光波コヒーレンス関数の合成法とその応用について述べた.光源のパワースペクトル形状で決まってしまうと考えられていた光波コヒーレンス関数の形状を, 任意に合成することが可能である.これにより, ミリメートルないしサブミリメートルの分解能を持つリフレクトメトリー, および数km遠方での反射光分布を数cmの空間分解能で測定するリフレクトメトリーを実現した.また, この手法を偏波維持光ファイバに適用することにより, 分解能数mで測定範囲キロメートルオーダの光ファイバ分布型センサを構成することも可能であり, その基礎実験結果も示した.今後重要となるスマートストラクチャのセンシング機構として有用であると考えられる.最後に, 光波コヒーレンス関数の合成による並列光情報処理システムを紹介した.光トモグラフィに向けた基礎検討と干渉じまによる面精度解析システムに関する研究成果を述べさせて頂いた.
任意形状のコヒーレンス関数を合成することが可能であり, 今後もコヒーレンス関数の合成法の応用を広げて行きたいと考えている.

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“Virtual Manufacturing” is one of the most effective techniques to make a model of manufacturing systems and simulate manufacturing processes. In this paper, Virtual Shop Floor (VSF) is investigated as a first step to make Virtual Manufacturing Systems. VSF is a computer system which supports designing and operating desirable shop floors in various manufacturing environments. A new concept of Open System Architecture for Virtual Shop Floor (OSAViS) is proposed, in order to make VSF fast enough, so as to be able to follow the changes of a manufacturing environment. OSAViS is an architecture for making a modularized and distributed VSF. The modularization of the system enables us to build the various shop floor models with the combination of various modules. The distributed simulation can be performed fast, because it executes simulations of the shop floor in parallel. In this paper, a basic concept of OSAViS is explained. A model of a shop floor, a way of making each module (named VSF Module), and a framework of a distributed parallel simulation system are investigated.

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本研究では, 3次元測定点群を入力として三角形メッシュを生成する方法について述べた.提案する手法は, 陰関数再構成法と呼ばれるもので測定データにもとついてボクセル空間にポテンシャル場を生成し, そのポテンシャル場の零曲面をマーチングキューブ法によって抽出することにより三角形メッシュを生成する.本研究では, プローブ円柱なる概念を基にして, ボクセル空間をスキャンすることによってポテンシャル場を求める方法を提案した.この方法に基づきプログラムを試作し, 複雑な形状に適用し実現可能性を示した.
さらに, この手法の特徴として, 計算時間が測定点数よりも格子間隔に依存するため, 測定点が多い場合でも妥当な時間で計算できることや, ポテンシャルを計算するときに, いくつかの測定点を集合的に扱うためデータ誤差に鈍感であることが上げられる.また, データ欠損に対しメッシュに穴が空かないというメリットもあることを示した.

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Loading behaviour of the grinding wheel is investigated based on working surface topography. For on-machine measurement of working surface profile, the laser micrometer is directly fitted on the wheel head of CNC surface grinder. Mild steel (S 15 C) easy to load is ground with an aluminum oxide grinding wheel (WA 60 J 7 V). From the comparison of profile and micro-observation of working surface, the following results are obtained : There are two types of loading ; deposition type loading is caused by the chip deposited in the chip pocket and welding type loading is caused by the chip welded on the cutting edge. With the progress of loading, the relative frequency distribution of working surface profile which we newly proposed shows changes in its pattern; firstly whole of the distribution shifts to the plus direction of the amplitude, and secondly the relative frequency of the higher region of the amplitude increases. The shift of the distribution corresponds to the progression of deposition type loading and the profile change of the distribution corresponds to the progression of welding type loading. These changes are distinctive, then qualitative evaluation of the loading is possible.

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Stainless steel pipe with fine hole and long size has recently been needed for the flow line of pure gas and liquid, which is used in the field of precision machinery. Inner wall polishing of the capillary is very difficult by ordinary finishing methods. High speed slurry flow finishing method developed by authors has been proved to have excellent polishing performance, but it has been needed a long time to obtain an acceptable level of surface roughness decrease. In the present study, effect of an annex of the glass beads into the slurry on the efficiency of finishing has been investigated. Experiments show that the medium of the glass beads annexed into the slurry has fine finishing characteristics rather than slurry medium. Surface roughness decreases with slurry flow pass number and its decreasing modes vary due to the property of medium. Optical micrographs of the medium indicate that the glass bead does not crush and not slenderize during finishing processes.

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The present contribution is an attempt of the optimal machine tool control in turning to follow a desired tool position with better surface finish characteristics. In order to evaluate surface finishes during machining, a new simple measuring system has been proposed which uses an optical parallel substrate based on a light reflection technique. A tool position control by the LQI control is designed to reduce the tracking error between the tool and the workpiece surface. For this aim, a compensatory flat tool attached to the specially designed tool servo system is compensated for so that the tracking errors in following a desired tool position are removed. The improvements in surface finish are clarified by the roughness measurement with a stylus instrument.

