精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
65 巻, 11 号
選択された号の論文の27件中1~27を表示しています
  • 池田 正幸
    1999 年 65 巻 11 号 p. 1539-1542
    発行日: 1999/11/05
    公開日: 2009/04/10
    ジャーナル フリー
  • 大村 悦二
    1999 年 65 巻 11 号 p. 1543-1546
    発行日: 1999/11/05
    公開日: 2009/04/10
    ジャーナル フリー
  • 木村 盛一郎, 牧野 吉延
    1999 年 65 巻 11 号 p. 1547-1551
    発行日: 1999/11/05
    公開日: 2009/04/10
    ジャーナル フリー
  • 船見 浩司
    1999 年 65 巻 11 号 p. 1552-1555
    発行日: 1999/11/05
    公開日: 2009/04/10
    ジャーナル フリー
  • 黒部 利次
    1999 年 65 巻 11 号 p. 1556-1559
    発行日: 1999/11/05
    公開日: 2009/04/10
    ジャーナル フリー
  • 宮本 勇
    1999 年 65 巻 11 号 p. 1560-1565
    発行日: 1999/11/05
    公開日: 2009/04/10
    ジャーナル フリー
  • 鷲民 邦彦
    1999 年 65 巻 11 号 p. 1566-1569
    発行日: 1999/11/05
    公開日: 2009/04/10
    ジャーナル フリー
  • 植田 憲一
    1999 年 65 巻 11 号 p. 1570-1573
    発行日: 1999/11/05
    公開日: 2009/12/04
    ジャーナル フリー
  • 渡部 武弘
    1999 年 65 巻 11 号 p. 1574-1578
    発行日: 1999/11/05
    公開日: 2009/04/10
    ジャーナル フリー
  • 山田 泰弘, 古村 義彰, 水谷 淳之介, 田辺 郁男
    1999 年 65 巻 11 号 p. 1579-1583
    発行日: 1999/11/05
    公開日: 2009/04/10
    ジャーナル フリー
    With selective assembly based on the combinatorial optimization method, a combination of parts is optimized so that high quality assembled units are obtained in a lot unit at the maximum assembly rate while dimensions of each part are referred to appropriately. The assembly method proposed in this study combines selective assembly based on a combinatorial optimization method with micro-machining so as to produce high precision assembled units. This method is applied to the high precision assembly system where hole parts are combined with shaft parts. Further, micro-machining used for the correction of the dimensions of the shaft parts is taken into consideration during the optimization of the parts combination, and it is attempted to verify the performance by simulation. This system is effective in a small lot production, where higher assembly rates can not be attained with conventional methods, in such that a higher rate is obtained if micro-machining is used alongside. With the combinatorial optimization method for parts where micro-machining is taken into consideration in advance, maximum micro-machining dimension and maximum machining time of the shaft parts can be greatly reduced and the number of assembled units close to the ideal state is increased.
  • 大滝 誠, 伊澤 昌敏, 森重 功一, 浅川 直紀, 竹内 芳美
    1999 年 65 巻 11 号 p. 1584-1588
    発行日: 1999/11/05
    公開日: 2009/04/10
    ジャーナル フリー
    The study deals with X-ray CT technology to inspect the inside parts of workpiece without destroying them. At present, there is few softwares capable of processing X-ray CT scanned data. Therefore, the function was developed to treat the data to evaluate geometric elements such as straight lines, circular arc and others, based on 3-dimensional CAD data as the standard of inspection. After the coordinate system of scanned data is automatically related with the 3-dimensional CAD data, the system evaluates geometric elements considering that a workpiece contour consists of a cluster of segments. Thus, the system cuts the contour of 3-dimensional CAD data on the appointed cross-sectional planes and classifies them into geometric elements. To compare 3-dimensional CAD data with the X-ray CT scanned data, the system calculates the straightness, angle deviation from the direction vector, length and its error of a straight line, and, roundness, deviation of center point, radius and its elTor. In addition, the system offers a visualization interface to display them so that the users utilize the evaluated result comfortably. As a result, the system is found effective to evaluate 2-dimensional geometric elements.
