精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
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74 巻, 6 号
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特集　2007年度（第27回）精密工学会技術賞
受賞業績解説
こぼれ話と苦労話
私の歩んできた道
グラビア
学生記事
解説
研究所・研究室紹介
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論文
  • 変調照明シフトによる超精密加工表面の超解像光学式欠陥計測に関する研究（第2報）
    －定在波照明シフト実験による解像原理の実験的検証－
    臼杵 深, 西岡 宏晃, 高橋 哲, 高増 潔
    2008 年 74 巻 6 号 p. 581-586
    発行日: 2008/06/05
    公開日: 2010/08/15
    DOIhttps://doi.org/10.2493/jjspe.74.581
    ジャーナル フリー
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    Demands for ultra-precision machined surface such as semiconductor wafer are rapidly growing. However, shrinking design rules of the semiconductor reduce process yield in manufacturing line. One of the biggest factors of the reduced yield is a nano-defect on the large area surface, so we must develop a defect measurement system with higher resolving power, throughput, non-destructiveness and robustness. Therefore an optical method with higher resolving power beyond the Rayleigh limit is required. In order to develop an optical inspection system with high resolving power, we have proposed the application of the structured light illumination (SLI) microscopy for the defect measurement of the ultra-precision machined surface. It is expected that the resolving power of the system exceed the Rayleigh limit by the SLI, and the robustness is enhanced by a image reconstruction algorithm using multiple images with shifts of the SLI. In the second report, to verify the resolution property experimentally, we developed the apparatus for the basic experiment and performed the super-resolution experiment using line and space sample. As a result, the sample structures were clearly resolved beyond the Rayleigh limit, and improvement of robustness with redundant shift was experimentally confirmed.
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  • 逐次精密切削加工による試料内部3次元情報取得システムの開発
    古城 直道, 横田 秀夫, 藤崎 和弘, 山形 豊, 小久保 光典, 姫野 龍太郎, 牧野内 昭武, 樋口 俊郎
    2008 年 74 巻 6 号 p. 587-592
    発行日: 2008/06/05
    公開日: 2010/08/15
    DOIhttps://doi.org/10.2493/jjspe.74.587
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    Recent advances in computer-aided engineering technologies need more accurate modelings techniques of three-dimensional shapes, internal structures of manufactures. In this paper, an automated system was newly developed to acquire the three-dimensional information. The system is based on consecutive precision machining and cross-sectional image recording. In the system, face milling by a single crystal diamond tool is used for high precision machining, and an optical microscope is used for cross-sectional image recording. By the system, following results were obtained: (1) Surface roughness of a resin embedded aluminum specimen was approximately 100nm p-v. (2) Two-dimensional color cross-sectional images of the specimen were consecutively recorded from top to bottom. (3) The aluminum was distinguishable from the surrounding resin in those images, and the resin was also distinguishable from air. (4) The aluminum and the resin were three-dimensionally reconstructed respectively from those images, and precise three-dimensional shapes and internal structures were acquired.
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  • 3点法におけるパラメータ算出法および変位計の設置角度の推定に関する新手法
    佐瀬 浩史, 藤巻 研吾, 三井 公之
    2008 年 74 巻 6 号 p. 593-597
    発行日: 2008/06/05
    公開日: 2010/08/15
    DOIhttps://doi.org/10.2493/jjspe.74.593
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    Three-point method is an error separation method for roundness and spindle error measurement. However, there are still some problems for practical use of three-point method. The discrepancy of the measurement sensitivity between three displacement sensors affects the measured result in the specific spatial frequency range. In three-point method, in-situ calibration of displacement sensors are difficult for some sensor angles. So, this paper reports new algorithm to correct measurement sensitivity of displacement sensors and demonstrates the feasibility of the algorithm through numerical simulations and experiments. The algorithm realizes precise roundness and spindle error measurement. This result show that the algorithm correct the difference of the measurement sensitivity to less than 2 %. And the algorithm applied to measurement of sensor angles also.
