Using an IMA (Ion Micro-probe Mass Analyzer) secondary ion emissions from, Ni, Mn, and Cu surfaces were measured and the influence of gas adsorption on the secondary ion yield was studied. Argon primary ion beam of 10 KeV was used. The relative secondary ion yields were found to be 1, O. 25, and O. 24 for Ni, Mn, and Cu, respectively. The presence of some adsorbates on metal surfaces affects on the work function of metals, and hence the secondary ion yield is considered to suffer the influence. The adsorbate layers are, however, removed by the bombardment of the primary ions. It was found that higher beam power is required to remove the adsorbate layer on Cu surface than to remove the layer on Ni Surface.
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