山 章吾1997 年 63 巻 8 号 p. 1117-1121
発行日: 1997/08/05
公開日: 2009/06/30
ジャーナル フリーThis paper describes a system used for detecting the impurity particles on a bare Si wafer surface in a short time, at a wide area, and with a high reliability. The particles are less than 100 nm in diameter. The wafer is illuminated with CW Ar-ion laser beam (diameter : 100μm, power : 600 mW) at an oblique incident angle. The laser beam scattered by the particles is collected and focused at the direction perpendicular to the wafer surface. In order to achieve a uniform illumination in the whole observation area, the laser beam is scanned over the area. The time-integrated image of the surface is taken by a long-time exposure CCD camera. As a result, 37 nm-particles are observed in the image with the signal-to-noise ratio of 2.4. According to the Rayleigh equation, the noise signal is corresponding to 32 nm-particles.抄録全体を表示PDF形式でダウンロード (1387K) -
張 世宙, 清野 慧, 宇田 豊1997 年 63 巻 8 号 p. 1122-1126
発行日: 1997/08/05
公開日: 2009/06/30
ジャーナル フリーThis paper describes the influence of scanning beam diameter on the angular profile of a polygon mirror. The beam diameter is adjusted to φ2mm, φ3.5mm and φ5mm to obtain two-dimensional angular profile of the polygon mirror surface. The developed system was used to measure a 24-sided polygon mirror (face dimension : 15 X 20mm) and the following results were obtained : (1) The angular profile of the polygon mirror depends on the area of scanned cross section or the diameter of the scanning beam. (2) The difference of the accumulation error obtained by the developed system with the φ5mm beam from that with the conventional measurement method provided by JIS was about 1 s (arc) in RMS. (3) The maximum differences between the dividing error obtained by the developed system with the φ2mm, φ3.5mm and φ5mm beam and that with the conventional measurement method was about ±2.7, ±2.4, ±2.0s (arc) respectively. These results suggest that the conventional measurement method is not robust enough to estimate the accuracy of polygon mirror to be used with a scanning beam having a small diameter.抄録全体を表示PDF形式でダウンロード (816K) -
安達 正明, 川崎 修慈, 大杉 博人, 稲部 勝幸, 八高 隆雄, 大谷 忠, 喜多山 繁1997 年 63 巻 8 号 p. 1127-1128,1163
発行日: 1997/08/05
公開日: 2009/06/30
ジャーナル フリーPDF形式でダウンロード (757K) -
機械変形・熱変形・振動が案内面精度に及ぼす影響水野 貞男, 星野 彰教, 柴田 訓1997 年 63 巻 8 号 p. 1129-1133
発行日: 1997/08/05
公開日: 2009/06/30
ジャーナル フリーIn order to increase accuracy and efficiency for machining mass production parts, it is important that the guideways of machine tools should have small value of mechanical and thermal deformation and high damping effect. The guideways made by resin concrete have an advantage of those points, however, they still need structural reinforcements due to their low mechanical strength. The new guideways made by resin concrete are designed creatively and made, then the comparative experiments are done with the conventional steel welded guideways. The bending and torsional deformation caused by the material's own weight is appeared as accuracy of the guideways, and the maximum deformation obtained is 3.5μm, which is one tenth of the value obtained on the conventional guideways. The damping effect (logarithmic decrement) decreases approximately 23% for the inside damping, however it is 4.2 times for the conventional guideways. The change in the distance between the slide bases decreases approximately 65%, and a thermal deformation is small against room temperature change at mass production. In conclusion, these results show that the use of the resin concrete is effective to improve the accuracy of the guideways.抄録全体を表示PDF形式でダウンロード (1143K) -
原 宣宏, Anthony E. GEE1997 年 63 巻 8 号 p. 1134-1137
発行日: 1997/08/05
公開日: 2009/06/30
ジャーナル フリーGlass-like carbon material has properties suitable for precision parts and indentation tests on samples of the material with a square-based diamond pyramid indenter have been conducted to provide deformation and fracture characteristics. This material was found to be highly elastic-brittle, showing largely elastic deformation at loads lower than 0.1 N. The ratio of plastic-to-elastic deformation is 1-2%, much smaller than in glasses. Cracks were formed at loads of more than 2 N with patterns square and parallel to the edges of the indenter contact area but median and radial cracks (normal crack patterns in brittle materials) were not observed. Using Puttick's equation, the scale of brittle-ductile transition is estimated as tens of nanometres. Sliding indenter tests give lower crack initiation loads than those obtained from the indentation tests.抄録全体を表示PDF形式でダウンロード (11101K) -
炭素鋼への大表面焼入れ法及川 昌志, 山本 博之, 南田 勝宏, 川澄 博通1997 年 63 巻 8 号 p. 1138-1142
発行日: 1997/08/05
公開日: 2010/02/16