  • 森野 貴, 小野寺 勇人, 高橋 義美, 池田 正幸
    1999 年 65 巻 11 号 p. 1589-1593
    発行日: 1999/11/05
    公開日: 2009/04/10
    ジャーナル フリー
    The purpose of this study is to form nanometer ceramic films without any defects, such as crack or void etc., at room temperature. By means of ArF excimer laser ablation, we were able to deposit various ceramic films thinner than I nm and of smooth surface in an ultra-high vacuum chamber. It was found that the target ceramics were decomposed atoms or ions by the laser beam irradiation and that according to the XPS analysis, films consisted of ceramic molecules were same as those of targets. No defects of the film were confirmed by measuring tunnel current of Fe/Al2O3/Fe junction at liquid N2 temperature. The multilayer film of perovskite structure was obtained by stacking PbO and TiO2 atomic layer alternatively.
  • 分子動力学法を用いた弾性域の一軸引張試験解析
    人見 尚, 森田 昇, 吉田 嘉太郎, 諏訪 好英
    1999 年 65 巻 11 号 p. 1594-1599
    発行日: 1999/11/05
    公開日: 2009/04/10
    ジャーナル フリー
    This report describes simulations of uniaxial tensile tests of single crystal pure iron using molecular dynamics and proposal of new calculation method of Young's modulus of polycrystal pure iron. There is a few experimental data of tensile properties of pure iron.In the simulations, tensile directions are [001], [011] and [111], which are axis of rotational symmetry of bcc-type crystals and temperature conditions are 100K-1100K. As results, we have tensile properties, especially stress-strain diagrams are important..From this, Young's modulus of single crystal pure iron are calculated. Young's modulus are different from tensile directions and tend to lower value in high temperature.We propose new calculation method of Young's modulus of polycrystal iron.It is the average of young's modulus of single crystal pure iron.
  • 回転電極型大気圧プラズマCVD装置の設計・試作
    森 勇藏, 芳井 熊安, 安武 潔, 垣内 弘章, 木山 精一, 樽井 久樹, 堂本 洋一
    1999 年 65 巻 11 号 p. 1600-1604
    発行日: 1999/11/05
    公開日: 2009/04/10
    ジャーナル フリー
    A new technique for high speed a-Si deposition using the atmospheric pressure plasma with the cylindrical rotary electrode was developed. The advantages of using rotary electrode are as follows; 1) the reactant gases can be introduced efficiently into the small gap between the electrode and the substrate and 2) a large rf power can be supplied without thermal damage of the electrode. A 150 MHz VHF power supply was employed to avoid the ion bombardment of the electrode and the substrate. In the consequence of these advantages, high density radicals are produced and high quality amorphous silicon films can be deposited with high growth rate. The silicon films were fabricated in gas mixtures containing helium, hydrogen and monosilane. They were investigated by Raman spectroscopy and scanning electron microscopy (SEM). The results showed that amorphous silicon films with uniform structure were grown on the glass substrates. The maximum deposition rate was 38nm/s, which was extremely faster than those of the previous techniques. It was also found from the SEM obsevation that the thickness of the silicon films were uniform and no particles were observed inside the films.
  • 楕円振動スライシングの加工メカニズムと切断抵抗の挙動について
    石川 憲一, 諏訪 部仁, 畝田 道雄, 倉田 直人
    1999 年 65 巻 11 号 p. 1605-1610
    発行日: 1999/11/05
    公開日: 2009/04/10
    ジャーナル フリー
    ID-Blade sawing is widely used as the slicing method for the semiconductor materials represented the silicon ingot. At present, the size (diameter) of silicon ingot tends to increase, and for example, it changes the slicing method to the multi wire sawing used loose abrasive grains. However, it can be throught that the demand for the ID-Blade sawing is still continuing because of the high precision slicing in this method. This study aims to establish the vibration ID-Blade slicing technique utilizing the elliptical vibration in X-Y plane to improve the slicing efficiency and accuracy furthermore. In this paper, the slicing mechanism of elliptical vibration ID-Blade sawing for the dynamical consideration and the effect of the elliptical vibration on the slicing force are described. As the results, the elliptical vibration slicing can be brought out the decreasing of the slicing force from both theoretical and experimental considerations.
