真空
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
22 巻, 5 号
選択された号の論文の3件中1~3を表示しています
  • 生地 文也, 尾浦 憲次郎, 塙 輝雄
    1979 年 22 巻 5 号 p. 179-184
    発行日: 1979/05/20
    公開日: 2009/09/04
    ジャーナル フリー
    A UHV apparatus has been constructed, which allows surface analysis by ISS (Ion Scattering Spectroscopy), LEED and AES. This paper describes the ISS system of the apparatus. A B-A gauge type ion gun, which is used to produce noble gas ions, is operated at the pressure of 1 × 10-4 Torr with wide energy range (350' 3000 eV). The accelerated ion beam passes through the magnetic sector mass spectrometer (R=11.5 cm, φ=-60°, MM=20) and the lens system. The scattered and secondary ions are energy-analysed by the cylindrical sector analyser (RR=4.5 cm, φ=127°, EE=100). The analyser allows energy analysis in the range of scattering angles from 0° to 95°. The base pressure in the sample chamber is 2 × 10-10 Torr, and the working pressures during ISS experiment are 8 × 10 -10 Torr for Ne ions and 1 × 10-9 Torr for He ions, respectively.
    A special specimen manipulator was devised to meet the requirement of the multiple measurement.
    Some preliminaly experimental results from a InSb (111) surface are presented.
  • 四方 道治, 山崎 泰規, 志水 隆一, 田中 高穂, 河合 七雄
    1979 年 22 巻 5 号 p. 185-189
    発行日: 1979/05/20
    公開日: 2009/09/04
    ジャーナル フリー
    A stable and compact Pierce-type electron gun has been developed as a highly practical electron source of high beam intensity.
    This Pierce-type gun has LaB6 cathode of 2 mm in diameter and 7 mm in length with Ta ribbon heaters for electron bombardment. Using single-crystal LaB6 we have obtained beam current of 1.5 mA at 300 V with beam diameter 2.5 mm, by supplying only 15 watt for cathode heating. The gun assembly is so compact that no cooling facility is needed. Current stability within 1% can easily be obtained in vacuum better than low 10-6 Torr for single-crystal LaB6, however one needs much better vacuum for sintered LaB6 to get the same stability.
    The efficiency of 90% has been attained by the present Pierce-type gun with LaB6 cathode even at 300 V.
  • 阿部 仁志
    1979 年 22 巻 5 号 p. 190-200
    発行日: 1979/05/20
    公開日: 2009/09/04
    ジャーナル フリー
    Solid gas layers condensed under suitable conditions, have a large pore volume which accesible for adsorbates as He, H2, D2 and Ne. The surface area of these pores exceeds the geometrical surface (200 m2/gram sorbent). As a function of forming conditions such a surface area was measured by different adsorption theories and the validity of B.E.T. and D.R.K. theories for surface area determination of solid gas layers was examined by D2 as an adsorbate. Optimum forming temperatures were 6 K, 10 K and 14 K for Ar, Kr and Xe, respectively. This effect was used to pump out He, H2 and D2 with a high speed. The influences of the pumping speed for these gases was measured as a parameter of sorption temperature, adsorbed quantity and different sorbent gas layers. One mole SF6 can adsorbe approximately 0.3 mole H2 at a relative pumping speed S/S0_??_0.7.
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