ジャーナル フリーThis paper describes of large surface heat treatment method for carbon steel with high power CO2 laser. The main feature of this method is the twin polygon mirror optical system with divided laser beams. This optical system can bring laser beams into line at the surface of specimen. Each laser beam is located at an interval which enable to control heat cycles, such as maximum temperature and cooling rate. The experiments were conducted using a 15kW CO2 laser and also using twin polygon mirror optical system. In this paper results are reported to show large surface hardening layer for carbon steel without annealing. Furthermore this paper reported the results of the simulation model of this new method.抄録全体を表示PDF形式でダウンロード (1217K) -
磁場可変の効果黒部 利次, 山下 勝久, 坂谷 勝明1997 年 63 巻 8 号 p. 1143-1147
発行日: 1997/08/05
公開日: 2009/06/30
ジャーナル フリーMagnetic field-assisted fine polishing method has been proposed, which uses a magnetic slurry mixed non-ferrous abrasives into a magnetic fluid. Polishing machine has newly been developed which is consisted both of copper rotary disc set a strong permanent magnet and a rotary shaft set similar one, it is mounted a specimen to be polished. Magnetic field strength controlled by moving their magnets is responsible for yielding superior surface quality. It is found that polishing machine has high performance finishing ability and the usage of a variety of magnetic fluid is proposed versatile polishing characteristics. Experiments show that kerosene based magnetic fluid has very high polishing performance compared with water based one. The usage of coarse grain gives rise to increase the surface roughnes, and larger clearance between specimen and copper rotary disc lowers finishing rate of wafer in kerosene based magnetic fluid especially. Movement of permanent magnet in copper rotary disc is very effective for finishing of wafer.抄録全体を表示PDF形式でダウンロード (1086K) -
後藤 博史, 池田 正哲, 坂田 稔, 矢田 恒二1997 年 63 巻 8 号 p. 1148-1152
発行日: 1997/08/05
公開日: 2009/06/30
ジャーナル フリー周囲温度の変化による光走査型センサの走査位置検知精度の低下防止と, センサの極限までの小型化を目的として, 小型2次元光走査機構の板ばね部に生じる応力を利用して走査位置を検知する方法を提案し, そのためのピエゾ抵抗素子と反射光検知用のフォトダイオードを2自由度板ばね振動子上にシリコンマイクロマシニングによって一体形成した機能集積化マイクロスキャナを試作し, 基本的な特性について実験により検証した.その結果, 以下のことが明らかとなった.
(1) 振動子板ばね上に一体形成したひとつのピエゾ抵抗素子により, 板ばね表面に発生する曲げとねじりの応力を同時に検出し, 直角2方向の光走査位置を検知する方法を試みた.この方法により位置検知精度の低下は, ±10℃の環境温度変化に対して1%以下となり, 前報で報告した板ばねの共振駆動周波数を利用する方法に比べて, 50倍改善することができた.
(2) 板ばねにピエゾ抵抗素子を一体形成することにより, 曲げ方向26mV/°, ねじり方向21mV/°, の走査位置検知感度と, 0.02°の走査位置検知分解能が得られた.
(3) 試作した外形7mm×7mmのマイクロスキャナは, 最大検出距離200mmまでの物体からの反射光検知, 直角2方向への光走査, および走査位置検知が同時に可能であり, 本スキャナを用いることにより光走査型センサが大幅に小型化できる.抄録全体を表示PDF形式でダウンロード (3634K) -
QスイッチYAGレーザによるドレッシング性能の向上中島 利勝, 大橋 一仁, 八木 大輔1997 年 63 巻 8 号 p. 1153-1157
発行日: 1997/08/05
公開日: 2009/06/30
ジャーナル フリーThe purpose of this study is to establish a new dressing technique of resinoid bond wheel by scanning the point of heat source on wheel surface. Dressing effect with CW YAG laser is testified in previous report. In this paper, Q-switched YAG laser is selected as a dressing tool for making more improvement of dressing effect with YAG laser, and dressing mechanism and grinding characteristics of dressed resinoid bond wheel with Q-switched YAG laser are experimentally discussed by observing the acting wheel surface and analyzing some grinding results with dressed wheel. Furthermore, dressing effect with Q-switched laser is verified by comparing with that with CW laser. Main conclusions obtained in this paper are as follows : (1) Scanning Q-switched YAG laser beam on resinoid bond wheel surface results in better dressing effect than that with CW laser beam. (2) Dressing with Q-switched laser of 2kHz in Q-switch frequency brings out best grinding characteristics of resinoid bond wheel in those of all Q-switch frequency. (3) In lower Q-switch frequency, heat affected structure generated on dressed wheel surface is completely removed as soon as laser beam is irradiated because of radical and frequent variation of heat energy supplied with laser beam.抄録全体を表示PDF形式でダウンロード (1388K) -
石川 憲一, 諏訪部 仁, 畝田 道雄1997 年 63 巻 8 号 p. 1158-1162
発行日: 1997/08/05
公開日: 2009/06/30
ジャーナル フリーWhen mechanical processing like slicing or dicing is made on hard and brittle materials by means of OD-Blade, many problems such as machining efficiency, machining accuracy, machining cost and tool life are pointed out because this method uses fixed diamond grains. However, as it is understood as the most general method for precision cutting, establishment of new machining methods which ensure high efficiency and accuracy is prospective. In this paper, authors contrived a new cutting method applying a low-frequency vibration on the workpiece side during cutting and the vibration direction was vertical (Z-axis direction) to the cutting feed direction (X-axis), and made the characteristics of vibration cutting clear. Not only authors proposed that the contact force was occurred by keeping the contact position between OD-Blade and the workpiece, but also it was found that the contact force depended on an area of contact-arc. Furthermore, as a result of dynamical considerations on the mechanism of vibration cutting between OD-Blade and the workpiece, it was clear that the vibration cutting brought out the decreasing effect of grinding force through decrease of contact force.抄録全体を表示PDF形式でダウンロード (930K)
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