  • アールバイトを用いた3軸制御シェーパ加工による形状創成
    鈴木 浩文, 藤井 一二, 沖野 正, 横山 高士, 小野 孝, 渡邊 昌司, 和嶋 直, 北嶋 孝之, 奥山 繁樹
    1999 年 65 巻 11 号 p. 1611-1616
    発行日: 1999/11/05
    公開日: 2009/04/10
    ジャーナル フリー
    This paper deals with the precision cutting (shaper) of non-axi-symmetric aspherical surface by use of a single crystal diamond tool. At first, the effects of the tool radius error on the workpiece form accuracies and the effects of the tool pickfeed rate on the workpiece surface roughness were simulated and its compensation methods were discussed. And a compensation system for the tool deviation profile was developed, which can compensate the tool path based on the tool deviation profile. The tool deviation profile is calculated from the post-process measured data of the machined workpiece surface profiles. Finally, in the axi-symmetric aspherical cutting tests, the molding dies of brass alloy for plastic lenses were examined. The experimental results show that the workpiece accuracies were improved by this new compensating system.
  • 松村 隆, 村山 孝博, 臼井 英治
    1999 年 65 巻 11 号 p. 1617-1622
    発行日: 1999/11/05
    公開日: 2009/04/10
    ジャーナル フリー
    This paper presents tool wear monitoring in milling process with laser measuring instrument. Flank wear on side cutting edge is monitored by the change of cutter diameter; and that of end cutting edge is monitored by the change of cutter length. Laser measuring instrument measures cutter diameter and height of end edge which rotates during air cutting time. The presented approach which measures edge shape directly is independent of cutting conditions and workpiece shape. The accuracy of tool wear monitoring is verified with the effect of extraneous objects and thermal expansion and that of cutter revolution. The approach can not monitor tool wear all the cutting process and has time loss for measuring. Sequential prediction of tool wear and sequential determination of monitoring interval are discussed to apply the monitoring approach to practical use.
  • 宮内 馨, 森重 功一, 竹内 芳美
    1999 年 65 巻 11 号 p. 1623-1627
    発行日: 1999/11/05
    公開日: 2009/04/10
    ジャーナル フリー
    The study deals with the development of 6-axis control machining by means of ultrasonic vibration. 6-axis control machining, where non-rotational cutting tools are used, has a lot of advantages rather than the conventional one with rotational cutting tools. In machining ductile and soft materials such as aluminum, however, 6-axis control machining often causes the deterioration of surface roughness due to low cutting speed. To solve the problem, the vibrational cutting technology is introduced, which can decrease the cutting force, increase the cutting fluid effect and prevent the generation of built-up edges. In the study, CAM system for 6-axis control vibrational grooving was developed, taking account of the characteristics of vibrational tool. The cutting experiments were conducted to machine V-shaped grooves in a straight line and curved line by use of 6-axis control machining center. As a result, it was confirmed that 6-axis control vibrational machining enables workpieces with high quality to be produced.
