Laser welding technology is essential to fix the collimators and mechanical parts for robust optical components. However the operator for this work must have a special skill of laser trimming. Therefore we developed automatic laser trimming technique by contactless probing. It is achieved by using the regular-relation between the direction of tilt by welding distortion and the orientation of laser shoot. This system is consists of a pulsed YAG laser with three laser irradiation devices and an optical power monitor only as a simple configuration. As a result, the laser trimming time to produce the completed component was performed in 65 seconds.

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A lot of robots are operated in industry. In this paper, teleoperation system of industrial articulated robot arms is proposed. Both of the operation side and the work side, the industrial robot arms are used. In the operation side, the forcefree control technique is adopted for realization of the passive motion due to the influence of external force, and in the work side, the contour control is adopted for realization of the same motion of the robot arm in the operation side. The information of the motion of the robot in the operation side is sent to the work side through network. The method can realize replacement of the roles in the operation side and the work side only by changing the control techniques. The effectiveness of the proposed teleoperation system is confirmed by the experimental results using actual robot arms.

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A projection type moiré topography by liquid crystal (LC) modulators is proposed for measuring thee-dimensional surface profile. The moiré contour without any original gratings is captured by the CCD camera during the exposure time by moving the pair of LC gratings electrically. The interval of the moiré contour is easily variable by changing the period of original LC grating. The phase shifting technique is applied to this moiré pattern by changing the phase of the both LC gratings. Some experimental results are shown as a practical application.

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An uncertainty evaluation method with uncorrected deflection has been considered. We have discussed and classified three types of uncertainty evaluation with uncorrected deflection along a way of thinking of GUM. In addition, a scheme for improving the accuracy of the proposed uncertainty evaluation method is proposed. In the scheme, averaging effect for error distribution is utilized. We have experimentally confirmed the effectiveness of the proposed scheme in the uncertainty evaluation for the gauge block comparator.

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Timing belts are generally used in robotic arms. In servo systems, stiffness of the system is the most important property for its performance. In this paper, we describe a 1-DOF robotic arm which was designed with basis on a basal plate transfer robot. A purpose of this study is a comparison of a standard timing belt and a high-stiffness timing belt for oscillation damping. By using the high-stiffness belt, we can improve the performance of the oscillation damping. We conducted a torque feedback as a minor-loop of a position control in the next section. This method effectively reduced undesired vibrations with both the standard belt and the high-stiffness belt.

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The double-patterning lithography technology for next generation semiconductor manufacturing requires ultra high positioning stability such as under 0.5nm position drift between wafers. Conventional laser interferometers or optical grating encoders will not be adequate for that system. In the beginning of this study we quantify the requirements of the double-patterning lithography with Allan variance. This variance was developed for frequency oscillator stability tests. It can show the performance of stabilities related with operation time ranges in a quite understandable form. We evaluated the stability of our new concept scanning optical encoder using this variance.This new sensor is quite robust against electric and optical drift because of phase synchronous detection technology in a FPGA chip and a compensation grating in the optics. The compensation grating cancels most of outer disturbances such as laser wavelength changes or incident angle fluctuations of laser beams. Finally we conclude this new method improves low frequency drift performance of optical grating encoders. It will be adequate for next generation semiconductor manufacturing.

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A smart method for restoring 256 gray levels from some reduced gray levels of the given image is proposed. In the method, the restored value is estimated by averaging the neighboring sub-pixels which are generated by Sinc function beforehand. Moreover, the normalized correlation coefficient between the respective density histograms of input and output images are also proposed as the evaluation index that can qualify the outbreak of the degradation such as false contour. The image quality provided by the proposed method was experimentally excellent so that the false contour never occurred.

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This paper presents a new method to generate free-form curves and surfaces whose curvatures change smoothly. The smooth curvature changes are realized by reconstructing connection points and minimizing the measure related to smoothness of curvature change. Connection points of generated curves and surfaces are reconstructed based on the discrete geometry models. The free parameters of generated curves and surfaces are determined by numerical optimization of the function that expresses the smoothness of curvature change. NURBS curves and surfaces with smooth curvature change are generated by this method. The generated curves and surfaces pass near the points specified by a designer.

