精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
60 巻, 5 号
選択された号の論文の25件中1~25を表示しています
  • 白樫 高洋
    1994 年 60 巻 5 号 p. 611-613
    発行日: 1994/05/05
    公開日: 2009/06/30
    ジャーナル フリー
  • 前川 克廣, 白樫 高洋
    1994 年 60 巻 5 号 p. 614-619
    発行日: 1994/05/05
    公開日: 2010/02/16
    ジャーナル フリー
  • 広田 明彦, 真鍋 圭司
    1994 年 60 巻 5 号 p. 620-624
    発行日: 1994/05/05
    公開日: 2010/02/16
    ジャーナル フリー
  • 北川 武揚, 上田 完次
    1994 年 60 巻 5 号 p. 625-630
    発行日: 1994/05/05
    公開日: 2009/06/30
    ジャーナル フリー
  • 島田 富夫, 遠藤 篤
    1994 年 60 巻 5 号 p. 631-635
    発行日: 1994/05/05
    公開日: 2009/06/30
    ジャーナル フリー
  • 是田 規之, 江川 庸夫
    1994 年 60 巻 5 号 p. 636-640
    発行日: 1994/05/05
    公開日: 2009/06/30
    ジャーナル フリー
  • 帯川 利之, 松村 隆
    1994 年 60 巻 5 号 p. 641-646
    発行日: 1994/05/05
    公開日: 2009/06/30
    ジャーナル フリー
  • 高浜 逸郎
    1994 年 60 巻 5 号 p. 647-651
    発行日: 1994/05/05
    公開日: 2009/06/30
    ジャーナル フリー
    It is difficult to obtain simultaneously functions of easy walking and stability standing in a design of prosthesis foot. The former is always omitted in the most of conventional one. A design of prosthesis foot that has these functions and device for changing heel height was proposed. Furthermore, the rubber spring device was provided to give an action of ankle joint. The results of field trial show that both of below knees amputee can run, walk a slope and stairs and used the high heel shoes.
  • 是田 規之, 陣野 和男, 六角 正, 水田 桂司, 渡部 健
    1994 年 60 巻 5 号 p. 652-656
    発行日: 1994/05/05
    公開日: 2009/06/30
    ジャーナル フリー
    The thermoelectric cooling method for the main spindle of a machine tool is proposed in the study. The experimental results show that the thermoelectric cooling method contributes to decrease the temperature at many different places of the spindle considerably more than that of the jacket and also to reduce the thermal displacement of the spindle. These results are confirmed analytically by use of the finite element method. The analytical results show also that smaller temperature difference between the jacket and spindle causes increase of preload at the spindle bearing at very high spindle rotation and its slight decrease at low spindle rotation. This suggest the possibility of very high spindle rotation which is also proved experimentally.
  • 市古 修身, 浜田 直也, 南田 勝宏
    1994 年 60 巻 5 号 p. 657-661
    発行日: 1994/05/05
    公開日: 2009/06/30
    ジャーナル フリー
    A new optical system for controlling spatial profile of laser beam has been developed. The principle of the system controls independently transverse and longitudinal diameters of the laser beam. The system consists of cylindrical mirrors and integration mirrors which focus the beam in directions perpendicularly intersecting with each other. In order to investigate the focusing property of the optical system, a calculating model for predicting beam paths through the optical system has beendeveloped using the ray tracing method. According to the model, three typical optical systems for a line shape focused beam have been designed-(1), two cylindrical mirrors, (2) one cylindrical mirror and one integration mirror, and (3) one cylindrical mirror and one integration mirror with convex segments. After laser heating experiments of steel by using these optical systems, it has been proved that they are useful in actual industrial applications.
  • 露光光学系誤差の補正
    東木 達彦
    1994 年 60 巻 5 号 p. 662-666
    発行日: 1994/05/05
    公開日: 2009/06/30
    ジャーナル フリー
    This paper describes studies on the overlay error budgets caused by an illumination optical system for an excimer laser aligner using TTL (through the lens) alignment. Illumination errors, such as chip rotation, magnification, trapezoid, and distortion have been analyzed and estimated. It was demonstrated that the total error of the illumination optical system was required to be better than 0.035 μm to satisfy the positioning strategy for a 0.05 μm(3σ) overlay accuracy. Several compensation methods using global alignment, a reticle stage, and a Z-tilt sensor have been developed and adopted to the aligner to reduce these overlay errors. As a result, it was obtained experimentally that the total overlay error of the illumination optical system satisfied better than 0.035 μm.Moreover, the excimer laser aligner showed excellent performances with a better than 0.03 μm(3σ) overlay accuracy.