  • 田牧 純一, 近藤 和久, 井山 俊郎
    1999 年 65 巻 11 号 p. 1628-1632
    発行日: 1999/11/05
    公開日: 2009/04/10
    ジャーナル フリー
    A hybrid rotary electrode has been developed as a means to realize a precision electrocontact discharge (ECD) dressing of the bronze-bonded diamond grinding wheel. The hybrid electrode consists of paired electrode blades whose gaps are filled with GC abrasive grains to prevent the electric discharge from concentration without an excessively eroded part, and the removal of resolidified bond material to be piled up on the bond matrix is also expected. From the experiments using two electrodes, the hybrid one and a pure electrode without GC abrasives, it has been clarified that the truing effect due to ECD is produced at the DC voltage higher than 20 V in the both methods; however, the hybrid method has an ability to generate a closer wheel surface topography than that obtained from pure ECD method and a finished roughness better than that obtained from the mechanical method using a GC cup truer is achieved if a DC voltage lower than 40 V is applied. The wear of the grinding wheel after hybrid ECDD is the same as that after pure ECDD, but no increase in power due to undesirable contact of the metal bond with the workpiece is observed.
  • YAGレーザの総形ドレッシングへの適用
    中島 利勝, 大橋 一仁, 川崎 真一, 濱野 泰幸
    1999 年 65 巻 11 号 p. 1633-1638
    発行日: 1999/11/05
    公開日: 2009/04/10
    ジャーナル フリー
    Form dressing of V-formed resinoid bond wheel by scanning a Q-switched YAG laser beam on the wheel surface is carried out and the form dressing mechanism is experimentally investigated by analyzing initial profile of dressed wheel, variation of wheel tip profile in form grinding process, density and height of cutting edge and so on, comparing with those by a traditional dressing with PVA wheel. Main conclusions obtained in this paper are as follows; (1) Scanning YAG laser beam on V-formed resinoid bond wheel surface results in the better form dressing effect concerning form accuracy or projecting height of cutting edge than a traditional dressing with PVA wheel. (2) Radius of wheel tip decreases with increasing peripheral wheel speed in form dressing because a heat effect on wheel surface by laser beam decreases with an increase of peripheral wheel speed. (3) Laser dressing of V-formed wheel at higher peripheral wheel speed represses a reduction of form accuracy in form grinding process. (4) Radius of dressed wheel tip increases with increasing formed angle and is much affected at larger formed angle by peripheral wheel speed in laser dressing.
  • メタルドットの結合力の測定
    山口 勝美, 酒井 克彦, 山崎 真明
    1999 年 65 巻 11 号 p. 1639-1644
    発行日: 1999/11/05
    公開日: 2009/04/10
    ジャーナル フリー
    In recent years, various micro machining processes have been developed to meet the demands for micro machines. In this study, the authors developed a method to form micro functional parts by a metal jet. A thin layer is, first formed by molten metal jet ejected through a nozzle and a second layer is formed on the first layer. The repetition of this process produces the 3-dimensional structures. In this paper, new modeling system that can make 3-dimensional structure from 3-D CAD data is demonstrated. Various 3-D and 2-D models made by this system are also presented. Further, in order to determine the mechanical properties of micro structures, using metal jet, micro tensile and micro shearing test were conducted and the connecting strength between two metal drops was measured. Experimental results show the connecting strength between drops has strong unisotropy.
  • エッジチッピング生成に及ぼす砥石ボンド材の影響
    佐藤 彰, 黒部 利次, 広崎 憲一
    1999 年 65 巻 11 号 p. 1645-1649
    発行日: 1999/11/05
    公開日: 2009/04/10
    ジャーナル フリー
    Edge-chipping yielded by grooving of ferrite using thin diamond blade is responsible for a deterioration of an electro-magnetic property of the magnetic head. Work damage such as chipping may be closely related to the mechanical property of bonding material of thin diamond blade. Edge-chipping yielded by grooving is examined using three types of thin diamond blade whose are made of metal, resin-metal and resin bonded materials. This paper focusses on the relationship between work damage and grinding force. Experiments show that chipping size is influenced by grinding conditions and mechanical property of bonding materials. It is found that the value of maximum normal grinding force per grain is made up of good correlation for edge-chipping size.