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A new experimental method of in-process dressing has been conducted by means of water-jet, as well its application investigated in the present study. While the workpiece is difficult to be ground by the surface grinding machine, the high pressure waterjet is supplied to the grinding wheel as a supplementary method. The principle of this method can be simply described as that the waterjet is a kind of processing technique, which is able to strip the chips on the surface of the grinding wheel without damaging it by adjusting the injection pressure and stand-off distance. The dressing effects are examined according to the surface conditions of the grinding wheel and ground workpiece by a surface roughness and profile measuring device and a microscope. Because of the complexity of the interaction influences between the jet pump pressure and the stand-off distance on the dressing results, in this report at fixed stand-off distance condition the effects of the jet pressure on the grinding wheel of CBN #325 and finished surface of Ti6A14V materials have been clarified. From the results of the experiments, it was found that the dressing life time of the grinding wheel and the roughness of the ground material finished surface have been improved distinctly when the injection pressure is 107.1MPa at stand-off distance 20mm. On the other hand much lower pressure will have no influence on dressing results, and much higher one will damage the CBN wheel.

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The present paper proposes a new type of layer manufacturing of micro structural/functional parts using laser sintering. Technical innovation lies in the use of green tape made of micro powder, organic binder and solvents in a process based on conventional selective laser sintering. First, the process architecture is explained to differentiate the proposed method from others, then a feasibility investigation is discussed. Some metal powders, including copper, nickel and steel, have been sintered under various process parameters such as laser beam power, scan speed and scan spacing. Carefully controlling the parameters as well as the repeating deposition and pattern creation produces three-dimensional metal parts on a stainless steel substrate. Strength, density and microstructures are also examined to characterize the sintered parts. The copper object as sintered has a density of 4.5 g/cm³ and a maximum tensile strength of 40 MPa. A hybrid structure of steel and nickel can be fabricated through layering both powder tapes by turns.

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Single crystal silicon is machined with a straight-nosed diamond tool and the fundamental machining characteristics are investigated. By obtaining the critical depth of cut based on a simple geometrical model, the effect of crystalline anisotropy on brittle-ductile transition is studied. A homogeneous smooth surface is obtained by controlling the undeformed chip thickness below the minimum critical depth of cut. The cutting chip morphology and machined surface texture with the variation of undeformed chip thickness are observed. An intermediate cutting mode is found to exist between the ductile mode and the brittle mode. Ductile regime turning with generating continuous ribbon chips is realized at a large tool feed rate. By adopting a diamond tool with chamfered rake face, the machined surface roughness is improved.

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In this study, a new grinding method and a grinding system with the inclined rotational axis of micro grinding wheel were developed. In the previous report, the wheel was formed to a precise columnar shape of 0.8 mm in the diameter by a single crystal diamond truer on the machine. By the developed system, in grinding test of the workpiece of about 0.7 mm radius curvature, the form accuracy of about 0.1 μm P-V and surface roughness of less than 0.03 μ m Ry were obtained. Recent trend is the further micronization of aspherical optical components. Therefore in this report micronizing of aspherical surface was examined by the ultra-high speed grinding spindle of 15 × 10⁴ rpm at the maximum rotational rate and micro wheel of about 0.3 mm in radius curvature. In the grinding test, WC (tungsten carbide) molding die of less than 0.3 mm radius curvature was tested and the form accuracy of about 0.1 μ m P-V was obtained.

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This paper deals with an improvement of the telemetering system for practical use. Large capacity rechargeable battery and power supply regulator are adopted and 22.5 hours continuous measurement is confirmed. Output of the telemetering system with thermocouple hot junction short-circuited to the spindle is fluctuated accompanied by spindle rotation. For this fluctuation the following three procedures are applied and the measurement accuracy of the telemetering system with error less than 0.1°C is confirmed : low-pass filtering, using averaged data of temperature and shortening the length between two contact points of thermocouple hot-junction contacting with the spindle. Also the inner-surface temperature of inner-race of rolling bearing is measured.

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Honing is an abrasive machining process that rounds, smoothes and enlarges bores in end products. It needs, however, a uni-purpose machine tool. Then a honing unit, which can be used on a machining center, has been developed to cut new investment in plants and to automate a honing process. This unit is light and compact, so that it can be inserted in the tool magazine of a machining center. From the experiments on its performance, it is made clear that this unit can produce good degrees of roundness, roughness and cylindricity. A soluble type of coolant can be used in the honing of cast iron. The lead time can be fairly reduced, because a workpiece has not to be unloaded when this apparatus is used. The developed honing unit brings many advantages over the conventional method especially in the case of job shop type of production. The possibility of realizing automation, saving cost and time, is much increased.