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  • 磁石吸着型配管検査ロボットにおける磁石車輪と駆動系の設計
    湯川 俊浩, 岡野 秀晴
    2008 年 74 巻 6 号 p. 598-603
    発行日: 2008/06/05
    公開日: 2010/08/15
    DOIhttps://doi.org/10.2493/jjspe.74.598
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    We develop a robot that can automatically inspect pipes from the outside of the complicated piping in oil plants, etc. Our robots move by means of magnetic wheels. The natural rubber is used to generate friction against the piping. The robot consists of a lift part, a drive part, a motor for lifting a drive part, and a motor for driving a magnetic wheel. The drive part rises and descends through the rack gear when the motor installed in the lift part turns. The robot composed of three connected units is able to move along the horizontal piping, move along the lower side of straight piping, rise along vertical piping, and traverse a flange connecting two pipes, while holding the stability of the robot's posture. Next, we derive the adhesion condition suitable to horizontal/vertical pipes, the condition to detach from the piping, and the degree of adhesion of the magnetic wheel. Then we measure the power of the lift motor necessary for the robot to part from the piping, and we select the driving motor for rising along the vertical piping.
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  • 既知のかたよりを補正しない場合の不確かさ評価に関する一考察
    －ブロックゲージ比較測定法を例として－
    尾藤 洋一, 榎原 研正
    2008 年 74 巻 6 号 p. 604-610
    発行日: 2008/06/05
    公開日: 2010/08/15
    DOIhttps://doi.org/10.2493/jjspe.74.604
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    We consider an uncertainty evaluation method with uncorrected deflection. In the real uncertainty evaluation, there are a lot of cases which do not correct the deflection and this deflection is simply added to the total uncertainty in the conventional evaluation method. In contrast, we clarify the uncertainty evaluation method with uncorrected deflection along a way of thinking of GUM. The conventional uncertainty evaluation method is overestimated compared with that along a way of thinking of GUM.
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  • ナノシートのAFMプローブによる機械的微細除去加工（第2報）
    一高精度溝加工機構と最適加工条件の検討ー
    坂井 高雅, 川上 嘉輝, 出村 和哉, 井原 透
    2008 年 74 巻 6 号 p. 611-615
    発行日: 2008/06/05
    公開日: 2010/08/15
    DOIhttps://doi.org/10.2493/jjspe.74.611
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    This paper presents nano processing mechanism of nano-sheet with Atomic Force Microscope (AFM). The nano-sheet is structured potassium niobates with 2 nm of thickness, and the anisotropy in the direction of 90° existed on the nano-sheet surface is figured out from the experiments. This anisotropy is a huge influence in production to high accuracy of the shape and size with nano-sheet processing. This processing characteristic is investigated from Hertzian contact theory and processing energy. Taking account of the anisotropy, experiments are also examined for the optimal processing condition. The FFT analysis from Lateral Force Microscope (LFM) shows processing force appeared periodically and the increasing of frequency period is occurred by increasing of processing load. The nano processing mechanism is performed the instability when the processing force is weakly and short frequency. Next, the groove processing is conducted in order to prove these mechanisms and it became clear that groove width is spreaded because load and coarseness is increased. The stability processing region of the minimum load for groove processing approximately equal to around 800 nN from our experiments. Finally, the high precision groove processing with 28 nm of maximum width is attained by using this processing condition.
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  • 摩擦力を考慮した円弧補間運動の実時間逆伝達関数制御
    海野 徹, 森本 喜隆, 市田 良夫, 佐藤 隆之介
    2008 年 74 巻 6 号 p. 616-621
    発行日: 2008/06/05
    公開日: 2010/08/15
    DOIhttps://doi.org/10.2493/jjspe.74.616
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    The real-time inverse transfer function method is realized by the real-time compensation of positioning as the second regression function. The stick motion is suppressed 50% of trajectory error of the conventional PID control without identifying the parameters previously. However, the suppression of stick motion was not enough because the friction force at quadrant motion is not considered directly. In this report, we have developed a new experimental system based on the friction force measurement and analysis. The friction correction is applied to a real-time inverse transfer functional method considering the dynamic behavior of the friction. In the experimental results obtained by our method, the peak values of the stick motion are decreased 65.3% on average. In the contoured profile of the workpiece by our method, the stick motions almost despair.