  • 朴 勇進, 高野 政晴, 佐々木 健
    1994 年 60 巻 5 号 p. 667-672
    発行日: 1994/05/05
    公開日: 2009/06/30
    ジャーナル フリー
    In PTP motion of a robot, usually the velocity at the destination is assumed to be zero and the time is not specified explicitly. However, there are situations where time and even velocity must be specified explicitly at the desired position. Such control will be called state-to-state(STS) control. Althouth this can be attained by CP motion, continuous control along the specified trajectory impedes fast motion. In this paper, STS control is applied to a SCARA type robot to achieve juggling with two balls, where tossing and catching correspond to the two states. Furthermore, real-time learning control is incorporated with STS control in order to cope with variation in time, position and velocity of tossing and catching. More than ten consecutive juggling has been achieved successfully.
  • 杉原 和佳, 赤間 善昭, 西村 英二, 酒井 明
    1994 年 60 巻 5 号 p. 673-677
    発行日: 1994/05/05
    公開日: 2010/02/16
    ジャーナル フリー
    EBDを利用したAFM用探針の作製法について実験的な検討が行われ,EBD探針付きのカンチレバーが取り付けられたAFMを使い,EBD探針の効果がライン・アンド・スペースパターンの観察を通して検証された.得られた結果を以下に要約する.
    (1)SEMの真空容器内での残留ガス分子が電子ビームによって励起分解されることにより生じるカーボンコンタミネーションを積極的に利用して,高いアスペクト比の起伏を有するマクロな表面の測定に適した探針の作製法が開発された.
    (2)EBDを利用した探針作製法を用いると,針幹直径0.1μm以下,先端の曲率半径0.05μm以下で,下地材との密着性に優れ,長さ数μm以上のAFM用探針を作製することができる.
    (3)EBD探針を使ったAFM実験を通して,EBD探針は従来の探針を使った場合に比べて高アスペクト比の凹凸形状をより正確にイメージングできることが確認された.
  • シミュレーションと実験
    趙 南圭, 塚田 忠夫, 高橋 正明
    1994 年 60 巻 5 号 p. 678-682
    発行日: 1994/05/05
    公開日: 2009/06/30
    ジャーナル フリー
    In this paper, the method I is compared with the method II. The method I is developed in the 1st report to control surface orientation by using two measuring lines perpendicular to each other and the method II by two parallel measuring lines. The results are as follows. (1)The measuring length for control data in the method I increases for anisotropic rough surface under the condition that the angle between measuring direction and lay orientation of asperities is less than 15°. (2)The measuring length for control data in the method II decreases as the coefficient k2 depending on a stylus speed decreases. (3)Both of the measuring length and the objective function showing measuring time in the method II are shorter than those in the method I for isotropic and anisotropic rough surfaces. Finally, the method II is better technique than the method I.
  • 野村 昇, 須藤 徹也, 野口 豊生
    1994 年 60 巻 5 号 p. 683-687
    発行日: 1994/05/05
    公開日: 2010/02/16
    ジャーナル フリー
    A method is proposed for compensation of fluctuations in scanning speed of surface profile curves of ground parts. In the measuring of machined surfaces with the stylus method, the scanning speed of a stylus for the measurement of machine surfaces can fluctuate and the observed curves inevitably have errors in the scanning direction. This is not fatal in analysis of a single curve, however, in three dimensional analysis using plural curves, the existence of these fluctuations is critical. Compensation of the scanning length is required, in this case, to characterize machined surfaces. The method proposed identifies the positions on a profile which were formed by same abrasives, and enable the fluctuated profile curves to be used for effective three dimensional analysis. The identification of shapes formed by a same abrasive is important to analyze the behavior of abrasives on a grinding wheel. The method is based on the concept of minimization of an index function, which is designed to evaluate the differences of a couple of curves. Using this method, periodicity on a ground surface due to rotation of a grinding wheel was isolated, which is not perceptible without compensation.
