Chemical-mechanical polishing (CMP) has been elevated to the forefront of the enabling technology required in a copper (Cu) damascene manufacturing process. Nevertheless, ongoing research and development is necessary in order to meet the requirements for future device generations. In this paper a topography investigation after copper and barrier metal CMP for Cu damascene interconnect with cap-SiO structure, is presented. The procedure is applied to five different selectivity of barrier metal slurry to compare after barrier CMP topography and electrical performance. As a result, a selectivity of Cu/Ta(tantalum)/SiO/SiOC(silicon oxycarbide) (0.6/1/0.8/0.6) had a better topography correction in barrier metal CMP and reduced short circuit failures on the upper interconnection. Furthermore, optimal direct CMP process on a SiOC film to mitigate the degradation of line-to-line insulating reliability such as time-dependent dielectric breakdown (TDDB) lifetime in SiOC/Cu structure is discussed.

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In wire electrical discharge machining (WEDM), it is necessary to control the wire orientation accurately. However, the control is difficult because of the complex behavior of the wire during cutting caused by bubble expansion, electrostatic force and electromagnetic force. Therefore, it is important to measure the deflection and vibration of the wire in-process and to predict the machined surface shape. This paper describes the in-process measurement of the wire behavior using a sensor newly developed. The surface shape predicted from the wire behavior coincided well with the surface shape measured after machining.

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It is necessary to develop a high-aspect-ratio microdrill method with a diameter of 0.2mm and a depth of 4mm (aspect ratio 20) that can be applied to the fuel injection nozzle of a marine diesel engine. However, the injection nozzle is made of cobalt-based superalloy, which is a difficult-to-cut material. In this study, the drilling conditions from viewpoints of thrust force and torque for the cobalt-based superalloy are determined. In addition, a thinning machine is developed for the convenient precise thinning of the microdrill. The effects of the thinning of the microdrill are verified to measure thrust force and torque during drilling. The following results are obtained. The thinning of the microdrill with a diameter of 0.2mm results in a reduction in thrust force by 20% and that in chip adherence to the drill by 25% during drilling.

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The phenomenon which a bolt rotates by rotation of a nut in tightening is examined analytically and experimentally. The friction torque of the bolt head is analyzed, and the expression of relations of a coefficient of friction between threads and coefficient of friction between bearing surfaces for a bolt not to rotate in the bolt- nut joint is shown. The validity of the expression of relations is confirmed by some experiments. The bolt rotates, when the friction torque of the bolt head is small compared with torque on fitted portion of threads.

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The microfactory is proposed as a compact production system intended for a small precise parts. The use of downsized machines for small parts is effective to decrease energy consumption and a space occupation. The micro CNC precision lathe for the achievement of the microfactory has been developed. The development concept of the micro CNC precision lathe is miniaturization, high accuracy, simplification of installation and operation. The micro CNC precision lathe developed first is a postcard size. This can put out ordinary accuracy for a precise lathe to a plane material. Next, the CNC precision lathe of the developed A4 size enables a more efficient, more flexible cutting. An enough effect for the micro factory achievement can be expected of these micro CNC precision lathes. This paper describes development process of these micro CNC precision lathes.

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This paper deals with the influence of viscosity of oil on flank wear, crater wear and finished surface roughness with minimal quantity lubrication (MQL) system, when using an (Al,Ti)N fully coated tool in hobbing. Experiments were carried out using a fly tool. The results obtained are summarized as follows. (1) The flank wear and the crater wear increased with an increase in viscosity of oil in the range from 19.1 mm²/s to 24.2 mm²/s, and since then, they decrease with increasing in the viscosity from 24.2 mm²/s to 47.6 mm²/s. The flank wear obtained with the oil having viscosity of 19.1 mm²/s is smaller than that obtained by dry cutting. (2) All the oils tested decreased finished surface roughness in comparison with dry cutting. (3) From the viewpoints of the primary performance such as tool wear and finished surface roughness, and the secondary performance of the oxidation stability, the oil having low viscosity of 19.1 mm²/s showed the best performance within the range of viscosity of the oil tested.

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This study deals with two types of thermal deformation of ultraprecision machine tool equipped with oil-lubricated hydrostatic bearings; one is caused by temperature fluctuation in the supply lubricating oil and the other which have not yet been investigated is caused by hydrostatic pressure fluctuation. First, it was experimentally found that such thermal deformation. Second, as a method to minimize such thermal deformation, the highprecision regulator was proposed, which could precisely control the temperature and pressure of the supply lubricating oil, and experimentally evaluated the effectiveness of this method. As the experimental result, this method showed that temperature fluctuation of the ultraprecision machine tool can be restricted to the order of a ten-thousandth of a degree C, and that thermal deformation can be restricted to within several nanometers.

