A UHV apparatus has been constructed, which allows surface analysis by ISS (Ion Scattering Spectroscopy), LEED and AES. This paper describes the ISS system of the apparatus. A B-A gauge type ion gun, which is used to produce noble gas ions, is operated at the pressure of 1 × 10
-4 Torr with wide energy range (350' 3000 eV). The accelerated ion beam passes through the magnetic sector mass spectrometer (
R=11.5 cm, φ=-60°,
M/Δ
M=20) and the lens system. The scattered and secondary ions are energy-analysed by the cylindrical sector analyser (
RR=4.5 cm, φ=127°,
E/Δ
E=100). The analyser allows energy analysis in the range of scattering angles from 0° to 95°. The base pressure in the sample chamber is 2 × 10
-10 Torr, and the working pressures during ISS experiment are 8 × 10
-10 Torr for Ne ions and 1 × 10
-9 Torr for He ions, respectively.
A special specimen manipulator was devised to meet the requirement of the multiple measurement.
Some preliminaly experimental results from a InSb (111) surface are presented.
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