  • 中村 晋哉, 垣野 義昭
    1994 年 60 巻 5 号 p. 688-692
    発行日: 1994/05/05
    公開日: 2009/06/30
    ジャーナル フリー
    The following deals with the static and dynamic specification of the motor integrated spindle. This spindle unit has a fixed position and constant pressure preload switching mechanism operated using hydraulic pressure. With respect to the static specification, measurement of the static rigidity and natural frequency confirms that preload switching occurs. The performance of the rotating spindle was evaluated using a fixed position preload for low speeds provided high rigidity, while using a constant pressure preload provided sufficient high speed performance. A bench test was carried out to evaluate temperature and runout characteristics and further tests were performed in an actual machining process. Both tests showed that the switching of the spindle's preload provided sufficient performance.
  • 各種結晶方位の工具の摩耗
    上神 謙次郎, 張 光均, 玉村 謙太郎, 若林 三記夫, 森元 時夫, 番 義之
    1994 年 60 巻 5 号 p. 693-697
    発行日: 1994/05/05
    公開日: 2009/06/30
    ジャーナル フリー
    Single crystal diamond cutting tools having various crystallographic orientation were prepared. The route of crystallographic orientation between rake and flank faces of these tools were calculated, and illustrated by diagrams of unit triangle zones on the diamond reference sphere represented by Mercator's projection. Magnesium-aluminum and silicon-aluminum alloy as work were cut by these tools, and the tool wears and cutting forces were measured. The following properties became evident after examining the experimental results. The shapes and widths of tool wear and cutting forces varied each others by the crystallographical anisotropy. The measured values were depended on not only the crystallographic orientations of rake and flank faces but also routes between these two faces. The minimum wear and relative small cutting forces took place on the tool whose rake face was identified with the {100} plane and whose inverse direction was coincided with <100> direction. The minimum forces and relative small wear occurred on the tool with {110} plane and <100> direction.
  • 凸形および凹形コーナの仕上がり形状
    平井 聖児, 古川 勇二, 横川 宗彦
    1994 年 60 巻 5 号 p. 698-702
    発行日: 1994/05/05
    公開日: 2009/06/30
    ジャーナル フリー
    In anisotropic etching of single crystal silicon, the combination of covex and concave corner mask patterns are often used, however, these finished profiles are damaged due to an effect of corner etching (unexpected etching at corner mask pattern). The present paper has predicted the accuracy of finished profiles with the corner etching process based on the reaction cage effect theory in the previous paper and proposed a new computer simulation algorithm, by which it became possible to evaluate an effect of compensation mask pattern.
  • 樋口 誠宏, 矢野 章成, 寺濱 幸徳, 南野 広一
    1994 年 60 巻 5 号 p. 703-707
    発行日: 1994/05/05
    公開日: 2009/06/30
    ジャーナル フリー
    A new off-line predicting control system is developed in order to finish the workpiece to the required size accuracy at the desired grinding cycle time. On the basis of the mathematical model of stock removal, the interval regression model of the wheel wear rate or the size generation acceleration and the fuzzy linear programming, the setting parameters of the two plunge speeds grinding cycle are decided. This paper describes the algorithms to obtain the optimum setting parameters, and shows the grinding results which demonstrate the effectiveness of the proposed method.
  • 戸倉 和, 山根 寛, 吉川 昌範
    1994 年 60 巻 5 号 p. 708-712
    発行日: 1994/05/05
    公開日: 2009/06/30
    ジャーナル フリー
    イオンビームスパヅタ法を用いてLa-Ni合金膜を作製し,その成膜過程を観察するとともに,水素ガス雰囲気での挙動について検討した.その結果,次のことを明らかにできた.
    1)La-Ni合金膜は水素吸蔵・放出の機能を有する.
    2)La-Ni合金を被覆したエポキシ樹脂基板を水素吸蔵・放出により変形させることができる.
    3)混合ガス中での変形量は水素分圧に依存する.
  • ビーム制御によるはんだ付の高速化
    村上 光平, 安達 照, 弘田 実保, 林 修, 星之内 進, 阪尾 正義
    1994 年 60 巻 5 号 p. 713-717
    発行日: 1994/05/05
    公開日: 2009/06/30
    ジャーナル フリー
    This paper describes the development of a new laser soldering technique for surface mount assemblies. The new technique, using a focused YAG laser beam, has a superior performance. It can be applied to TCP (Tape Carrier Package) assemblies for fine pitch leads and offers a no-bridge soldering process. A new beam-scanning technique was used to accomplish a high speed soldering process. First, the performance of preheating method was evaluated, and this method proved most effective in TCP assembly. Second, to obtain more flexibility in assembly, the new beam-scanning technique, which provided beam-resting time on pads of PCB (Printed Circuit Board), was investigated. The beam-resting time was determined by theoretical and experimental analysis of solder melting volume. From these results, it was shown that the new laser soldering beam-scanning technique offers the capability to assemble high lead counts and fine pitch leads such as TCP.