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  • 微小変位領域の摩擦特性を考慮した象限突起補償器
    佐藤 隆太, 寺島 義道, 堤 正臣
    2008 年 74 巻 6 号 p. 622-626
    発行日: 2008/06/05
    公開日: 2010/08/15
    DOIhttps://doi.org/10.2493/jjspe.74.622
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    This paper proposes a friction compensator based on the friction characteristics in the microscopic displacement region. In order to evaluate the motion accuracy of feed drive systems for the NC machine tools, circular tests are generally applied. It is known that the large quadrant glitches are often observed on the circular trajectories, and it is caused by the friction forces of the mechanism. In this paper, the relationship between table displacement and total friction torque around the motor axis is modeled by a simple friction model which can accurately estimate the behavior of the friction torque. The proposed friction model is a function of the table displacement, not a function of velocity. Based on the friction model, a friction compensator is invented. The proposed friction compensator consists of a table position estimator, an inverse transfer function of the servo motor, and the friction model. From the experimental and simulation results, it is clarified that the quadrant glitches can be effectively eliminated by the proposed friction compensator, even if the radius and feed rate of circular motion change.
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  • マイクロNi-W電着ダイヤモンド工具の製作と脆性材料の溝加工への適用
    －工具品質および加工性能の向上－
    鬼鞍 宏猷, 大西 修, 西原 邦男, 郭 韋辰
    2008 年 74 巻 6 号 p. 627-631
    発行日: 2008/06/05
    公開日: 2010/08/15
    DOIhttps://doi.org/10.2493/jjspe.74.627
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    The present paper intends to improve the tool quality and the machining performance of micro cylindrical Ni-W electroplated diamond tools. From the grooving tests of silicon the following results were obtained. The scatter of diamond grit density on the tool surface can be prevented through the intermittent pouring of electroplating solution into the solution with grit supported by a filter. Ni strike plating before electroplating is useful for extending the tool life, but it can result in the degradation of roughness on groove side surface. Tool wear may result from the removal of bond material due to generated chip and dropped diamond grit, therefore the usage of harder bond material and the heat treatment of bond material are recommended. For a constant tool diameter there exists a suitable grit diameter from the viewpoint of machining efficiency and groove roughness. In grooving of quartz glass, chippings of 10-20μm may occur on the groove edges, which can be prevented by the application of axial ultrasonic vibration to the tool.
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  • テーブルチルト型5軸制御工作機械によるテーパコーン加工精度
    松下 哲也, 沖 忠洋, 松原 厚
    2008 年 74 巻 6 号 p. 632-636
    発行日: 2008/06/05
    公開日: 2010/08/15
    DOIhttps://doi.org/10.2493/jjspe.74.632
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    The cone frustum machining test prescribed in NAS979 is only one method that is used in world wide to evaluate the machining accuracy of five-axis machine tools. The issue is that the test parameters are not defined in the machining by using five-axis machine tools with tilting table. The motion of each axis depends on the location of a workpiece, and the workpiece location is an important factor for the evaluation. In this paper, the influence of the workpiece location for five-axis machine tools with tilting table is analyzed, and it is shown that the accuracy of machined cone frustum varies due to the workpiece location and the influence of the geometric errors in the five-axis machine tool. The proper location to evaluate the geometric errors is also proposed.
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  • 作業時間の確率変動を考慮したTOC スケジューリング
    倉重 賢治, 江尻 将之, 亀山 嘉正
    2008 年 74 巻 6 号 p. 637-642
    発行日: 2008/06/05
    公開日: 2010/08/15
    DOIhttps://doi.org/10.2493/jjspe.74.637
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    TOC (Theory of Constraints) is well known as the management theory that pays attention to the bottleneck resource. There are many papers that discuss the about TOC. At the production management, TOC scheduling aims to use bottleneck machine effectually. Many scheduling methods are match for flow shop problems. One scheduling method has been extended in order to apply the job shop problem that the objective function is minimization the make span. However, the operations time are determined, there are some case that operations time are variable in real production situation. Therefore, in this paper, we consider a statistical change of the operation times. The method has three important steps. Firstly, the bottleneck machine is searched. Secondly, drum schedule (operation sequence on the bottleneck machine) is decided. Thirdly, other machines schedules are decided by following the drum schedule. Moreover, we show the efficiency of our proposal methods and describe about influence of many conditions by numerical experiments.
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