SiC layer was uniformly deposited on the heated graphite substrate at 1100-1500°C, which was lower than the temperature used in earlier method, by means of the decomposition of Si(CH
3)
4 with glow discharge. The surface of SiC layer had a characteristic domed structrure. This layer had a relative density of 90-94%, and showed good adherence to the graphite substrate. When the substrate temperature was 1300°C, the thickness of SiC layer increased up to 300μm at relatively fast flow rate of Si(CH
3)
4 (2.0×10
-3mol/min). On the other hand, relatively slow rate of Si(CH
3)
4 (2.8×10
-4mol/min) was required for obtaining a hard SiC layer, of which maximum vickers hardness was measured to be 6000kg/mm
2. The hardness was not concerned with the crystallinity of SiC, but with Si/C ratio in the layer. It is considered that the formation process of the SiC layer consists of two stages; that is, (I) the radical condensation of Si(CH
3)
4 by the glow discharge, (II) the condensation and sintering on the substrate by the heat energy. In order to obtain a hard layer of SiC, it is required to supply Si(CH
3)
4 with slow rate of 2.8×10
-4 mol/min to be proceeded the reaction completely, especially at the temperature below 1300°C.
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