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A disposable magnetically levitated centrifugal blood pump, which aims to be used for from a few days to a few months, has been developed. An impeller is levitated and rotated without contact using a two-degree-of-freedom radial magnetic bearing and a magnetic coupling. Due to ‘out-of-step’ of the magnetic coupling caused by its insufficient transmittable torque, a previous prototype pump could not yield the required pressure-flow characteristics of 5 L/min against 106 kPa (800 mmHg). The magnetic coupling was redesigned in order to increase the transmittable torque. The stability of the impeller levitation against impact was evaluated through a base excitation test simulating animal experiment and practical use. Applying an impulse excitation of an acceleration of 200 m/s², the impeller could keep contactless levitation both in the controlled direction and in the passively supported directions. Finally, the animal experiments for one to two weeks showed that no damage and no thrombus formation were found in the pump heads.

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This study describes the fundamental study of vibration stimulation recognition through tactile sensing using human fingers. The purpose of this study is to show the relationship between human tactile sensing and various kinds of vibration stimulations. In this study, the SD method (Semantic Differential method) is used to execute the language estimation of the vibration stimulation occurred through the vibration simulation system. The experiment results obtained through the SD method was analyzed using PCA (Principal Component Analysis). From the result, it is learned that the language estimation of tactile sensing on vibration stimulation can be classified into four categories according to the response of tactile sensing. Moreover, the recognition of tactile sensing is showed by the relationship between the frequency of vibration stimulation and the evaluation value.

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Paying attention to high pressure micro jet (HPMJ) as a method of non-destructive conditioning in CMP for silicon wafers, we have executed experiments of CMP for silicon wafers using 2 types of textile pads and their conditioning. 2 types means unwoven cloth type now being widely used for silicon CMP and micro fiber cloth type being expected as the pad for next generation. There are problems in CMP using textile pads, at their conditioning; i.e., diamond dressing causes shorter pad life and brushing gives insufficient effect.
After surveying relation between the conditioning by HPMJ and pad types as well as CMP characteristics by each type of pads through the experiments, it is found that the HPMJ conditioning gives both types of pad an improved removal rates. It is also found, however that such effectiveness varies by type of the pad, especially by its hardness.
As the conditioning by HPMJ is non-destructive, it gives effect of longer pad life in CMP of silicon wafers by textile pads and may be expected as the effective conditioning method.

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Recently, in accordance with the technical development and miniaturization of the information equipments, the demand of optic elements with high precision and miniaturization is increased. The die is used in the manufacture of the optic elements. Thus, it is needed to machine the die with high efficiency and high precision. As the material of mold, hard material including cemented carbide and ceramics is used. However, when hard material is machined, it is a problem of the occurrence of brittle fracture and hard tool wear. Tools with chamfer are used in the machining of hard material to reduce tool wear. However, there is a serious problem that the rake angle is not constant along the edge of the conventional R-shape tool with chamfer since the tool shape is like ellipse, it is difficult to machine hard materials with high precision. To solve this problem, a special tool with chamfer is developed. The study proposes a new microgrooving method with tool wear suppressed by the special tool with chamfer. The effectiveness is verified by the microgrooving experiment of SiC.

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A preliminary study on laser structuring of thin metal film on shadowed surface of molded interconnect devices (MID) was carried out. For this purpose, a structuring method that removes metal film that is deposited on transparent plastic by laser irradiation shooting the film not directly but through the plastic is proposed. Several tests using copper film of 0.3μm in thickness deposited on cycloolefine copolymer (COC) plates and THG-YAG laser were performed. With respect to preciseness of structuring, the new method was not inferior to normal direct shooting. Though estimated temperature rise by absorption of the laser by the plastic is such a small value of 0.74K due to high transparency of the plastic, it was damaged along the laser flight path. The damage can be categorized into three groups. One occurs on the whole flight path. This type of damage reduces as laser power is decreased, and an intensity that eliminates the damage without sacrificing quality of structuring was found. Another occurs in places on the path. This is also reduced as the laser power is decreased, but we did not find a laser power that can prevent this damage and provides correct structuring at the same time. The other one was found on the plastic surface from which the thin film has been removed. However, this type of damage is even milder than the case of conventional laser structuring.

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