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In the field of an accurate positioning system, an active isolation system is generally used. Especially, it is an indispensable unit in the system which is required a highly accurate isolation performance from outside in the semiconductor lithograph machine. In a present lithograph manufacturing machine, the scanning type is a main current, and the wafer stage can be freely moved in the direction of XY of two degrees-of-freedom, and reticle stage can be moved in only Y direction. At this time, the inclination is caused as proportional to movable stroke of the stage.
In this paper, the inclination of the main body structure is corrected by driving the voice coil motor which is prepared for with the air spring based on the location information of the stage to achieve the throughput improvement as the production unit. However, driving resolution and accuracy of the air spring are lower than that of VCM. In addition, the air response to the feedforward input for the inclination compensation is greatly late compared with VCM. Therefore, it is thought that the inclination compensation by using VCM rather than air is excellent from the standpoint of the improvement of the total machine accuracy such as decreases of heat generations by stage driving motor and fluctuation of the interferometer.

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A solid model representing a product requires filleting or blending, which rounds a specified edge or vertex, in order to make a production model for manufacturing purpose such as mould die model. Many research algorithms for blending have been proposed and commercial CAD/CAM system vendors have implemented blend functions for their systems, however, the practicing users of CAD/CAM systems in the manufacturing industry are suffering from the inability of current blending functions, such as some “holes” in the solid models because of the failure of the blending. It is regarded that the current major solid model structure, the Boundary-Representation (B-rep) lacks the sufficient structure for making robust blending surfaces. In this research, several additional conditions for the B-rep that includes “extended surfaces” that make the blending algorithm simple and robust are proposed. In this report, it is shown that the proposed conditions are effective in the general termination case of edge blending. It is also shown that proposed approach can be applicable to the face-edge blending problem and global blending problem. Several examples are shown to verify the effectiveness of the proposal.

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It is important to evaluate the effective life of an artificial joint. The sliding test with a joint simulator is applied to evaluate of the life of an artificial joint. However, the sliding test with a joint simulator requires high cost and easier sliding test method for evaluation of the life is required. A pin-on-plate test method with 1 axis and a pin-on-plate test method are easy, but insufficient to evaluate the life of an artificial joint. Then, in this study, 2 axes pin-on-plate method was proposed for evaluation of the life of an artificial joint. Furthermore, the effective life of an artificial joint was estimated from the amount of UHMWPE wear.

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Large molds with very deep shape are used in producing plastic parts such as bumpers and inner panels of automobiles. In order to realize the precise and stable machining of the deep mold, 3-axis milling with inclined cutters is often applied in Japanese manufactures. Some machining regions are difficult to process with a cutter in a single orientation. Such regions must be subdivided into several smaller regions, so that each region can be processed with a single orientation cutter. The authors propose a new algorithm for automatically subdividing a machining region. A machining region is represented as a set of points covering the region. For each point, all accessible directions of a cutter are computed. Points are then classified into some groups based on the distribution pattern of accessible directions using our improved cluster analysis method. The classification result corresponds to the milling region subdivision.

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The “active flexible fixture (AFLEF)” on plane level is an active and practical fixture, which can fix any work rigidly and position the fixed work at a few millimeters to correct the position error after gripping on plane level. This paper describes the application of the AFLEF to an assembly. We have combined the AFLEF and a 1-DOF inserting device with the RCC device, which controls a peg only to go down vertically, into a new assembly system for the assembly. However, there are two problems to realize it. One problem is the modification of the “incomplete contact” to the “complete contact” between a polygonal work and each contact-tip of the AFLEF. When four contact-tips of it grip the work, it is very rare that the plane contact is complete at all contact positions because of a rubber-slab and a free joint in the contact-tip. In this paper, we present the modification by using two touch sensors equipped each contact-tip with at both ends of it. Another problem is the method of positioning of a hole-work to the insertion point. Generally, the work is controlled with feedback from position sensor like vision sensor. However, we propose another method needing no vision sensor and taking advantage of the characteristic of the AFLEF in this paper. Therefore, in order to confirm the effectiveness of our proposing modifications of the contact condition and the holework's position, we have tried a peg-in-hole task with the assembly system at twenty times. As results of these trials, although it took a little long time to finish a task, all trials have been realized without failure.

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Power assist devices are broadening their range of application remarkably. According to that, these devices will expand the number of users, and will be casually used tools, which are sometimes shared in a group. In such a situation users must require a function of switching personal settings. Fortunately the power assist devices are able to observe difference of users' way of maneuvering, and it may enable to distinguish users. On these premises, this paper propose online personal identification through power assist operation behaviors. This paper examined the proposal on a setup with Skill Assist, a power assist device designed for car-production industries. The online identification method could identify the users at available short time in this experiment. By using the identification method, users can immediately obtain personalized maneuverability without performing any special authentication procedures.

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