  • DBB法による5軸制御工作機械の運動精度の測定
    垣野 義昭, 井原 之敏, 佐藤 浩毅, 大坪 寿
    1994 年 60 巻 5 号 p. 718-722
    発行日: 1994/05/05
    公開日: 2009/06/30
    ジャーナル フリー
    A method to measure the motion accuracy of NC machine with rotary axes was studied by using DBB test device. Recently, the machines, called "5 axis machine", which has some rotary axes on the table or spindle, are used increasingly. First, the rotating error components of the rotary axes are analyzed before DBB measurement. Next, measuring methods for each error components by using DBB test device were studied. Then, these measurements are performed on actual machines. The result shows that the errors which are very difficult to measure without this method, i.e. the mismatch of the loop gain between straight axis and rotary axis, dynamic index error, could be measured with high accuracy and high efficiency.
  • 画像データを用いたニューラルネットワークによる工具寿命の推定
    宅間 正則, 柴坂 敏郎, 山本 暁男, 豊嶋 敏雄
    1994 年 60 巻 5 号 p. 723-727
    発行日: 1994/05/05
    公開日: 2009/06/30
    ジャーナル フリー
    In the advanced manufacturing, it is necessary for the improvement of machining efficiency to select an optimum tool at eachcutting process by tool management. Then, one of the most important issues is to estimate the rest of cutting tool life under a given cutting condition as accurately as possible. In this paper, a structural model based on neural network is proposed to estimate the life and the wear type of cutting tools from their image data and cutting conditions. The input of the model is (1) the states of crater wear and flank wear to cutting tool (e.g. grade of brightness caused by surface roughness, profile), obtained as image data, and (2) the cutting conditions. This system consists of the model based on neural network and image processing device. The output of the system was examined by the experiments under various cutting conditions in turning and the validity of the system was confirmed.
  • 新関 雅俊, 小西 史和, 吉田 誠, 山口 富士夫
    1994 年 60 巻 5 号 p. 728-732
    発行日: 1994/05/05
    公開日: 2009/06/30
    ジャーナル フリー
    本研究では,2重空間で符号付き同次座標ベクトルおよび平面式係数ベクトルを用いて定義される図形どうしの干渉処理を4×4行列式法によって行う方法を確立した.すべての干渉判定は行列式の符号判定によって行われる体系を得ることができた,そのため,従来から指摘されている4×4行列式法の利点を継承している.点,線分,3角形,4面体を符号付き同次座標の考え方によって拡張して得られる新しい種類の図形および平面式係数によって表現される双対図形に関する干渉処理の方法を示した.ここで示す干渉処理には双対性があり,干渉処理の方法もまた双対なものであった.従来のユークリッド空間の図形に関する干渉処理はここで示す理論の一部と考えることができることを示した.ここで示した干渉処理の理論によって同次座標の利点がさらに引き出され,これらの理論によって図形の表示アルゴリズムや有理多項式曲線・曲面の干渉処理アルゴリズムの基礎を得ることができた.ソリッドモデリングの集合演算での干渉処理もまた,ここで示した処理の一部であると考えることができる.この理論は4×4行列式法に基づいて行列式の符号判定だけを利用しているので,これらの干渉処理においては適応的無誤差演算を行うこともできる.
  • 大久保 信行, 福井 要治
    1994 年 60 巻 5 号 p. 733-737
    発行日: 1994/05/05
    公開日: 2009/06/30
    ジャーナル フリー
    The experimental modal analysis is widely utilized to analyze the dynamic behaviors of a complex mechanical system. However in order to find components which contribute largely to the total deformation at specific frequencies, the mode shape animation as a result of conventional modal analysis is not good enough. On the contrary, if a precise finite element model of the system is available, which is very seldom, the strain energy distribution of components gives a good insight which components contribute to the total deformation. This paper describes a practical and simple method based on the results of modal analysis to determine such strain energy distribution. After being verified by a numerical model, the method is applied to simple structures and finally an automobile suspension system to show the effectiveness.
feedback
Top