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This paper presents a method of machine instruction code generation for multi-axis machine tool instead of the conventional manner. In the present method, each working part of multi-axis machine tool, cutting tool, and fixture are modeled as autonomous components and a mechanical simulation system is constructed by these autonomous components to simulate machining operation for multi-axis machine tool. NC instruction codes are generated by extracting motion of working parts made by performing mechanical simulation system model as the operative closure system served by mutual feedback among autonomous components under the constraints that are relation among working parts, cutting condition between cutting tool and workpiece, and interference with motion of cutting tool. This paper describes the concept of NC instruction code generation by performing mechanical simulation system as the operative closure system proposed in this study and details of evaluators and operators coded into the autonomous component for constructing such mechanical simulation system. Then effectiveness and feasibility of the proposed method has been estimated by performing the simulation and actual machining.

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The paper deals with machinability of boron nitride (BN) added steels. BN has hexagonal system, and the nature is similar to graphite so that it is used for solid lubricant in general. In this study, plain carbon steel S45C and BN added steels, which has also 0.45% carbon content, were machined by P grade and K grade carbide tools and an alumina ceramic tool. In turning the BN added steels, P grade tool had fairly smaller flank wear than that in turning 545C at the cutting speed of over 200 m/min and the effects of the good machinability kept even at the cutting speed of 500 m/min. At the lower cutting speed, however, the wears in turning the BN steel and 545C were almost the same. Furthermore, in the case of K grade carbide tool, the wear in turning the BN steel is almost the same as that in turning the S45C even at higher cutting speed, and the ceramic tool showed the same results as K grade tool.

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The piezo element as a representative displacement type actuator elicits a high-speed response. Recently, there has been much research carried out using this feature. In order to progress the control performance, we previously proposed the motional-mode-based decoupling control scheme for a three-degrees-of-freedom fine-motion stage with piezo elements. In the meantime, we proposed the collocation compensation method to realize the desirable positioning. As is well known, the controlled object on the condition that the actuators and sensors are collocated shows good control performance. Then, it is expected that the motional-mode-based decoupling control together with collocation compensation can realize the good performance all the more. However, this paper shows that the collocation compensation for the above control scheme has an effect on the only difference of the loop-gain for each motional mode. This result is useful for the mechanical design.

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本研究では, ワンステップ位相シフト法をアブラムソン干渉計に適用することによって, 粗面や鏡面をもつ物体の表面形状計測を可能にした.本研究は以下に示す点の実現をおこなった,
(1) 空間フィルタリングにより多重反射の影響を除去する光学系をとることで, 鏡面物体の計測を可能にした.
(2) 新たな位相算出式を提案し, ワンステップ位相シフト法をキャリア周波数変化に対応したものとすることで, 計測の精度をP-V値で2π/11程度に高めた.

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Positioning control with a resolution of nm order is performed using high-power electrostatic linear drive. The authors have developed high-power electrostatic drive called DEMED (Dual Excitation Multiphase Electrostatic Drive). DEMED, espe- cially its linear type, has performed superior dynamic performaces such as a power per weight ratio of 230W/kg and a maximum acceleration of over 100G. In this paper, the first trial of servo control of linear-type DEMED is described. Firstly, the thrust force of DEMED is simply modelled for designing controller and one method of feedback control for single frequency driving method is proposed. Secondly, an electrode position sensor, which is necessary for feedback control, is proposed and fabricated. Finally, high precision positioning control is performed. For the experiments, a linear table which equips an optical linear encoder with a resolu-tion of 6.25nm is fabricated. A linear and stacked type of DEMED is mounted on the linear table. By feeding two different feedback gains depending on the positioning error, positioning control within ±1 pulse (=6.25nm) is achieved.

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A novel method called PDSV, realizing 3-D measurement over a wide range than the original DSV is proposed. The method includes estimation of inclination at the measured point, that of the shape deformation of corresponding region in stereo images and that of variance of error for each variable (intensity change, depth and inclination). As the result of shape reconstruction by using self-estimators, more reliable data can be obtained.

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本研究では, トンネル現象を利用した非接触マイクロ形状測定装置の開発を試み, 測定原理, 装置の構成について述べると共に, 試作装置による測定結果を示し, 本測定手法が有効であることを示した.
主な結果を以下にまとめる.
(1) トンネル現象を利用した非接触マイクロ形状測定装置により微小な表面形状, 穴の内部形状, 段差形状の測定を行い, 本測定法が微細な部品の三次元形状測定に利用できることを示した.
(2) 長焦点顕微鏡画像を併用することにより, 例えば, 微小な穴の内部形状測定で, 探針先端と穴端面との位置関係を正確に認識できることを示し, マイクロ部品形状計測における視覚補助装置として有効に利用できることを示した.
(3) マイクロ型彫り放電加工により製作したX型, X-Z型探針を使用することにより, 穴の内部形状の測定が可能なこと, 段差形状の測定では試料の底面, 側面, 上面を試料の姿勢を変えることなく連続して測定することが可能なことを示した.

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