  • 瀧野 日出雄, 柴田 規夫, 伊藤 博, 小林 輝紀, 田中 宏明, 海老 正美, 山村 和也, 佐野 泰久, 森 勇藏
    1999 年 65 巻 11 号 p. 1650-1651
    発行日: 1999/11/05
    公開日: 2009/04/10
    ジャーナル フリー
  • 野村 俊, 神谷 和秀, 奥田 聖一, 宮代 裕, 吉田 孝富, 田代 発造, 吉川 和男
    1999 年 65 巻 11 号 p. 1652-1657
    発行日: 1999/11/05
    公開日: 2009/04/10
    ジャーナル フリー
    In order to manufacture zone-plates with a large aperture, a laser beam writer by using an ultra precision lathe is developed. To coincide the axis of rotation of the main spindle and the original point of the zone plates, two methods are proposed. In one method a moird technique is used, and in the other method a mirror with a small hemisphere at the center is used. To increase the precise of zone plates, the edge lines of zone-plate gratings are written from the outer skirts of a photo-plate to the center by the laser beam spot with a small size. After that, inside of the edge lines is written by a laser beam spot with a large size. The spot size is varied by displacement of a microscope objective with a PZT device. A zone plate with a diameter of 100 mm is manufactured with the laser beam writer. A primary mirror with a diameter of 200 mm is measured by the zone plate.
  • 軌跡制御におけるロボット工具先端精度の定量的推定
    古屋 信幸
    1999 年 65 巻 11 号 p. 1658-1662
    発行日: 1999/11/05
    公開日: 2009/04/10
    ジャーナル フリー
    In the robot control, many factors such as the control accuracy of servo motors, stiffness of the arm mechanism and the performance of the control algorithm have influence to the total accuracy of robot motion. So it is necessary to evaluate quantitatively the total control accuracy under such influences. Especially, in the Continuous Path control the error of the tool point path becomes larger in proportion to the motion speed. In the previous first paper, Multivariate Root Mean Square criterion is proposed and applied to estimate quantitatively the control accuracy of the robot and examination of quantized velocity and sampling period is executed. In this report the method is applied to evaluate the control accuracy of tool point path in CP motion and an estimation formula to calculate the tool point error from the deviation of joint deviation is introduced. Experimental results of SCARA type robot in circular interpolation are shown.
  • 測定原理と測定限界のシミュレーション結果
    横田 篤也, 山田 隆一, 柳 和久, 坂井 誠
    1999 年 65 巻 11 号 p. 1663-1667
    発行日: 1999/11/05
    公開日: 2009/04/10
    ジャーナル フリー
    Roundness measurement by mechanical V-block method is simple and widely used in industry. However, work surface to be measured may be scratched by the friction between the cylinder work and V-block support and the roundness evaluation is restricted to one cross section because it is based on the three-point measurement system. The optical V-block method by which perfect non-contact measurement can be achieved is proposed and its measuring principle is described in this paper. The measuring error and measurable wavelength/amplitude are made clear by geometrical consideration and some simulation results are presented. This system is also expandable to the cylindricity evaluation and its implementation is shown.
  • 金属面の光散乱シミュレーションとその検証
    聶 朝胤, 三好 隆志, 高谷 裕浩, 高橋 哲, 梁田 和雄
    1999 年 65 巻 11 号 p. 1668-1673
    発行日: 1999/11/05
    公開日: 2009/04/10
    ジャーナル フリー
    Many optical methods have been developed in non-contact 3D profile measuring fields, but these methods can not be used to measure the profile of a metal surface well, due to the influence of the specular reflection, steep slope and the roughness. In this paper a new optical displacement sensor called optical ring image sensor is presented. In order to verify the possibility applying this sensor to measure the profile shape of a metal surface, the light scattering characteristics of the metal surface are analyzed using computer simulation, and then the light intensity distribution detected by a CCD line sensor is investigated based on the theory of Kirchhoff diffraction. Furthermore, an experimental system of the sensor is constructed and the measuring experiments are carried out for a metal workpiece (S55C) with Rq=0.33μm. The experimental and theoretical results show that the sensor can be applied to measure the profile shape of a metal surface such as mold and die.
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